Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP6531896Aexternal-prioritypatent/JP3598642B2/ja
Application filed by Shin Etsu Handotai Co LtdfiledCriticalShin Etsu Handotai Co Ltd
Application grantedgrantedCritical
Publication of DE69702219D1publicationCriticalpatent/DE69702219D1/de
Publication of DE69702219T2publicationCriticalpatent/DE69702219T2/de
DE19976022191996-02-271997-02-24Verfahren zur Herstellung Silizium-Einkristalle durch das kontinuierlichen Czochralski-Verfahren
Expired - Fee RelatedDE69702219T2
(de)