DE59601759D1 - Kristallziehanlage - Google Patents

Kristallziehanlage

Info

Publication number
DE59601759D1
DE59601759D1 DE59601759T DE59601759T DE59601759D1 DE 59601759 D1 DE59601759 D1 DE 59601759D1 DE 59601759 T DE59601759 T DE 59601759T DE 59601759 T DE59601759 T DE 59601759T DE 59601759 D1 DE59601759 D1 DE 59601759D1
Authority
DE
Germany
Prior art keywords
crystal pulling
pulling system
crystal
pulling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59601759T
Other languages
English (en)
Inventor
Winfried Dipl Ing Schulmann
Johann Ing Scholler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Deutschland Holding GmbH
Original Assignee
Leybold AG
Balzers und Leybold Deutschland Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG, Balzers und Leybold Deutschland Holding AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE59601759D1 publication Critical patent/DE59601759D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE59601759T 1995-09-26 1996-08-24 Kristallziehanlage Expired - Fee Related DE59601759D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19535750 1995-09-26
DE19539316A DE19539316A1 (de) 1995-09-26 1995-10-23 Kristallziehanlage

Publications (1)

Publication Number Publication Date
DE59601759D1 true DE59601759D1 (de) 1999-06-02

Family

ID=7773204

Family Applications (2)

Application Number Title Priority Date Filing Date
DE19539316A Pending DE19539316A1 (de) 1995-09-26 1995-10-23 Kristallziehanlage
DE59601759T Expired - Fee Related DE59601759D1 (de) 1995-09-26 1996-08-24 Kristallziehanlage

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE19539316A Pending DE19539316A1 (de) 1995-09-26 1995-10-23 Kristallziehanlage

Country Status (2)

Country Link
KR (1) KR100220118B1 (de)
DE (2) DE19539316A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19780188B4 (de) * 1996-02-08 2006-03-30 Sumitomo Mitsubishi Silicon Corp. Verfahren und Vorrichtung zum Herstellen von Einkristallen
DE10119947A1 (de) * 2001-04-24 2002-10-31 Crystal Growing Systems Gmbh Verfahren zum Steuern einer Kristallziehanlage und Kristallziehanlage zu seiner Durchführung
DE102020128225A1 (de) * 2019-10-28 2021-04-29 Pva Tepla Ag Kristallziehanlage

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2821481C2 (de) * 1978-05-17 1985-12-05 Wacker-Chemitronic Gesellschaft für Elektronik-Grundstoffe mbH, 8263 Burghausen Vorrichtung zum Ziehen von hochreinen Halbleiterstäben aus der Schmelze
JPH0388794A (ja) * 1989-08-31 1991-04-15 Nippon Steel Corp シリコン単結晶の引上げ方法および装置
EP0530397A1 (de) * 1991-09-04 1993-03-10 Kawasaki Steel Corporation Verfahren und Vorrichtung den Kristallziehungsprozess nach dem Czochralski Verfahren
JPH06293589A (ja) * 1993-04-06 1994-10-21 Kawasaki Steel Corp 単結晶育成装置

Also Published As

Publication number Publication date
KR970015795A (ko) 1997-04-28
KR100220118B1 (ko) 1999-09-01
DE19539316A1 (de) 1997-03-27

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: UNAXIS DEUTSCHLAND HOLDING GMBH, 63450 HANAU, DE

8339 Ceased/non-payment of the annual fee