DE69604455D1 - Einkristallziehvorrichtung - Google Patents
EinkristallziehvorrichtungInfo
- Publication number
- DE69604455D1 DE69604455D1 DE69604455T DE69604455T DE69604455D1 DE 69604455 D1 DE69604455 D1 DE 69604455D1 DE 69604455 T DE69604455 T DE 69604455T DE 69604455 T DE69604455 T DE 69604455T DE 69604455 D1 DE69604455 D1 DE 69604455D1
- Authority
- DE
- Germany
- Prior art keywords
- single crystal
- crystal puller
- puller
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013078 crystal Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7191087A JP3041670B2 (ja) | 1995-07-04 | 1995-07-04 | 単結晶引上げ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69604455D1 true DE69604455D1 (de) | 1999-11-04 |
DE69604455T2 DE69604455T2 (de) | 2000-04-13 |
Family
ID=16268648
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69604455T Expired - Fee Related DE69604455T2 (de) | 1995-07-04 | 1996-07-03 | Einkristallziehvorrichtung |
Country Status (4)
Country | Link |
---|---|
US (1) | US5735951A (de) |
EP (1) | EP0752488B1 (de) |
JP (1) | JP3041670B2 (de) |
DE (1) | DE69604455T2 (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050126473A1 (en) * | 2002-04-02 | 2005-06-16 | Prescott Margaret F. | Device for pulling monocrystals |
KR100955221B1 (ko) * | 2007-10-05 | 2010-04-29 | 주식회사 글로실 | 힌지를 이용한 도어 개폐장치가 구비된 태양전지용 다결정실리콘 주괴 제조 장치 |
EP3488815B1 (de) | 2009-08-04 | 2023-10-18 | Pollogen Ltd | Kosmetische hautverjüngung |
US11590346B2 (en) | 2009-11-16 | 2023-02-28 | Pollogen Ltd. | Apparatus and method for cosmetic treatment of human mucosal tissue |
AU2010317380B2 (en) | 2009-11-16 | 2016-02-11 | Pollogen Ltd. | Non-invasive fat removal |
JP2012101965A (ja) * | 2010-11-09 | 2012-05-31 | Matels Inc | 熱遮蔽機 |
KR101332271B1 (ko) * | 2011-07-26 | 2013-11-22 | 주식회사 케이씨씨 | 사파이어 단결정 성장 장치 |
CN102517627B (zh) * | 2011-12-20 | 2014-05-14 | 北京京仪世纪电子股份有限公司 | 水冷轴结构 |
KR101466061B1 (ko) * | 2013-06-14 | 2014-11-28 | 한국생산기술연구원 | 분리형 씨드 투입 장치 |
CN113337884A (zh) * | 2020-03-03 | 2021-09-03 | 隆基绿能科技股份有限公司 | 一种单晶炉加料系统 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4350560A (en) * | 1981-08-07 | 1982-09-21 | Ferrofluidics Corporation | Apparatus for and method of handling crystals from crystal-growing furnaces |
JPH01246191A (ja) * | 1988-03-26 | 1989-10-02 | Toshiba Ceramics Co Ltd | 単結晶引上装置 |
JP2628370B2 (ja) * | 1989-03-24 | 1997-07-09 | 信越半導体 株式会社 | 単結晶引上装置 |
JPH04260686A (ja) * | 1991-02-08 | 1992-09-16 | Shin Etsu Handotai Co Ltd | 単結晶引上装置 |
JPH0772116B2 (ja) * | 1991-02-15 | 1995-08-02 | 信越半導体株式会社 | 単結晶引上装置 |
JP2655576B2 (ja) * | 1992-09-30 | 1997-09-24 | 信越半導体株式会社 | 単結晶引上装置におけるアイソレーションバルブ |
-
1995
- 1995-07-04 JP JP7191087A patent/JP3041670B2/ja not_active Expired - Lifetime
-
1996
- 1996-07-01 US US08/673,590 patent/US5735951A/en not_active Expired - Fee Related
- 1996-07-03 DE DE69604455T patent/DE69604455T2/de not_active Expired - Fee Related
- 1996-07-03 EP EP96304901A patent/EP0752488B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP3041670B2 (ja) | 2000-05-15 |
US5735951A (en) | 1998-04-07 |
JPH0920585A (ja) | 1997-01-21 |
DE69604455T2 (de) | 2000-04-13 |
EP0752488B1 (de) | 1999-09-29 |
EP0752488A1 (de) | 1997-01-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69637586D1 (de) | Flüssigkristallanzeige | |
DE69319463D1 (de) | Einkristall-Ziehvorrichtung | |
FI973116A (fi) | Upokas | |
DE69622942T2 (de) | Flussigkristall-anzeigvorrichtung | |
DE69604455D1 (de) | Einkristallziehvorrichtung | |
DE69612725D1 (de) | Kristallhaltevorrichtung | |
DE69602492D1 (de) | Anzeige | |
DE69823908D1 (de) | Einkristallziehvorrichtung | |
IT1292010B1 (it) | Ganasce per cristallo | |
FR2735963B3 (fr) | Presentoir | |
DE69508469T2 (de) | Oxyde-Granat-Einkristall | |
DE59601759D1 (de) | Kristallziehanlage | |
DE29500256U1 (de) | Abzieheinrichtung | |
KR970002716U (ko) | 액정표시소자 | |
FI962829A0 (fi) | Hoejdreglerbar staellning | |
DE59501082D1 (de) | Abziehvorrichtung | |
KR970045305U (ko) | 액정표시장치 | |
DE29513087U1 (de) | Fahnenmast | |
DE29500935U1 (de) | Putzabziehleiste | |
FR2731888B1 (fr) | Presentoir | |
DE9403059U1 (de) | Abziehvorrichtung | |
KR970045309U (ko) | 액정표시소자 | |
KR970021995U (ko) | 토크 표시 장치 | |
DE29503518U1 (de) | Zange | |
KR970045312U (ko) | 액정표시소자 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |