ATE183440T1 - Laserbelichtungsgerät - Google Patents

Laserbelichtungsgerät

Info

Publication number
ATE183440T1
ATE183440T1 AT96913476T AT96913476T ATE183440T1 AT E183440 T1 ATE183440 T1 AT E183440T1 AT 96913476 T AT96913476 T AT 96913476T AT 96913476 T AT96913476 T AT 96913476T AT E183440 T1 ATE183440 T1 AT E183440T1
Authority
AT
Austria
Prior art keywords
bridge
base member
exposure
pct
advancing device
Prior art date
Application number
AT96913476T
Other languages
English (en)
Inventor
Flemming Steen Pedersen
Original Assignee
Krause Danmark A S
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Krause Danmark A S filed Critical Krause Danmark A S
Application granted granted Critical
Publication of ATE183440T1 publication Critical patent/ATE183440T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/24—Curved surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Semiconductor Lasers (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Laser Surgery Devices (AREA)
AT96913476T 1995-05-02 1996-05-01 Laserbelichtungsgerät ATE183440T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DK9500172U DK9500172U3 (da) 1995-05-02 1995-05-02 Lasereksponeringsapparat

Publications (1)

Publication Number Publication Date
ATE183440T1 true ATE183440T1 (de) 1999-09-15

Family

ID=8155172

Family Applications (1)

Application Number Title Priority Date Filing Date
AT96913476T ATE183440T1 (de) 1995-05-02 1996-05-01 Laserbelichtungsgerät

Country Status (7)

Country Link
US (1) US5909236A (de)
EP (1) EP0824399B1 (de)
AT (1) ATE183440T1 (de)
AU (1) AU5644496A (de)
DE (1) DE69603845T2 (de)
DK (1) DK9500172U3 (de)
WO (1) WO1996034747A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE414933T1 (de) * 1999-02-17 2008-12-15 Kodak Graphic Comm Gmbh Flachbettdruckplattenherstellungssystem
DE60237252D1 (de) * 2001-02-07 2010-09-23 Dainippon Screen Mfg Bildaufzeichnungsgerät

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH497714A (de) * 1968-03-16 1970-10-15 Bio Bielefelder Offsetdruckpla Kopiergerät für Offsetdruckplatten
US4099800A (en) * 1977-05-26 1978-07-11 The Bendix Corporation Coordinate measuring machine having auxiliary air bearing
US4455641A (en) * 1978-09-12 1984-06-19 Dennesen Electrostatics, Inc. Linear tracking system
DK207090D0 (da) * 1990-08-29 1990-08-29 Andersen Allan V Fremgangsmaade og apparat til udfoerelse af tromlescanning
JP2742006B2 (ja) * 1993-09-22 1998-04-22 大日本スクリーン製造株式会社 円筒内面走査装置

Also Published As

Publication number Publication date
DE69603845T2 (de) 2000-01-20
EP0824399A1 (de) 1998-02-25
WO1996034747A1 (en) 1996-11-07
US5909236A (en) 1999-06-01
DE69603845D1 (de) 1999-09-23
EP0824399B1 (de) 1999-08-18
DK9500172U3 (da) 1996-08-02
AU5644496A (en) 1996-11-21

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties