DE69522898T2 - Matrixanordnung von gesteuerten Dünnschichtspiegeln und Verfahren zu deren Herstellung - Google Patents
Matrixanordnung von gesteuerten Dünnschichtspiegeln und Verfahren zu deren HerstellungInfo
- Publication number
- DE69522898T2 DE69522898T2 DE69522898T DE69522898T DE69522898T2 DE 69522898 T2 DE69522898 T2 DE 69522898T2 DE 69522898 T DE69522898 T DE 69522898T DE 69522898 T DE69522898 T DE 69522898T DE 69522898 T2 DE69522898 T2 DE 69522898T2
- Authority
- DE
- Germany
- Prior art keywords
- thin film
- layer
- electroadjustable
- array
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title claims description 143
- 238000000034 method Methods 0.000 title claims description 48
- 239000011159 matrix material Substances 0.000 title claims description 32
- 230000008569 process Effects 0.000 title claims description 31
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 239000000463 material Substances 0.000 claims description 24
- 238000004544 sputter deposition Methods 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 14
- 238000001771 vacuum deposition Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 5
- 229920000642 polymer Polymers 0.000 claims description 4
- 238000004528 spin coating Methods 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 71
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 12
- 230000005684 electric field Effects 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- 239000011787 zinc oxide Substances 0.000 description 5
- 230000010287 polarization Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000009966 trimming Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000005360 phosphosilicate glass Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
- B81C1/00174—See-saws
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N9/00—Details of colour television systems
- H04N9/12—Picture reproducers
- H04N9/30—Picture reproducers using solid-state colour display devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/03—Microengines and actuators
- B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0102—Surface micromachining
- B81C2201/0105—Sacrificial layer
- B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Signal Processing (AREA)
- Multimedia (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Optical Elements Other Than Lenses (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Mirrors, Picture Frames, Photograph Stands, And Related Fastening Devices (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019940029763A KR960018646A (ko) | 1994-11-14 | 1994-11-14 | 광로조절장치의 제조방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69522898D1 DE69522898D1 (de) | 2001-10-31 |
| DE69522898T2 true DE69522898T2 (de) | 2002-06-20 |
Family
ID=19397806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69522898T Expired - Fee Related DE69522898T2 (de) | 1994-11-14 | 1995-10-20 | Matrixanordnung von gesteuerten Dünnschichtspiegeln und Verfahren zu deren Herstellung |
Country Status (18)
| Country | Link |
|---|---|
| US (1) | US5606452A (OSRAM) |
| EP (1) | EP0712021B1 (OSRAM) |
| JP (1) | JPH10508952A (OSRAM) |
| KR (1) | KR960018646A (OSRAM) |
| CN (1) | CN1061203C (OSRAM) |
| AU (1) | AU701168B2 (OSRAM) |
| BR (1) | BR9510396A (OSRAM) |
| CA (1) | CA2205168A1 (OSRAM) |
| CZ (1) | CZ288386B6 (OSRAM) |
| DE (1) | DE69522898T2 (OSRAM) |
| HU (1) | HU221360B1 (OSRAM) |
| MY (1) | MY132060A (OSRAM) |
| PE (1) | PE36497A1 (OSRAM) |
| PL (1) | PL178550B1 (OSRAM) |
| RU (1) | RU2143715C1 (OSRAM) |
| TW (1) | TW305944B (OSRAM) |
| UY (1) | UY24087A1 (OSRAM) |
| WO (1) | WO1996015630A1 (OSRAM) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6969635B2 (en) * | 2000-12-07 | 2005-11-29 | Reflectivity, Inc. | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| KR970054559A (ko) * | 1995-12-22 | 1997-07-31 | 배순훈 | 광로 조절 장치의 제조 방법 |
| TW357271B (en) * | 1996-02-26 | 1999-05-01 | Seiko Epson Corp | Light regulator, display and the electronic machine |
| KR100229788B1 (ko) * | 1996-05-29 | 1999-11-15 | 전주범 | 광로 조절 장치의 제조 방법 |
| US5930025A (en) * | 1996-05-29 | 1999-07-27 | Daewoo Electronics Co., Ltd. | Array of thin film actuated mirrors and method for the manufacture thereof |
| EP0810458B1 (en) * | 1996-05-29 | 2001-09-19 | Daewoo Electronics Co., Ltd | Array of thin film actuated mirrors and method for the manufacture thereof |
| US5945898A (en) * | 1996-05-31 | 1999-08-31 | The Regents Of The University Of California | Magnetic microactuator |
| US5991064A (en) * | 1996-06-29 | 1999-11-23 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array and a method for the manufacture thereof |
| KR100212539B1 (ko) * | 1996-06-29 | 1999-08-02 | 전주범 | 박막형 광로조절장치의 엑츄에이터 및 제조방법 |
| AU717083B2 (en) * | 1996-08-21 | 2000-03-16 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array for use in an optical projection system |
| WO1998008127A1 (en) * | 1996-08-21 | 1998-02-26 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array for use in an optical projection system |
| US5949568A (en) * | 1996-12-30 | 1999-09-07 | Daewoo Electronics Co., Ltd. | Array of thin film actuated mirrors having a levelling member |
| EP1033037B1 (en) * | 1997-06-30 | 2006-12-13 | Daewoo Electronics Corporation | Thin film actuated mirror including a seeding member and an electrodisplacive member made of materials having the same crystal structure and growth direction |
| US7281808B2 (en) * | 2003-06-21 | 2007-10-16 | Qortek, Inc. | Thin, nearly wireless adaptive optical device |
| JP4037394B2 (ja) * | 2004-09-16 | 2008-01-23 | 株式会社東芝 | マイクロメカニカルデバイス |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3544201A (en) * | 1968-01-02 | 1970-12-01 | Gen Telephone & Elect | Optical beam deflector |
| US3622792A (en) * | 1969-12-29 | 1971-11-23 | Bell Telephone Labor Inc | Optical switching system |
| US4615595A (en) * | 1984-10-10 | 1986-10-07 | Texas Instruments Incorporated | Frame addressed spatial light modulator |
| US4793699A (en) * | 1985-04-19 | 1988-12-27 | Canon Kabushiki Kaisha | Projection apparatus provided with an electro-mechanical transducer element |
| US5172262A (en) * | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
| US5185660A (en) * | 1989-11-01 | 1993-02-09 | Aura Systems, Inc. | Actuated mirror optical intensity modulation |
| US5126836A (en) * | 1989-11-01 | 1992-06-30 | Aura Systems, Inc. | Actuated mirror optical intensity modulation |
| GB2239101B (en) * | 1989-11-17 | 1993-09-22 | Marconi Gec Ltd | Optical device |
| US5085497A (en) * | 1990-03-16 | 1992-02-04 | Aura Systems, Inc. | Method for fabricating mirror array for optical projection system |
| US5216537A (en) * | 1990-06-29 | 1993-06-01 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
| US5170283A (en) * | 1991-07-24 | 1992-12-08 | Northrop Corporation | Silicon spatial light modulator |
| US5159225A (en) * | 1991-10-18 | 1992-10-27 | Aura Systems, Inc. | Piezoelectric actuator |
| US5175465A (en) * | 1991-10-18 | 1992-12-29 | Aura Systems, Inc. | Piezoelectric and electrostrictive actuators |
| US5247222A (en) * | 1991-11-04 | 1993-09-21 | Engle Craig D | Constrained shear mode modulator |
| KR970003007B1 (ko) * | 1993-05-21 | 1997-03-13 | 대우전자 주식회사 | 투사형 화상표시장치용 광로조절장치 및 그 구동방법 |
| US5481396A (en) * | 1994-02-23 | 1996-01-02 | Aura Systems, Inc. | Thin film actuated mirror array |
-
1994
- 1994-11-14 KR KR1019940029763A patent/KR960018646A/ko not_active Ceased
-
1995
- 1995-10-17 PL PL95320161A patent/PL178550B1/pl unknown
- 1995-10-17 WO PCT/KR1995/000133 patent/WO1996015630A1/en not_active Ceased
- 1995-10-17 AU AU36744/95A patent/AU701168B2/en not_active Ceased
- 1995-10-17 HU HU9800822A patent/HU221360B1/hu not_active IP Right Cessation
- 1995-10-17 CN CN95196202A patent/CN1061203C/zh not_active Expired - Fee Related
- 1995-10-17 RU RU97110173/09A patent/RU2143715C1/ru not_active IP Right Cessation
- 1995-10-17 CA CA002205168A patent/CA2205168A1/en not_active Abandoned
- 1995-10-17 BR BR9510396A patent/BR9510396A/pt not_active IP Right Cessation
- 1995-10-17 CZ CZ19971487A patent/CZ288386B6/cs not_active IP Right Cessation
- 1995-10-17 JP JP8515934A patent/JPH10508952A/ja not_active Abandoned
- 1995-10-19 TW TW084111042A patent/TW305944B/zh active
- 1995-10-19 MY MYPI95003145A patent/MY132060A/en unknown
- 1995-10-20 DE DE69522898T patent/DE69522898T2/de not_active Expired - Fee Related
- 1995-10-20 EP EP95116566A patent/EP0712021B1/en not_active Expired - Lifetime
- 1995-10-25 US US08/548,034 patent/US5606452A/en not_active Expired - Fee Related
- 1995-11-14 PE PE1995284565A patent/PE36497A1/es not_active Application Discontinuation
- 1995-11-14 UY UY24087A patent/UY24087A1/es not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| RU2143715C1 (ru) | 1999-12-27 |
| MY132060A (en) | 2007-09-28 |
| PE36497A1 (es) | 1997-11-27 |
| UY24087A1 (es) | 1996-04-11 |
| CA2205168A1 (en) | 1996-05-23 |
| US5606452A (en) | 1997-02-25 |
| EP0712021B1 (en) | 2001-09-26 |
| CN1061203C (zh) | 2001-01-24 |
| BR9510396A (pt) | 1997-12-23 |
| AU3674495A (en) | 1996-06-06 |
| CZ148797A3 (en) | 1997-12-17 |
| KR960018646A (ko) | 1996-06-17 |
| CN1163689A (zh) | 1997-10-29 |
| HUT77722A (hu) | 1998-07-28 |
| WO1996015630A1 (en) | 1996-05-23 |
| PL178550B1 (pl) | 2000-05-31 |
| EP0712021A1 (en) | 1996-05-15 |
| CZ288386B6 (en) | 2001-06-13 |
| TW305944B (OSRAM) | 1997-05-21 |
| DE69522898D1 (de) | 2001-10-31 |
| PL320161A1 (en) | 1997-09-15 |
| JPH10508952A (ja) | 1998-09-02 |
| AU701168B2 (en) | 1999-01-21 |
| HU221360B1 (en) | 2002-09-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8327 | Change in the person/name/address of the patent owner |
Owner name: DAEWOO ELECTRONICS CORP., SEOUL/SOUL, KR |
|
| 8339 | Ceased/non-payment of the annual fee |