DE69631362D1 - Vorrichtung zur Schwingungsdämpfung - Google Patents

Vorrichtung zur Schwingungsdämpfung

Info

Publication number
DE69631362D1
DE69631362D1 DE69631362T DE69631362T DE69631362D1 DE 69631362 D1 DE69631362 D1 DE 69631362D1 DE 69631362 T DE69631362 T DE 69631362T DE 69631362 T DE69631362 T DE 69631362T DE 69631362 D1 DE69631362 D1 DE 69631362D1
Authority
DE
Germany
Prior art keywords
vibration damping
damping device
vibration
damping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69631362T
Other languages
English (en)
Other versions
DE69631362T2 (de
Inventor
Katsuhide Watanabe
Yoichi Kanemitsu
Takahide Haga
Mamoru Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP7282640A external-priority patent/JP3042763B2/ja
Priority claimed from JP35395695A external-priority patent/JPH09177879A/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of DE69631362D1 publication Critical patent/DE69631362D1/de
Application granted granted Critical
Publication of DE69631362T2 publication Critical patent/DE69631362T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
DE69631362T 1995-10-04 1996-10-02 Vorrichtung zur Schwingungsdämpfung Expired - Fee Related DE69631362T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP28264095 1995-10-04
JP7282640A JP3042763B2 (ja) 1995-10-04 1995-10-04 除振装置
JP35395695A JPH09177879A (ja) 1995-12-27 1995-12-27 除振装置
JP35395695 1995-12-27

Publications (2)

Publication Number Publication Date
DE69631362D1 true DE69631362D1 (de) 2004-02-26
DE69631362T2 DE69631362T2 (de) 2004-11-04

Family

ID=26554689

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69631362T Expired - Fee Related DE69631362T2 (de) 1995-10-04 1996-10-02 Vorrichtung zur Schwingungsdämpfung

Country Status (3)

Country Link
US (1) US5765800A (de)
EP (1) EP0767320B1 (de)
DE (1) DE69631362T2 (de)

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CN112049884A (zh) * 2020-08-19 2020-12-08 吴庆祝 一种防卡死弹簧组

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US7320455B2 (en) * 2003-10-24 2008-01-22 Newport Corporation Instrumented platform for vibration-sensitive equipment
JP2005282696A (ja) * 2004-03-29 2005-10-13 Canon Inc 除振マウント装置、露光装置及びデバイス製造方法
US7175150B2 (en) * 2004-05-24 2007-02-13 Mitac Technology Corp. Compound vibration damper assembly
US8231098B2 (en) * 2004-12-07 2012-07-31 Newport Corporation Methods and devices for active vibration damping of an optical structure
US8276873B2 (en) * 2004-10-22 2012-10-02 Newport Corporation Instrumented platform for vibration-sensitive equipment
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CA2532263C (en) * 2005-12-22 2011-07-05 Amanda Beatty Support structure for a cargo deck of a transport vehicle
DE202006020532U1 (de) * 2006-08-10 2008-11-13 Rittal Gmbh & Co. Kg Palette
JP5033844B2 (ja) 2009-06-30 2012-09-26 株式会社日立ハイテクノロジーズ イオン顕微鏡
KR101364289B1 (ko) * 2009-07-30 2014-02-18 가부시키가이샤 히다치 하이테크놀로지즈 주사 전자 현미경
WO2011146959A1 (en) 2010-05-28 2011-12-01 Nega-Shock Pty Limited Vibration dampening device
JP5537386B2 (ja) * 2010-11-09 2014-07-02 株式会社日立ハイテクノロジーズ 荷電粒子線装置
KR101910215B1 (ko) 2010-12-29 2018-12-19 뉴포트 코포레이션 동조 가능한 진동 댐퍼，및 제조 및 동조 방법
CA2825829C (en) * 2011-02-09 2018-08-21 Nega-Shock Pty Limited Vibration dampening device
CN102748425A (zh) * 2012-06-15 2012-10-24 中国人民解放军海军工程大学 主被动混合隔振器
CN103047358B (zh) * 2012-12-19 2014-12-24 哈尔滨工业大学 共面气浮正交解耦与滑动关节轴承角度解耦的电涡流阻尼隔振器
CN103047357B (zh) * 2012-12-19 2014-12-24 哈尔滨工业大学 双层气浮正交解耦与滑动关节轴承角度解耦的电涡流阻尼隔振器
CN103486194B (zh) * 2013-09-30 2015-06-10 山东大学 一种仿啄木鸟头部生理结构的高效被动隔减振平台
US9227757B1 (en) * 2014-07-28 2016-01-05 Lenovo Enterprise Solutions (Singapore) Pte. Ltd. Shielded pallet
CN104481962B (zh) * 2014-12-10 2017-04-26 南京工程学院 薄膜式液压激振器振动台
CN105202325B (zh) * 2015-10-30 2017-12-29 上海交通大学 一种大行程单自由度气浮磁驱动纳米定位平台
US9950834B2 (en) * 2016-03-04 2018-04-24 Dell Products L.P. Rack delivery system
JP6633986B2 (ja) * 2016-07-20 2020-01-22 株式会社日立ハイテクノロジーズ 荷電粒子線装置
CA2950508A1 (en) 2016-12-02 2018-06-02 National Research Council Of Canada Compact vibration reducing human support
CN106840225B (zh) * 2017-01-24 2019-11-29 广东工业大学 用于绝对式光栅尺的一体化振动控制系统及方法
KR20180093325A (ko) * 2017-02-13 2018-08-22 삼성전자주식회사 본딩 장치
DE102017116400A1 (de) * 2017-07-20 2019-01-24 Logicdata Electronic & Software Entwicklungs Gmbh Elektrisch verstellbares Tischsystem
DE102017128230A1 (de) * 2017-11-29 2019-05-29 Spaleck GmbH & Co. Kommanditgesellschaft Lagereinrichtung für eine Schwingmaschine, Schwingmaschine und Verfahren zum Betreiben einer Schwingmaschine
CN110458785B (zh) * 2019-08-16 2020-04-28 西南交通大学 一种基于图像传感的磁悬浮球悬浮间隙检测方法
CN110701244B (zh) * 2019-09-09 2021-03-16 吉林大学 一种具有失效保护的隔振搭载平台及失效保护方法
CN111398633B (zh) * 2020-04-01 2021-05-11 中国科学院地质与地球物理研究所 一种高精度加速度传感器本底噪声的测试装置及测试方法
CN111398632B (zh) * 2020-04-01 2021-08-03 中国科学院地质与地球物理研究所 一种加速度传感器本底噪声的测试装置及测试方法
CN112943843A (zh) * 2021-02-23 2021-06-11 常州大学 一种仿生隔振系统
CN113309954B (zh) * 2021-05-28 2022-06-21 重庆师范大学 一种水陆空三用全景拍摄云台
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CN113884004A (zh) * 2021-09-08 2022-01-04 长江存储科技有限责任公司 特征尺寸测量用扫描电镜的气浮系统和扫描电镜
CN116464168A (zh) * 2023-03-20 2023-07-21 广州大学 一种可调动刚度的隔振支座及其安装方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112049884A (zh) * 2020-08-19 2020-12-08 吴庆祝 一种防卡死弹簧组

Also Published As

Publication number Publication date
EP0767320A2 (de) 1997-04-09
US5765800A (en) 1998-06-16
EP0767320B1 (de) 2004-01-21
EP0767320A3 (de) 1999-07-14
DE69631362T2 (de) 2004-11-04

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee