DE69520306T2 - Verbessertes Scharnier für mikromechanisches Gerät - Google Patents

Verbessertes Scharnier für mikromechanisches Gerät

Info

Publication number
DE69520306T2
DE69520306T2 DE69520306T DE69520306T DE69520306T2 DE 69520306 T2 DE69520306 T2 DE 69520306T2 DE 69520306 T DE69520306 T DE 69520306T DE 69520306 T DE69520306 T DE 69520306T DE 69520306 T2 DE69520306 T2 DE 69520306T2
Authority
DE
Germany
Prior art keywords
micromechanical device
improved hinge
hinge
improved
micromechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69520306T
Other languages
English (en)
Other versions
DE69520306D1 (de
Inventor
Richard L Knipe
Frank J Poradish
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Inc filed Critical Texas Instruments Inc
Application granted granted Critical
Publication of DE69520306D1 publication Critical patent/DE69520306D1/de
Publication of DE69520306T2 publication Critical patent/DE69520306T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05D—HINGES OR SUSPENSION DEVICES FOR DOORS, WINDOWS OR WINGS
    • E05D1/00—Pinless hinges; Substitutes for hinges
    • E05D1/02—Pinless hinges; Substitutes for hinges made of one piece
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Pivots And Pivotal Connections (AREA)
  • Micromachines (AREA)
DE69520306T 1994-06-30 1995-06-29 Verbessertes Scharnier für mikromechanisches Gerät Expired - Fee Related DE69520306T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/268,741 US5652671A (en) 1994-06-30 1994-06-30 Hinge for micro-mechanical device

Publications (2)

Publication Number Publication Date
DE69520306D1 DE69520306D1 (de) 2001-04-19
DE69520306T2 true DE69520306T2 (de) 2001-09-13

Family

ID=23024266

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69520306T Expired - Fee Related DE69520306T2 (de) 1994-06-30 1995-06-29 Verbessertes Scharnier für mikromechanisches Gerät

Country Status (8)

Country Link
US (1) US5652671A (de)
EP (1) EP0690329B1 (de)
JP (1) JPH0854555A (de)
KR (1) KR100344610B1 (de)
CN (1) CN1082192C (de)
CA (1) CA2149931A1 (de)
DE (1) DE69520306T2 (de)
TW (1) TW378325B (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6421365B1 (en) 1999-11-18 2002-07-16 Lambda Physik Ag Narrow band excimer or molecular fluorine laser having an output coupling interferometer
AUPP993299A0 (en) 1999-04-22 1999-05-20 Silverbrook Research Pty Ltd A micro-electro mechanical method and apparatus(mems15)
AUPP993099A0 (en) * 1999-04-22 1999-05-20 Silverbrook Research Pty Ltd A micromechancial device and method(ij46p2b)
AU770945B2 (en) * 1999-04-22 2004-03-11 Silverbrook Research Pty Ltd Actuator element
US6220561B1 (en) * 1999-06-30 2001-04-24 Sandia Corporation Compound floating pivot micromechanisms
US6952302B2 (en) * 2000-08-11 2005-10-04 Reflectivity, Inc Hinge structures for micro-mirror arrays
US6307169B1 (en) * 2000-02-01 2001-10-23 Motorola Inc. Micro-electromechanical switch
US7091924B1 (en) * 2000-06-09 2006-08-15 University Of Hawaii MEMS transmission and circuit components
US6556741B1 (en) 2000-10-25 2003-04-29 Omm, Inc. MEMS optical switch with torsional hinge and method of fabrication thereof
US6647164B1 (en) 2000-10-31 2003-11-11 3M Innovative Properties Company Gimbaled micro-mirror positionable by thermal actuators
US6711318B2 (en) 2001-01-29 2004-03-23 3M Innovative Properties Company Optical switch based on rotating vertical micro-mirror
US6571029B1 (en) 2001-02-13 2003-05-27 Omm, Inc. Method for determining and implementing electrical damping coefficients
US6556739B1 (en) 2001-02-13 2003-04-29 Omm, Inc. Electronic damping of MEMS devices using a look-up table
US6525396B2 (en) * 2001-04-17 2003-02-25 Texas Instruments Incorporated Selection of materials and dimensions for a micro-electromechanical switch for use in the RF regime
US7436573B2 (en) * 2003-02-12 2008-10-14 Texas Instruments Incorporated Electrical connections in microelectromechanical devices
US7459402B2 (en) * 2003-02-12 2008-12-02 Texas Instruments Incorporated Protection layers in micromirror array devices
US7183618B2 (en) * 2004-08-14 2007-02-27 Fusao Ishii Hinge for micro-mirror devices
US7320899B2 (en) * 2004-10-21 2008-01-22 Hewlett-Packard Development Company, L.P. Micro-displays and their manufacture
US20080068697A1 (en) * 2004-10-29 2008-03-20 Haluzak Charles C Micro-Displays and Their Manufacture
US7463406B2 (en) * 2004-12-31 2008-12-09 Au Optronics Corp. Method for fabricating microelectromechanical optical display devices
TWI249191B (en) * 2004-12-31 2006-02-11 Au Optronics Corp Method for fabricating a microelectromechanical optical display device
US7384799B2 (en) * 2005-01-26 2008-06-10 Taiwan Semiconductor Manufacturing Co., Ltd. Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devices
US7374962B2 (en) * 2005-09-29 2008-05-20 Miradia Inc. Method of fabricating reflective spatial light modulator having high contrast ratio
US8171804B2 (en) 2006-12-22 2012-05-08 Texas Instruments Incorporated Motion conversion system
US9138994B2 (en) 2009-03-03 2015-09-22 Taiwan Semiconductor Manufacturing Company, Ltd. MEMS devices and methods of fabrication thereof
US11892619B2 (en) 2019-09-04 2024-02-06 Lumentum Operations Llc MEMS device with a three-layer comb actuator structure and a two-layer hinge
CN116025222A (zh) * 2022-12-28 2023-04-28 厦门承宏五金有限公司 一种磁力机械锁

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4423401A (en) * 1982-07-21 1983-12-27 Tektronix, Inc. Thin-film electrothermal device
US4662746A (en) 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US5096279A (en) * 1984-08-31 1992-03-17 Texas Instruments Incorporated Spatial light modulator and method
US5061049A (en) * 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4793699A (en) * 1985-04-19 1988-12-27 Canon Kabushiki Kaisha Projection apparatus provided with an electro-mechanical transducer element
US4740410A (en) * 1987-05-28 1988-04-26 The Regents Of The University Of California Micromechanical elements and methods for their fabrication
US4956610A (en) 1988-02-12 1990-09-11 Pgm Diversified Industries, Inc. Current density measurement system by self-sustaining magnetic oscillation
US5083857A (en) 1990-06-29 1992-01-28 Texas Instruments Incorporated Multi-level deformable mirror device
US5233456A (en) * 1991-12-20 1993-08-03 Texas Instruments Incorporated Resonant mirror and method of manufacture
US5374792A (en) * 1993-01-04 1994-12-20 General Electric Company Micromechanical moving structures including multiple contact switching system
US5399415A (en) * 1993-02-05 1995-03-21 Cornell Research Foundation, Inc. Isolated tungsten microelectromechanical structures
WO2014078484A1 (en) 2012-11-15 2014-05-22 Endocyte, Inc. Conjugates for treating diseases caused by psma expressing cells

Also Published As

Publication number Publication date
TW378325B (en) 2000-01-01
CN1082192C (zh) 2002-04-03
EP0690329B1 (de) 2001-03-14
KR960002469A (ko) 1996-01-26
EP0690329A2 (de) 1996-01-03
CN1117108A (zh) 1996-02-21
US5652671A (en) 1997-07-29
DE69520306D1 (de) 2001-04-19
JPH0854555A (ja) 1996-02-27
CA2149931A1 (en) 1995-12-31
EP0690329A3 (de) 1997-05-21
KR100344610B1 (ko) 2002-11-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee