DE69739830D1 - Tiegel für kristallziehung und verfahren zu dessen herstellung - Google Patents

Tiegel für kristallziehung und verfahren zu dessen herstellung

Info

Publication number
DE69739830D1
DE69739830D1 DE69739830T DE69739830T DE69739830D1 DE 69739830 D1 DE69739830 D1 DE 69739830D1 DE 69739830 T DE69739830 T DE 69739830T DE 69739830 T DE69739830 T DE 69739830T DE 69739830 D1 DE69739830 D1 DE 69739830D1
Authority
DE
Germany
Prior art keywords
production
crystal drawing
drawing mirror
mirror
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69739830T
Other languages
English (en)
Inventor
Masatoshi Yamaji
Katsuhide Nagaoka
Toshiharu Hiraoka
Tsuyoshi Matsumoto
Satoshi Ishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Tanso Co Ltd
Original Assignee
Toyo Tanso Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26504761&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69739830(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Toyo Tanso Co Ltd filed Critical Toyo Tanso Co Ltd
Application granted granted Critical
Publication of DE69739830D1 publication Critical patent/DE69739830D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/71—Ceramic products containing macroscopic reinforcing agents
    • C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
    • C04B35/80—Fibres, filaments, whiskers, platelets, or the like
    • C04B35/83—Carbon fibres in a carbon matrix
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Metallurgy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Composite Materials (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Structural Engineering (AREA)
  • Ceramic Products (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
DE69739830T 1996-06-27 1997-06-26 Tiegel für kristallziehung und verfahren zu dessen herstellung Expired - Lifetime DE69739830D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP18816096 1996-06-27
JP28013896 1996-09-30
PCT/JP1997/002211 WO1997049844A1 (fr) 1996-06-27 1997-06-26 Creuset destine au tirage du cristal et son procede de production

Publications (1)

Publication Number Publication Date
DE69739830D1 true DE69739830D1 (de) 2010-05-20

Family

ID=26504761

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69739830T Expired - Lifetime DE69739830D1 (de) 1996-06-27 1997-06-26 Tiegel für kristallziehung und verfahren zu dessen herstellung

Country Status (6)

Country Link
US (1) US6136094A (de)
EP (1) EP0913504B1 (de)
KR (2) KR100273054B1 (de)
DE (1) DE69739830D1 (de)
TW (1) TW531573B (de)
WO (1) WO1997049844A1 (de)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11209115A (ja) * 1998-01-23 1999-08-03 Toyo Tanso Kk 高純度ｃ／ｃコンポジットおよびその製造方法
EP1120484B1 (de) 1998-06-04 2009-02-11 Toyo Tanso Co., Ltd. Kohlenfaserstoffverstärktes Kohlenstoff-Material und seine Verwendung in Bauteilen einer Einkristallziehungsanlage
KR100761580B1 (ko) * 1999-11-24 2007-10-04 에스엔이씨엠에이 열구조 복합재료로 된 보울의 제조방법과 이에 의해형성된 보울 및 이를 도가니 지지부로 사용하는 방법
FR2801304B1 (fr) * 1999-11-24 2002-02-15 Snecma Procede de fabrication d'un bol en materiau composite thermostructural, notamment pour une installation de production de silicium monocristallin
FR2812889B1 (fr) * 2000-08-11 2002-11-15 Snecma Moteurs Procede de fabrication d'un bol monobloc en materiau composite thermostructural, notamment pour une installation de production de silicium, et bol tel qu'obtenu par ce procede
KR100725672B1 (ko) * 2000-03-03 2007-06-08 신에쯔 한도타이 가부시키가이샤 단결정 인상장치에서의 탕루 수용대
JP4700218B2 (ja) * 2001-05-02 2011-06-15 東洋炭素株式会社 単結晶引き上げ用炭素繊維強化炭素複合材料製ルツボ
FR2825699A1 (fr) * 2001-06-12 2002-12-13 Eads Launch Vehicles Procede de densification et de traitement anticorrosion d'un materiau composite thermostructural
DE10321785A1 (de) * 2003-05-14 2004-12-16 Sgl Carbon Ag Dauerhafter CFC-Stütztiegel für Hochtemperaturprozesse beim Ziehen von Halbleiterkristallen
CN100567217C (zh) * 2006-12-06 2009-12-09 湖南南方搏云新材料有限责任公司 硅晶体生长炉用高纯固化炭毡制造方法
JP2009203092A (ja) 2008-02-26 2009-09-10 Ibiden Co Ltd 容器保持部材
JP2009203093A (ja) * 2008-02-26 2009-09-10 Ibiden Co Ltd ルツボ保持部材
JP2009203091A (ja) * 2008-02-26 2009-09-10 Ibiden Co Ltd ルツボ保持部材
JP2009269774A (ja) * 2008-04-30 2009-11-19 Ibiden Co Ltd 高純度炭素繊維強化炭素複合材およびその製造方法
JP5286589B2 (ja) * 2008-05-01 2013-09-11 イビデン株式会社 ルツボ保持部材およびその製造方法
JP5286591B2 (ja) * 2008-05-21 2013-09-11 イビデン株式会社 ルツボ保持部材及びその製造方法
JP5002846B2 (ja) * 2008-06-17 2012-08-15 イビデン株式会社 ルツボ保持部材及びその製造方法
CN102057083B (zh) * 2009-07-21 2013-09-11 丰田自动车株式会社 使用熔液法的单晶生长用籽晶轴
CN102140676B (zh) * 2010-02-01 2015-05-27 科发伦材料株式会社 碳纤维补强碳复合材料坩埚以及该坩埚的制造方法
US9216923B2 (en) * 2011-07-25 2015-12-22 Shin-Etsu Quartz Products Co., Ltd. Metal and graphite mold and method of making a crucible
US8858697B2 (en) 2011-10-28 2014-10-14 General Electric Company Mold compositions
US9011205B2 (en) 2012-02-15 2015-04-21 General Electric Company Titanium aluminide article with improved surface finish
US8932518B2 (en) 2012-02-29 2015-01-13 General Electric Company Mold and facecoat compositions
US8906292B2 (en) 2012-07-27 2014-12-09 General Electric Company Crucible and facecoat compositions
CN104755868B (zh) 2012-08-01 2018-06-05 联合矿产（天津）有限公司 加强的耐火容器
US8708033B2 (en) 2012-08-29 2014-04-29 General Electric Company Calcium titanate containing mold compositions and methods for casting titanium and titanium aluminide alloys
US8992824B2 (en) 2012-12-04 2015-03-31 General Electric Company Crucible and extrinsic facecoat compositions
US9592548B2 (en) 2013-01-29 2017-03-14 General Electric Company Calcium hexaluminate-containing mold and facecoat compositions and methods for casting titanium and titanium aluminide alloys
US9192983B2 (en) 2013-11-26 2015-11-24 General Electric Company Silicon carbide-containing mold and facecoat compositions and methods for casting titanium and titanium aluminide alloys
US9511417B2 (en) 2013-11-26 2016-12-06 General Electric Company Silicon carbide-containing mold and facecoat compositions and methods for casting titanium and titanium aluminide alloys
US10391547B2 (en) 2014-06-04 2019-08-27 General Electric Company Casting mold of grading with silicon carbide
CN108950685A (zh) * 2018-07-24 2018-12-07 上海骐杰碳素材料有限公司 一种涂层坩埚的制作方法
KR102192939B1 (ko) * 2019-07-31 2020-12-18 울산과학기술원 차량용 고압 연료 탱크 및 그 제조 방법
CN112341232B (zh) * 2020-10-28 2022-04-08 西安超码科技有限公司 一种炭/炭坩埚及其制造方法
CN113186598A (zh) * 2021-03-27 2021-07-30 核工业第八研究所 基于缠绕工艺和针刺工艺制备的碳/碳复合材料坩埚

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0343250Y2 (de) * 1986-06-27 1991-09-10
US5207992A (en) * 1986-12-26 1993-05-04 Toshiba Ceramics Co., Ltd. Silicon single crystal pulling-up apparatus
SU1487514A1 (ru) * 1987-10-19 1990-10-15 Gnii Pi Redkometa Подставка под кварцевый тигель ;
SE463834B (sv) * 1988-03-15 1991-01-28 Asea Plast Ab Tryckkaerl
JP2757025B2 (ja) * 1989-07-12 1998-05-25 株式会社新川 薄膜供給機構
JP3249141B2 (ja) * 1990-12-28 2002-01-21 東邦テナックス株式会社 管状複合構造材
KR0126784B1 (en) * 1994-07-08 1998-04-02 Samsung Electronics Co Ltd Cleaning method of semiconductor substrate and cleaning material therefor
JP3190207B2 (ja) * 1994-07-19 2001-07-23 東芝電興株式会社 シリコン単結晶引き上げ装置
US5616175A (en) 1994-07-22 1997-04-01 Herecules Incorporated 3-D carbon-carbon composites for crystal pulling furnace hardware
US5683281A (en) * 1995-02-27 1997-11-04 Hitco Technologies, Inc High purity composite useful as furnace components
US5858486A (en) * 1995-02-27 1999-01-12 Sgl Carbon Composites, Inc. High purity carbon/carbon composite useful as a crucible susceptor
KR100360394B1 (ko) * 1995-12-20 2003-01-24 삼성전자 주식회사 반도체기판의세정방법및이에사용되는세정액
JP3653647B2 (ja) * 1996-05-31 2005-06-02 イビデン株式会社 シリコン単結晶引き上げ装置用の保温筒
KR980012037A (ko) * 1996-07-29 1998-04-30 김광호 웨이퍼 세정방법
KR19980028655A (ko) * 1996-10-23 1998-07-15 김광호 중합체 제거용 세정액 및 이를 사용하는 반도체소자의 제조방법
KR19980084291A (ko) * 1997-05-22 1998-12-05 윤종용 세정방법
JPH10330185A (ja) * 1997-05-28 1998-12-15 Toyo Tanso Kk 単結晶引き上げ用ルツボ及びその製造方法

Also Published As

Publication number Publication date
WO1997049844A1 (fr) 1997-12-31
TW531573B (en) 2003-05-11
KR100273054B1 (ko) 2000-12-01
EP0913504B1 (de) 2010-04-07
KR20000022158A (ko) 2000-04-25
EP0913504A4 (de) 2001-12-19
EP0913504A1 (de) 1999-05-06
US6136094A (en) 2000-10-24
KR19990075991A (ko) 1999-10-15

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Legal Events

Date Code Title Description
8363 Opposition against the patent