DE69307575D1 - Optische Abtastvorrichtung zur Abtastung eines Laserstrahls, der auf bildformende Oberflächen fokussiert ist - Google Patents

Optische Abtastvorrichtung zur Abtastung eines Laserstrahls, der auf bildformende Oberflächen fokussiert ist

Info

Publication number
DE69307575D1
DE69307575D1 DE69307575T DE69307575T DE69307575D1 DE 69307575 D1 DE69307575 D1 DE 69307575D1 DE 69307575 T DE69307575 T DE 69307575T DE 69307575 T DE69307575 T DE 69307575T DE 69307575 D1 DE69307575 D1 DE 69307575D1
Authority
DE
Germany
Prior art keywords
focused
image
laser beam
forming surfaces
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69307575T
Other languages
English (en)
Other versions
DE69307575T2 (de
Inventor
Kazunori Murakami
Tomonori Ikumi
Yasuo Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba TEC Corp
Original Assignee
Tokyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP4190768A external-priority patent/JPH0634904A/ja
Priority claimed from JP32810892A external-priority patent/JP3206996B2/ja
Application filed by Tokyo Electric Co Ltd filed Critical Tokyo Electric Co Ltd
Application granted granted Critical
Publication of DE69307575D1 publication Critical patent/DE69307575D1/de
Publication of DE69307575T2 publication Critical patent/DE69307575T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/12Scanning systems using multifaceted mirrors
    • G02B26/121Mechanical drive devices for polygonal mirrors
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
DE69307575T 1992-04-17 1993-04-19 Optische Abtastvorrichtung zur Abtastung eines Laserstrahls, der auf bildformende Oberflächen fokussiert ist Expired - Fee Related DE69307575T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9831892 1992-04-17
JP4190768A JPH0634904A (ja) 1992-07-17 1992-07-17 光走査装置
JP32810892A JP3206996B2 (ja) 1992-04-17 1992-12-08 光走査装置

Publications (2)

Publication Number Publication Date
DE69307575D1 true DE69307575D1 (de) 1997-03-06
DE69307575T2 DE69307575T2 (de) 1997-06-12

Family

ID=27308626

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69307575T Expired - Fee Related DE69307575T2 (de) 1992-04-17 1993-04-19 Optische Abtastvorrichtung zur Abtastung eines Laserstrahls, der auf bildformende Oberflächen fokussiert ist

Country Status (4)

Country Link
US (1) US5402258A (de)
EP (1) EP0566155B1 (de)
KR (1) KR100306582B1 (de)
DE (1) DE69307575T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5646767A (en) * 1993-12-22 1997-07-08 Asahi Kogaku Kogyo Kabushiki Kaisha Scanning optical system
US6961489B2 (en) * 2003-06-30 2005-11-01 Finisar Corporation High speed optical system
US7149383B2 (en) * 2003-06-30 2006-12-12 Finisar Corporation Optical system with reduced back reflection
KR100642743B1 (ko) * 2004-08-03 2006-11-03 주식회사 이오테크닉스 폴리곤 미러 하우징
KR100832850B1 (ko) * 2007-01-29 2008-05-28 주식회사 이오테크닉스 폴리곤 미러 하우징 및 이를 이용하여 폴리곤 미러하우징의 얼라인 에러를 보정하는 방법
WO2012110406A1 (en) * 2011-02-17 2012-08-23 Carl Zeiss Smt Gmbh Optical mount and euv exposure apparatus
KR101158738B1 (ko) * 2012-01-27 2012-06-22 국방과학연구소 무게균형을 개선한 고속 스캔 회전형 간섭계용 회전판 조립체
JP2018137861A (ja) * 2017-02-21 2018-08-30 日本電産株式会社 回転駆動装置
JP2018137931A (ja) * 2017-02-23 2018-08-30 日本電産株式会社 回転駆動装置
US20190011693A1 (en) * 2017-07-10 2019-01-10 Nidec Corporation Rotary drive apparatus
US20190094526A1 (en) * 2017-09-28 2019-03-28 Nidec Corporation Rotary drive apparatus
JP2019066521A (ja) * 2017-09-28 2019-04-25 日本電産株式会社 回転駆動装置
JP2019066523A (ja) * 2017-09-28 2019-04-25 日本電産株式会社 回転駆動装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55129313A (en) * 1979-03-29 1980-10-07 Canon Inc Light deflector
JPS5846317A (ja) * 1981-09-12 1983-03-17 Canon Inc レ−ザ走査光学系
US4943128A (en) * 1986-10-28 1990-07-24 Ricoh Company, Ltd. Light scanning device
JPH0750259B2 (ja) * 1987-04-20 1995-05-31 富士写真フイルム株式会社 光学ユニツト
US4971410A (en) * 1989-07-27 1990-11-20 Ncr Corporation Scanning and collection system for a compact laser
EP0448123B1 (de) * 1990-03-23 2001-08-16 Canon Kabushiki Kaisha Optisches Abtastsystem
KR940002358B1 (ko) * 1990-04-03 1994-03-23 도오꾜오 덴끼 가부시끼가이샤 광주사 장치

Also Published As

Publication number Publication date
KR930022107A (ko) 1993-11-23
EP0566155B1 (de) 1997-01-22
EP0566155A1 (de) 1993-10-20
DE69307575T2 (de) 1997-06-12
KR100306582B1 (ko) 2001-11-30
US5402258A (en) 1995-03-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee