JPH10508952A - Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイ及びその製造方法 - Google Patents

Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイ及びその製造方法

Info

Publication number
JPH10508952A
JPH10508952A JP8515934A JP51593496A JPH10508952A JP H10508952 A JPH10508952 A JP H10508952A JP 8515934 A JP8515934 A JP 8515934A JP 51593496 A JP51593496 A JP 51593496A JP H10508952 A JPH10508952 A JP H10508952A
Authority
JP
Japan
Prior art keywords
thin film
thin
array
layer
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP8515934A
Other languages
English (en)
Japanese (ja)
Inventor
ヨン キ ミン
Original Assignee
テーウー エレクトロニクス カンパニー リミテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by テーウー エレクトロニクス カンパニー リミテッド filed Critical テーウー エレクトロニクス カンパニー リミテッド
Publication of JPH10508952A publication Critical patent/JPH10508952A/ja
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00214—Processes for the simultaneaous manufacturing of a network or an array of similar microstructural devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00174—See-saws
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N9/00—Details of colour television systems
    • H04N9/12—Picture reproducers
    • H04N9/30—Picture reproducers using solid-state colour display devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/032—Bimorph and unimorph actuators, e.g. piezo and thermo
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Nonlinear Science (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Mirrors, Picture Frames, Photograph Stands, And Related Fastening Devices (AREA)
  • Liquid Crystal (AREA)
JP8515934A 1994-11-14 1995-10-17 Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイ及びその製造方法 Abandoned JPH10508952A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1994/29763 1994-11-14
KR1019940029763A KR960018646A (ko) 1994-11-14 1994-11-14 광로조절장치의 제조방법
PCT/KR1995/000133 WO1996015630A1 (en) 1994-11-14 1995-10-17 Array of thin film actuated mirrors and method for the manufacture thereof

Publications (1)

Publication Number Publication Date
JPH10508952A true JPH10508952A (ja) 1998-09-02

Family

ID=19397806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8515934A Abandoned JPH10508952A (ja) 1994-11-14 1995-10-17 Ｍ×ｎ個の薄膜アクチュエーテッドミラーアレイ及びその製造方法

Country Status (18)

Country Link
US (1) US5606452A (OSRAM)
EP (1) EP0712021B1 (OSRAM)
JP (1) JPH10508952A (OSRAM)
KR (1) KR960018646A (OSRAM)
CN (1) CN1061203C (OSRAM)
AU (1) AU701168B2 (OSRAM)
BR (1) BR9510396A (OSRAM)
CA (1) CA2205168A1 (OSRAM)
CZ (1) CZ288386B6 (OSRAM)
DE (1) DE69522898T2 (OSRAM)
HU (1) HU221360B1 (OSRAM)
MY (1) MY132060A (OSRAM)
PE (1) PE36497A1 (OSRAM)
PL (1) PL178550B1 (OSRAM)
RU (1) RU2143715C1 (OSRAM)
TW (1) TW305944B (OSRAM)
UY (1) UY24087A1 (OSRAM)
WO (1) WO1996015630A1 (OSRAM)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6969635B2 (en) * 2000-12-07 2005-11-29 Reflectivity, Inc. Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
KR970054559A (ko) * 1995-12-22 1997-07-31 배순훈 광로 조절 장치의 제조 방법
TW357271B (en) * 1996-02-26 1999-05-01 Seiko Epson Corp Light regulator, display and the electronic machine
KR100229788B1 (ko) * 1996-05-29 1999-11-15 전주범 광로 조절 장치의 제조 방법
US5930025A (en) * 1996-05-29 1999-07-27 Daewoo Electronics Co., Ltd. Array of thin film actuated mirrors and method for the manufacture thereof
EP0810458B1 (en) * 1996-05-29 2001-09-19 Daewoo Electronics Co., Ltd Array of thin film actuated mirrors and method for the manufacture thereof
US5945898A (en) * 1996-05-31 1999-08-31 The Regents Of The University Of California Magnetic microactuator
US5991064A (en) * 1996-06-29 1999-11-23 Daewoo Electronics Co., Ltd. Thin film actuated mirror array and a method for the manufacture thereof
KR100212539B1 (ko) * 1996-06-29 1999-08-02 전주범 박막형 광로조절장치의 엑츄에이터 및 제조방법
AU717083B2 (en) * 1996-08-21 2000-03-16 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system
WO1998008127A1 (en) * 1996-08-21 1998-02-26 Daewoo Electronics Co., Ltd. Thin film actuated mirror array for use in an optical projection system
US5949568A (en) * 1996-12-30 1999-09-07 Daewoo Electronics Co., Ltd. Array of thin film actuated mirrors having a levelling member
EP1033037B1 (en) * 1997-06-30 2006-12-13 Daewoo Electronics Corporation Thin film actuated mirror including a seeding member and an electrodisplacive member made of materials having the same crystal structure and growth direction
US7281808B2 (en) * 2003-06-21 2007-10-16 Qortek, Inc. Thin, nearly wireless adaptive optical device
JP4037394B2 (ja) * 2004-09-16 2008-01-23 株式会社東芝 マイクロメカニカルデバイス

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3544201A (en) * 1968-01-02 1970-12-01 Gen Telephone & Elect Optical beam deflector
US3622792A (en) * 1969-12-29 1971-11-23 Bell Telephone Labor Inc Optical switching system
US4615595A (en) * 1984-10-10 1986-10-07 Texas Instruments Incorporated Frame addressed spatial light modulator
US4793699A (en) * 1985-04-19 1988-12-27 Canon Kabushiki Kaisha Projection apparatus provided with an electro-mechanical transducer element
US5172262A (en) * 1985-10-30 1992-12-15 Texas Instruments Incorporated Spatial light modulator and method
US5185660A (en) * 1989-11-01 1993-02-09 Aura Systems, Inc. Actuated mirror optical intensity modulation
US5126836A (en) * 1989-11-01 1992-06-30 Aura Systems, Inc. Actuated mirror optical intensity modulation
GB2239101B (en) * 1989-11-17 1993-09-22 Marconi Gec Ltd Optical device
US5085497A (en) * 1990-03-16 1992-02-04 Aura Systems, Inc. Method for fabricating mirror array for optical projection system
US5216537A (en) * 1990-06-29 1993-06-01 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5170283A (en) * 1991-07-24 1992-12-08 Northrop Corporation Silicon spatial light modulator
US5159225A (en) * 1991-10-18 1992-10-27 Aura Systems, Inc. Piezoelectric actuator
US5175465A (en) * 1991-10-18 1992-12-29 Aura Systems, Inc. Piezoelectric and electrostrictive actuators
US5247222A (en) * 1991-11-04 1993-09-21 Engle Craig D Constrained shear mode modulator
KR970003007B1 (ko) * 1993-05-21 1997-03-13 대우전자 주식회사 투사형 화상표시장치용 광로조절장치 및 그 구동방법
US5481396A (en) * 1994-02-23 1996-01-02 Aura Systems, Inc. Thin film actuated mirror array

Also Published As

Publication number Publication date
RU2143715C1 (ru) 1999-12-27
MY132060A (en) 2007-09-28
PE36497A1 (es) 1997-11-27
UY24087A1 (es) 1996-04-11
CA2205168A1 (en) 1996-05-23
US5606452A (en) 1997-02-25
EP0712021B1 (en) 2001-09-26
CN1061203C (zh) 2001-01-24
BR9510396A (pt) 1997-12-23
AU3674495A (en) 1996-06-06
CZ148797A3 (en) 1997-12-17
KR960018646A (ko) 1996-06-17
CN1163689A (zh) 1997-10-29
HUT77722A (hu) 1998-07-28
WO1996015630A1 (en) 1996-05-23
DE69522898T2 (de) 2002-06-20
PL178550B1 (pl) 2000-05-31
EP0712021A1 (en) 1996-05-15
CZ288386B6 (en) 2001-06-13
TW305944B (OSRAM) 1997-05-21
DE69522898D1 (de) 2001-10-31
PL320161A1 (en) 1997-09-15
AU701168B2 (en) 1999-01-21
HU221360B1 (en) 2002-09-28

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Legal Events

Date Code Title Description
A762 Written abandonment of application

Free format text: JAPANESE INTERMEDIATE CODE: A762

Effective date: 20040917