DE69603845D1 - Laserbelichtungsgerät - Google Patents

Laserbelichtungsgerät

Info

Publication number
DE69603845D1
DE69603845D1 DE69603845T DE69603845T DE69603845D1 DE 69603845 D1 DE69603845 D1 DE 69603845D1 DE 69603845 T DE69603845 T DE 69603845T DE 69603845 T DE69603845 T DE 69603845T DE 69603845 D1 DE69603845 D1 DE 69603845D1
Authority
DE
Germany
Prior art keywords
bridge
base member
exposure
pct
advancing device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69603845T
Other languages
English (en)
Other versions
DE69603845T2 (de
Inventor
Flemming Pedersen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Krause Danmark AS
Original Assignee
Krause Danmark AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Krause Danmark AS filed Critical Krause Danmark AS
Publication of DE69603845D1 publication Critical patent/DE69603845D1/de
Application granted granted Critical
Publication of DE69603845T2 publication Critical patent/DE69603845T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/24—Curved surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Semiconductor Lasers (AREA)
  • Laser Surgery Devices (AREA)
  • Mechanical Optical Scanning Systems (AREA)
DE69603845T 1995-05-02 1996-05-01 Laserbelichtungsgerät Expired - Fee Related DE69603845T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DK9500172U DK9500172U3 (da) 1995-05-02 1995-05-02 Lasereksponeringsapparat
PCT/DK1996/000200 WO1996034747A1 (en) 1995-05-02 1996-05-01 Laser exposure apparatus

Publications (2)

Publication Number Publication Date
DE69603845D1 true DE69603845D1 (de) 1999-09-23
DE69603845T2 DE69603845T2 (de) 2000-01-20

Family

ID=8155172

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69603845T Expired - Fee Related DE69603845T2 (de) 1995-05-02 1996-05-01 Laserbelichtungsgerät

Country Status (7)

Country Link
US (1) US5909236A (de)
EP (1) EP0824399B1 (de)
AT (1) ATE183440T1 (de)
AU (1) AU5644496A (de)
DE (1) DE69603845T2 (de)
DK (1) DK9500172U3 (de)
WO (1) WO1996034747A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE414933T1 (de) * 1999-02-17 2008-12-15 Kodak Graphic Comm Gmbh Flachbettdruckplattenherstellungssystem
EP1231518B1 (de) * 2001-02-07 2010-08-11 Dainippon Screen Mfg. Co., Ltd. Bildaufzeichnungsgerät

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH497714A (de) * 1968-03-16 1970-10-15 Bio Bielefelder Offsetdruckpla Kopiergerät für Offsetdruckplatten
US4099800A (en) * 1977-05-26 1978-07-11 The Bendix Corporation Coordinate measuring machine having auxiliary air bearing
US4455641A (en) * 1978-09-12 1984-06-19 Dennesen Electrostatics, Inc. Linear tracking system
DK207090D0 (da) * 1990-08-29 1990-08-29 Andersen Allan V Fremgangsmaade og apparat til udfoerelse af tromlescanning
JP2742006B2 (ja) * 1993-09-22 1998-04-22 大日本スクリーン製造株式会社 円筒内面走査装置

Also Published As

Publication number Publication date
DK9500172U3 (da) 1996-08-02
AU5644496A (en) 1996-11-21
US5909236A (en) 1999-06-01
WO1996034747A1 (en) 1996-11-07
ATE183440T1 (de) 1999-09-15
EP0824399B1 (de) 1999-08-18
DE69603845T2 (de) 2000-01-20
EP0824399A1 (de) 1998-02-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee