DE69622721T2 - Ellipsometer mit hoher räumlicher auflösung - Google Patents

Ellipsometer mit hoher räumlicher auflösung

Info

Publication number
DE69622721T2
DE69622721T2 DE69622721T DE69622721T DE69622721T2 DE 69622721 T2 DE69622721 T2 DE 69622721T2 DE 69622721 T DE69622721 T DE 69622721T DE 69622721 T DE69622721 T DE 69622721T DE 69622721 T2 DE69622721 T2 DE 69622721T2
Authority
DE
Germany
Prior art keywords
focusing
pct
optical system
sample
sec
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69622721T
Other languages
English (en)
Other versions
DE69622721D1 (de
Inventor
Jean-Philippe Piel
Jean-Louis Stehle
Dorian Zahorski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PRODUCTION ET DE RECH S APPLIQ
Original Assignee
PRODUCTION ET DE RECH S APPLIQ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PRODUCTION ET DE RECH S APPLIQ filed Critical PRODUCTION ET DE RECH S APPLIQ
Application granted granted Critical
Publication of DE69622721D1 publication Critical patent/DE69622721D1/de
Publication of DE69622721T2 publication Critical patent/DE69622721T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
DE69622721T 1995-08-11 1996-07-03 Ellipsometer mit hoher räumlicher auflösung Expired - Lifetime DE69622721T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9509779A FR2737779B1 (fr) 1995-08-11 1995-08-11 Dispositif ellipsometre a haute resolution spatiale
PCT/FR1996/001035 WO1997007392A1 (fr) 1995-08-11 1996-07-03 Dispositif ellipsometre a haute resolution spatiale

Publications (2)

Publication Number Publication Date
DE69622721D1 DE69622721D1 (de) 2002-09-05
DE69622721T2 true DE69622721T2 (de) 2003-03-20

Family

ID=9481899

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69622721T Expired - Lifetime DE69622721T2 (de) 1995-08-11 1996-07-03 Ellipsometer mit hoher räumlicher auflösung

Country Status (9)

Country Link
US (1) US5991037A (de)
EP (1) EP0843811B1 (de)
JP (1) JPH11510897A (de)
KR (1) KR100406108B1 (de)
AT (1) ATE221653T1 (de)
CA (1) CA2224999A1 (de)
DE (1) DE69622721T2 (de)
FR (1) FR2737779B1 (de)
WO (1) WO1997007392A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2737806B1 (fr) * 1995-08-11 1997-09-12 Soc D Production Et De Rech Ap Dispositif et procede de traitement de surface par laser
FR2809491B1 (fr) * 2000-05-26 2008-07-04 Production Rech S Appliquees Procede et appareil de metrologie ellipsometrique pour echantillon contenu dans une chambre ou analogue
FR2811761B1 (fr) * 2000-07-17 2002-10-11 Production Rech S Appliquees Ellipsometre a haute resolution spatiale fonctionnant dans l'infrarouge
DE102004059186A1 (de) * 2004-12-08 2006-06-14 Byk Gardner Gmbh Verfahren und Vorrichtung zur ortsauflösenden Bewertung von Oberflächeneigenschaften
US7369235B1 (en) 2005-06-24 2008-05-06 Kla-Tencor Corporation Method and system for measuring deep trenches in silicon
WO2007005489A2 (en) * 2005-07-05 2007-01-11 Mattson Technology, Inc. Method and system for determining optical properties of semiconductor wafers
JP4950813B2 (ja) * 2007-08-30 2012-06-13 大日本スクリーン製造株式会社 分光エリプソメータ、膜厚測定装置および分光エリプソメータのフォーカス調整方法
JP2009068937A (ja) * 2007-09-12 2009-04-02 Dainippon Screen Mfg Co Ltd 分光エリプソメータおよび膜厚測定装置
US20100059657A1 (en) * 2008-09-05 2010-03-11 Nikon Corporation System and Method Producing Data For Correcting Autofocus Error in An Imaging Optical System
CN107917665B (zh) * 2016-10-09 2020-02-11 睿励科学仪器（上海）有限公司 用于确定光斑位置的方法和设备
CN116136488B (zh) * 2023-04-19 2023-07-18 中国科学技术大学 椭偏测量系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5329357A (en) * 1986-03-06 1994-07-12 Sopra-Societe De Production Et De Recherches Appliquees Spectroscopic ellipsometry apparatus including an optical fiber
FR2595471B1 (fr) * 1986-03-06 1988-06-10 Production Rech Appliquees Dispositif d'ellipsometrie spectroscopique a fibres optiques
FR2602338B1 (fr) * 1986-07-30 1989-06-30 Centre Nat Rech Scient Ellipsometre a modulation de phase fonctionnant dans l'infrarouge
JPH06103252B2 (ja) * 1989-05-04 1994-12-14 サーマ―ウェイブ・インク 高分解能エリプソメータ装置と方法
US5166752A (en) * 1990-01-11 1992-11-24 Rudolph Research Corporation Simultaneous multiple angle/multiple wavelength ellipsometer and method
US5742426A (en) * 1995-05-25 1998-04-21 York; Kenneth K. Laser beam treatment pattern smoothing device and laser beam treatment pattern modulator

Also Published As

Publication number Publication date
KR19990036246A (ko) 1999-05-25
CA2224999A1 (en) 1997-02-27
EP0843811A1 (de) 1998-05-27
KR100406108B1 (ko) 2004-03-26
JPH11510897A (ja) 1999-09-21
US5991037A (en) 1999-11-23
EP0843811B1 (de) 2002-07-31
WO1997007392A1 (fr) 1997-02-27
DE69622721D1 (de) 2002-09-05
FR2737779A1 (fr) 1997-02-14
FR2737779B1 (fr) 1997-09-12
ATE221653T1 (de) 2002-08-15

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