DE69608722D1 - Verfahren zur Herstellung eines piezoelektrischen Schichtelementes - Google Patents
Verfahren zur Herstellung eines piezoelektrischen SchichtelementesInfo
- Publication number
- DE69608722D1 DE69608722D1 DE69608722T DE69608722T DE69608722D1 DE 69608722 D1 DE69608722 D1 DE 69608722D1 DE 69608722 T DE69608722 T DE 69608722T DE 69608722 T DE69608722 T DE 69608722T DE 69608722 D1 DE69608722 D1 DE 69608722D1
- Authority
- DE
- Germany
- Prior art keywords
- producing
- piezoelectric layer
- layer element
- piezoelectric
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
- H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5701995A JPH08252920A (ja) | 1995-03-16 | 1995-03-16 | 積層型圧電素子の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69608722D1 true DE69608722D1 (de) | 2000-07-13 |
DE69608722T2 DE69608722T2 (de) | 2000-10-05 |
Family
ID=13043732
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69608722T Expired - Lifetime DE69608722T2 (de) | 1995-03-16 | 1996-03-15 | Verfahren zur Herstellung eines piezoelektrischen Schichtelementes |
Country Status (4)
Country | Link |
---|---|
US (1) | US5639508A (de) |
EP (1) | EP0732209B1 (de) |
JP (1) | JPH08252920A (de) |
DE (1) | DE69608722T2 (de) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08187848A (ja) * | 1995-01-12 | 1996-07-23 | Brother Ind Ltd | 積層式圧電素子およびその製造方法 |
JP3663652B2 (ja) * | 1995-02-13 | 2005-06-22 | ブラザー工業株式会社 | インクジェットプリンタヘッド |
JP3267171B2 (ja) * | 1996-09-12 | 2002-03-18 | 株式会社村田製作所 | 圧電共振子およびそれを用いた電子部品 |
JP3365224B2 (ja) * | 1996-10-24 | 2003-01-08 | セイコーエプソン株式会社 | インクジェット式記録ヘッドの製造方法 |
KR100209515B1 (ko) * | 1997-02-05 | 1999-07-15 | 윤종용 | 자성잉크를 이용한 잉크젯 프린터의 분사 장치 및 방법 |
JP3271540B2 (ja) * | 1997-02-06 | 2002-04-02 | ミノルタ株式会社 | インクジェット記録装置 |
US6053602A (en) * | 1997-02-28 | 2000-04-25 | Hitachi Koki Company Ltd. | On-demand multi-nozzle ink jet head |
JP3575239B2 (ja) * | 1997-08-05 | 2004-10-13 | ブラザー工業株式会社 | インクジェットヘッド及びその製造方法 |
DE69815247T2 (de) * | 1997-10-13 | 2004-05-06 | Sagem S.A. | Verstärker-Antrieb mit aktiven Materialien |
US6291932B1 (en) * | 1998-02-17 | 2001-09-18 | Canon Kabushiki Kaisha | Stacked piezoelectric element and producing method therefor |
CN1329196C (zh) * | 1998-02-18 | 2007-08-01 | 索尼株式会社 | 压电致动器及其制造方法和喷墨打印头 |
JP3780700B2 (ja) * | 1998-05-26 | 2006-05-31 | セイコーエプソン株式会社 | パターン形成方法、パターン形成装置、パターン形成用版、パターン形成用版の製造方法、カラーフィルタの製造方法、導電膜の製造方法及び液晶パネルの製造方法 |
US6367132B2 (en) * | 1998-08-31 | 2002-04-09 | Eastman Kodak Company | Method of making a print head |
US6572830B1 (en) | 1998-10-09 | 2003-06-03 | Motorola, Inc. | Integrated multilayered microfludic devices and methods for making the same |
US6592696B1 (en) | 1998-10-09 | 2003-07-15 | Motorola, Inc. | Method for fabricating a multilayered structure and the structures formed by the method |
DE19850610A1 (de) * | 1998-11-03 | 2000-05-04 | Bosch Gmbh Robert | Verfahren zur Herstellung piezoelektrischer Aktoren |
JP4240245B2 (ja) * | 1998-12-15 | 2009-03-18 | 富士フイルム株式会社 | インクジェットプリンタヘッド及びインクジェットプリンタ |
JP2000270574A (ja) * | 1999-03-16 | 2000-09-29 | Seiko Instruments Inc | 圧電アクチュエータおよびその製造方法 |
US6447887B1 (en) | 1999-09-14 | 2002-09-10 | Virginia Tech Intellectual Properties, Inc. | Electrostrictive and piezoelectric thin film assemblies and method of fabrication therefor |
JP3716724B2 (ja) * | 1999-09-30 | 2005-11-16 | ブラザー工業株式会社 | 圧電式インクジェットプリンタヘッドの圧電アクチュエータ及びその製造方法 |
JP3956607B2 (ja) * | 2000-10-26 | 2007-08-08 | ブラザー工業株式会社 | 圧電式インクジェットプリンタヘッド及び圧電式インクジェットプリンタヘッドの製造方法 |
JP4042442B2 (ja) * | 2001-03-29 | 2008-02-06 | ブラザー工業株式会社 | 圧電トランスデューサおよび液滴噴射装置 |
JP4296738B2 (ja) * | 2001-11-30 | 2009-07-15 | ブラザー工業株式会社 | インクジェットヘッド |
JP4059116B2 (ja) * | 2003-03-20 | 2008-03-12 | ブラザー工業株式会社 | インクジェットヘッド及びその製造方法 |
JP4842520B2 (ja) * | 2003-05-30 | 2011-12-21 | 日本碍子株式会社 | セル駆動型圧電/電歪アクチュエータ及びその製造方法 |
JP2005014506A (ja) * | 2003-06-27 | 2005-01-20 | Ricoh Printing Systems Ltd | インクジェットヘッド及びインクジェット式記録装置 |
US7201473B2 (en) * | 2003-06-30 | 2007-04-10 | Brother Kogyo Kabushiki Kaisha | Inkjet printing head |
JP4525094B2 (ja) * | 2004-01-30 | 2010-08-18 | ブラザー工業株式会社 | インクジェットヘッドの製造方法 |
JP5512065B2 (ja) * | 2005-02-08 | 2014-06-04 | Tdk株式会社 | 圧電セラミック素子 |
US20070093698A1 (en) * | 2005-10-20 | 2007-04-26 | Glucon Inc. | Apparatus and methods for attaching a device to a body |
US20070093717A1 (en) * | 2005-10-20 | 2007-04-26 | Glucon Inc. | Wearable glucometer configurations |
US8113635B2 (en) * | 2007-01-16 | 2012-02-14 | Brother Kogyo Kabushiki Kaisha | Liquid discharge apparatus and check method of the same |
JP5181914B2 (ja) * | 2008-08-08 | 2013-04-10 | ブラザー工業株式会社 | 位置決め方法 |
US8813324B2 (en) | 2010-03-24 | 2014-08-26 | Western Digital (Fremont), Llc | Method for providing a piezoelectric multilayer |
DE102011003680A1 (de) | 2011-02-07 | 2012-08-09 | Robert Bosch Gmbh | Verfahren zur Herstellung von piezoelektrischen Werkstücken |
KR101328345B1 (ko) * | 2011-08-29 | 2013-11-11 | 삼성전기주식회사 | 압전체 조성물, 압전 소자, 잉크젯 프린트 헤드 및 압전 소자와 잉크젯 프린터 헤드의 제조방법 |
KR101537939B1 (ko) * | 2013-12-04 | 2015-07-20 | 한국세라믹기술원 | 압전 세라믹 파이버 적층형 복합소자 및 그 제조방법 |
US10680161B1 (en) | 2017-03-29 | 2020-06-09 | Apple Inc. | Electronic Devices with Piezoelectric Ink |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3378393D1 (en) * | 1982-05-11 | 1988-12-08 | Nec Corp | Multilayer electrostrictive element which withstands repeated application of pulses |
JPS6127688A (ja) * | 1984-07-02 | 1986-02-07 | Nec Corp | 電歪効果素子およびその製造方法 |
JPS62133777A (ja) * | 1985-12-05 | 1987-06-16 | Hitachi Metals Ltd | 積層型圧電素子およびその製造方法 |
ES2087089T3 (es) * | 1989-11-14 | 1996-07-16 | Battelle Memorial Institute | Metodo para fabricar un accionador piezoelectrico apilado multicapa. |
JP3041952B2 (ja) * | 1990-02-23 | 2000-05-15 | セイコーエプソン株式会社 | インクジェット式記録ヘッド、圧電振動体、及びこれらの製造方法 |
US5402159A (en) * | 1990-03-26 | 1995-03-28 | Brother Kogyo Kabushiki Kaisha | Piezoelectric ink jet printer using laminated piezoelectric actuator |
JP2913806B2 (ja) * | 1990-09-14 | 1999-06-28 | ブラザー工業株式会社 | 圧電式インクジェットプリンタヘッド |
JP3045531B2 (ja) * | 1990-10-01 | 2000-05-29 | 日立金属株式会社 | 積層型変位素子 |
JP2836332B2 (ja) * | 1991-12-20 | 1998-12-14 | 日本電気株式会社 | 積層圧電アクチュエータ素子の製造方法 |
JP3257151B2 (ja) * | 1993-06-18 | 2002-02-18 | 東ソー株式会社 | 熱可塑性エラストマー組成物及びその製造法 |
JPH0757545B2 (ja) * | 1993-07-19 | 1995-06-21 | セイコーエプソン株式会社 | インクジェットヘッド及びその製造方法 |
JP3088890B2 (ja) * | 1994-02-04 | 2000-09-18 | 日本碍子株式会社 | 圧電/電歪膜型アクチュエータ |
-
1995
- 1995-03-16 JP JP5701995A patent/JPH08252920A/ja active Pending
-
1996
- 1996-03-11 US US08/613,662 patent/US5639508A/en not_active Expired - Lifetime
- 1996-03-15 EP EP96301786A patent/EP0732209B1/de not_active Expired - Lifetime
- 1996-03-15 DE DE69608722T patent/DE69608722T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0732209A2 (de) | 1996-09-18 |
US5639508A (en) | 1997-06-17 |
JPH08252920A (ja) | 1996-10-01 |
DE69608722T2 (de) | 2000-10-05 |
EP0732209A3 (de) | 1998-01-07 |
EP0732209B1 (de) | 2000-06-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |