DE69423070T2 - Anordnung von gesteuerten Dünnschichtspiegeln für ein optisches Projektionssystem und Verfahren zu deren Herstellung - Google Patents
Anordnung von gesteuerten Dünnschichtspiegeln für ein optisches Projektionssystem und Verfahren zu deren HerstellungInfo
- Publication number
- DE69423070T2 DE69423070T2 DE69423070T DE69423070T DE69423070T2 DE 69423070 T2 DE69423070 T2 DE 69423070T2 DE 69423070 T DE69423070 T DE 69423070T DE 69423070 T DE69423070 T DE 69423070T DE 69423070 T2 DE69423070 T2 DE 69423070T2
- Authority
- DE
- Germany
- Prior art keywords
- arrangement
- production
- projection system
- optical projection
- film mirrors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N9/00—Details of colour television systems
- H04N9/12—Picture reproducers
- H04N9/30—Picture reproducers using solid-state colour display devices
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
- H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
- H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/904—Micromirror
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Elements Other Than Lenses (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR93024395A KR970006691B1 (en) | 1993-11-16 | 1993-11-16 | A manufacturing method of an optical path regulating apparatus |
KR1019930024397A KR970006693B1 (ko) | 1993-11-16 | 1993-11-16 | 투사형 화상표시장치의 광로조절장치 구조 |
KR1019930031716A KR970008400B1 (ko) | 1993-12-30 | 1993-12-30 | 투사형 화상표시장치의 광로 조절 장치의 구조 및 그 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69423070D1 DE69423070D1 (de) | 2000-03-30 |
DE69423070T2 true DE69423070T2 (de) | 2000-07-13 |
Family
ID=27349019
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69423070T Expired - Lifetime DE69423070T2 (de) | 1993-11-16 | 1994-11-15 | Anordnung von gesteuerten Dünnschichtspiegeln für ein optisches Projektionssystem und Verfahren zu deren Herstellung |
Country Status (16)
Country | Link |
---|---|
US (3) | US5835293A (de) |
EP (1) | EP0653657B1 (de) |
JP (1) | JP3253304B2 (de) |
CN (1) | CN1047904C (de) |
AU (1) | AU693139B2 (de) |
BR (1) | BR9408054A (de) |
CA (1) | CA2176347A1 (de) |
CZ (1) | CZ287202B6 (de) |
DE (1) | DE69423070T2 (de) |
ES (1) | ES2145086T3 (de) |
HU (1) | HU220515B1 (de) |
IT (1) | IT1271062B (de) |
PL (1) | PL175809B1 (de) |
RU (1) | RU2125347C1 (de) |
TW (1) | TW266328B (de) |
WO (1) | WO1995014351A1 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3471156B2 (ja) * | 1995-05-30 | 2003-11-25 | シャープ株式会社 | イメージシフト機構および撮像装置 |
US6969635B2 (en) * | 2000-12-07 | 2005-11-29 | Reflectivity, Inc. | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
US6849471B2 (en) * | 2003-03-28 | 2005-02-01 | Reflectivity, Inc. | Barrier layers for microelectromechanical systems |
KR980003662A (ko) * | 1996-06-28 | 1998-03-30 | 배순훈 | 큰 구동 각도를 가지는 박막형 광로 조절 장치 |
EP0855120A1 (de) * | 1996-08-13 | 1998-07-29 | Daewoo Electronics Co., Ltd | Spiegelarray in dünnfilmtechnik für optisches projektionssystem und herstellungsverfahren |
US5949568A (en) * | 1996-12-30 | 1999-09-07 | Daewoo Electronics Co., Ltd. | Array of thin film actuated mirrors having a levelling member |
WO1998033327A1 (en) * | 1997-01-23 | 1998-07-30 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
DE69732920T2 (de) * | 1997-01-23 | 2006-03-30 | Daewoo Electronics Corp. | Spiegelraster mit dünnem film in einem optischen projektionssystem und herstellungsverfahren |
KR19980069199A (ko) * | 1997-02-27 | 1998-10-26 | 배순훈 | 광효율을 향상시킬 수 있는 박막형 광로 조절장치 및 그 제조 방법 |
WO1999023832A1 (en) * | 1997-10-31 | 1999-05-14 | Daewoo Electronics Co., Ltd. | Method for manufacturing thin film actuated mirror array in an optical projection system |
US20010040675A1 (en) * | 2000-01-28 | 2001-11-15 | True Randall J. | Method for forming a micromechanical device |
KR20030060622A (ko) * | 2002-01-10 | 2003-07-16 | 주식회사 대우일렉트로닉스 | 박막형 광로 조절 장치의 제조 방법 |
US6965468B2 (en) | 2003-07-03 | 2005-11-15 | Reflectivity, Inc | Micromirror array having reduced gap between adjacent micromirrors of the micromirror array |
US7391723B2 (en) * | 2002-04-22 | 2008-06-24 | Computer Network Technology Corporation | Frame-level fibre channel CRC on switching platform |
US7281808B2 (en) * | 2003-06-21 | 2007-10-16 | Qortek, Inc. | Thin, nearly wireless adaptive optical device |
US6947201B2 (en) | 2003-12-08 | 2005-09-20 | Xinetics, Inc. | Transverse electrodisplacive actuator array |
JP4552606B2 (ja) * | 2004-11-10 | 2010-09-29 | パナソニック株式会社 | 圧電アクチュエータおよびこれを用いた光線掃引装置 |
US20090122428A1 (en) * | 2007-11-09 | 2009-05-14 | Nikon Corporation | Reflective optical elements exhibiting multimetallic-like self-correction of distortions caused by heating |
WO2012012586A1 (en) * | 2010-07-20 | 2012-01-26 | Oclaro (New Jersey), Inc. | Wss with pixel gap compensation |
DE102012221831A1 (de) * | 2012-11-29 | 2014-06-05 | Carl Zeiss Smt Gmbh | Anordnung zur Aktuierung wenigstens eines optischen Elementes in einem optischen System |
KR102001460B1 (ko) * | 2013-03-18 | 2019-07-19 | 삼성디스플레이 주식회사 | 레이저 빔 요동을 위한 광학 모듈 |
WO2016124253A1 (en) | 2015-02-06 | 2016-08-11 | Optotune Ag | Optical device for enhancing resolution of an image |
CN114779464A (zh) * | 2022-05-24 | 2022-07-22 | 北京有竹居网络技术有限公司 | 光学信号调制器、控制方法及投影设备 |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2016962A (en) * | 1932-09-27 | 1935-10-08 | Du Pont | Process for producing glucamines and related products |
US1985424A (en) * | 1933-03-23 | 1934-12-25 | Ici Ltd | Alkylene-oxide derivatives of polyhydroxyalkyl-alkylamides |
US2703798A (en) * | 1950-05-25 | 1955-03-08 | Commercial Solvents Corp | Detergents from nu-monoalkyl-glucamines |
US2920529A (en) * | 1952-05-23 | 1960-01-12 | Blythe Richard | Electronic control of optical and near-optical radiation |
US3614677A (en) * | 1966-04-29 | 1971-10-19 | Ibm | Electromechanical monolithic resonator |
US3544201A (en) * | 1968-01-02 | 1970-12-01 | Gen Telephone & Elect | Optical beam deflector |
US3758199A (en) * | 1971-11-22 | 1973-09-11 | Sperry Rand Corp | Piezoelectrically actuated light deflector |
US4441791A (en) * | 1980-09-02 | 1984-04-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
US4518976A (en) * | 1982-11-17 | 1985-05-21 | Konishiroku Photo Industry Co., Ltd. | Recording apparatus |
US4979789A (en) * | 1989-06-02 | 1990-12-25 | Aura Systems, Inc. | Continuous source scene projector |
US5032906A (en) * | 1989-07-12 | 1991-07-16 | Aura Systems, Inc. | Intensity calibration method for scene projector |
US5022745A (en) * | 1989-09-07 | 1991-06-11 | Massachusetts Institute Of Technology | Electrostatically deformable single crystal dielectrically coated mirror |
US4954789A (en) * | 1989-09-28 | 1990-09-04 | Texas Instruments Incorporated | Spatial light modulator |
US5260798A (en) * | 1989-11-01 | 1993-11-09 | Aura Systems, Inc. | Pixel intensity modulator |
US5126836A (en) * | 1989-11-01 | 1992-06-30 | Aura Systems, Inc. | Actuated mirror optical intensity modulation |
US5245369A (en) * | 1989-11-01 | 1993-09-14 | Aura Systems, Inc. | Scene projector |
US5185660A (en) * | 1989-11-01 | 1993-02-09 | Aura Systems, Inc. | Actuated mirror optical intensity modulation |
US5150205A (en) * | 1989-11-01 | 1992-09-22 | Aura Systems, Inc. | Actuated mirror optical intensity modulation |
US5035475A (en) * | 1990-03-15 | 1991-07-30 | Aura Systems, Inc. | Unique modulation television |
US5085497A (en) * | 1990-03-16 | 1992-02-04 | Aura Systems, Inc. | Method for fabricating mirror array for optical projection system |
US5138309A (en) * | 1990-04-03 | 1992-08-11 | Aura Systems, Inc. | Electronic switch matrix for a video display system |
US5209119A (en) * | 1990-12-12 | 1993-05-11 | Regents Of The University Of Minnesota | Microdevice for sensing a force |
US5218512A (en) * | 1991-08-16 | 1993-06-08 | Rohm Co., Ltd. | Ferroelectric device |
US5159225A (en) * | 1991-10-18 | 1992-10-27 | Aura Systems, Inc. | Piezoelectric actuator |
US5247222A (en) * | 1991-11-04 | 1993-09-21 | Engle Craig D | Constrained shear mode modulator |
JP2665106B2 (ja) * | 1992-03-17 | 1997-10-22 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
US5481396A (en) * | 1994-02-23 | 1996-01-02 | Aura Systems, Inc. | Thin film actuated mirror array |
-
1994
- 1994-11-15 ES ES94118035T patent/ES2145086T3/es not_active Expired - Lifetime
- 1994-11-15 BR BR9408054A patent/BR9408054A/pt not_active Application Discontinuation
- 1994-11-15 CZ CZ19961413A patent/CZ287202B6/cs not_active IP Right Cessation
- 1994-11-15 CN CN94194178A patent/CN1047904C/zh not_active Expired - Lifetime
- 1994-11-15 PL PL94314420A patent/PL175809B1/pl unknown
- 1994-11-15 EP EP94118035A patent/EP0653657B1/de not_active Expired - Lifetime
- 1994-11-15 IT ITMI942309A patent/IT1271062B/it active IP Right Grant
- 1994-11-15 WO PCT/KR1994/000164 patent/WO1995014351A1/en active IP Right Grant
- 1994-11-15 HU HU9601201A patent/HU220515B1/hu not_active IP Right Cessation
- 1994-11-15 DE DE69423070T patent/DE69423070T2/de not_active Expired - Lifetime
- 1994-11-15 RU RU96113083A patent/RU2125347C1/ru not_active IP Right Cessation
- 1994-11-15 AU AU11215/95A patent/AU693139B2/en not_active Ceased
- 1994-11-15 JP JP51435395A patent/JP3253304B2/ja not_active Expired - Lifetime
- 1994-11-15 CA CA002176347A patent/CA2176347A1/en not_active Abandoned
- 1994-11-16 US US08/340,762 patent/US5835293A/en not_active Expired - Fee Related
- 1994-11-18 TW TW083110725A patent/TW266328B/zh active
-
1998
- 1998-09-10 US US09/150,747 patent/US5984481A/en not_active Expired - Lifetime
- 1998-09-10 US US09/150,773 patent/US6030083A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
AU1121595A (en) | 1995-06-06 |
IT1271062B (it) | 1997-05-26 |
JP3253304B2 (ja) | 2002-02-04 |
ITMI942309A0 (it) | 1994-11-15 |
RU2125347C1 (ru) | 1999-01-20 |
CN1047904C (zh) | 1999-12-29 |
CZ287202B6 (en) | 2000-10-11 |
DE69423070D1 (de) | 2000-03-30 |
JPH09505157A (ja) | 1997-05-20 |
EP0653657B1 (de) | 2000-02-23 |
CZ141396A3 (en) | 1997-05-14 |
EP0653657A1 (de) | 1995-05-17 |
HUT75801A (en) | 1997-05-28 |
PL314420A1 (en) | 1996-09-02 |
TW266328B (de) | 1995-12-21 |
WO1995014351A1 (en) | 1995-05-26 |
BR9408054A (pt) | 1996-12-24 |
AU693139B2 (en) | 1998-06-25 |
CA2176347A1 (en) | 1995-05-26 |
ITMI942309A1 (it) | 1996-05-15 |
US5835293A (en) | 1998-11-10 |
ES2145086T3 (es) | 2000-07-01 |
HU220515B1 (hu) | 2002-03-28 |
CN1135276A (zh) | 1996-11-06 |
HU9601201D0 (en) | 1996-07-29 |
US5984481A (en) | 1999-11-16 |
US6030083A (en) | 2000-02-29 |
PL175809B1 (pl) | 1999-02-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: DAEWOO ELECTRONICS CORP., SEOUL/SOUL, KR |