DE69520306D1 - Verbessertes Scharnier für mikromechanisches Gerät - Google Patents
Verbessertes Scharnier für mikromechanisches GerätInfo
- Publication number
- DE69520306D1 DE69520306D1 DE69520306T DE69520306T DE69520306D1 DE 69520306 D1 DE69520306 D1 DE 69520306D1 DE 69520306 T DE69520306 T DE 69520306T DE 69520306 T DE69520306 T DE 69520306T DE 69520306 D1 DE69520306 D1 DE 69520306D1
- Authority
- DE
- Germany
- Prior art keywords
- micromechanical device
- improved hinge
- hinge
- improved
- micromechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05D—HINGES OR SUSPENSION DEVICES FOR DOORS, WINDOWS OR WINGS
- E05D1/00—Pinless hinges; Substitutes for hinges
- E05D1/02—Pinless hinges; Substitutes for hinges made of one piece
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Pivots And Pivotal Connections (AREA)
- Micromachines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/268,741 US5652671A (en) | 1994-06-30 | 1994-06-30 | Hinge for micro-mechanical device |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69520306D1 true DE69520306D1 (de) | 2001-04-19 |
DE69520306T2 DE69520306T2 (de) | 2001-09-13 |
Family
ID=23024266
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69520306T Expired - Fee Related DE69520306T2 (de) | 1994-06-30 | 1995-06-29 | Verbessertes Scharnier für mikromechanisches Gerät |
Country Status (8)
Country | Link |
---|---|
US (1) | US5652671A (de) |
EP (1) | EP0690329B1 (de) |
JP (1) | JPH0854555A (de) |
KR (1) | KR100344610B1 (de) |
CN (1) | CN1082192C (de) |
CA (1) | CA2149931A1 (de) |
DE (1) | DE69520306T2 (de) |
TW (1) | TW378325B (de) |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6421365B1 (en) | 1999-11-18 | 2002-07-16 | Lambda Physik Ag | Narrow band excimer or molecular fluorine laser having an output coupling interferometer |
AU770945B2 (en) * | 1999-04-22 | 2004-03-11 | Silverbrook Research Pty Ltd | Actuator element |
AUPP993299A0 (en) | 1999-04-22 | 1999-05-20 | Silverbrook Research Pty Ltd | A micro-electro mechanical method and apparatus(mems15) |
AUPP993099A0 (en) * | 1999-04-22 | 1999-05-20 | Silverbrook Research Pty Ltd | A micromechancial device and method(ij46p2b) |
US6220561B1 (en) * | 1999-06-30 | 2001-04-24 | Sandia Corporation | Compound floating pivot micromechanisms |
US6952302B2 (en) * | 2000-08-11 | 2005-10-04 | Reflectivity, Inc | Hinge structures for micro-mirror arrays |
US6307169B1 (en) * | 2000-02-01 | 2001-10-23 | Motorola Inc. | Micro-electromechanical switch |
US7091924B1 (en) * | 2000-06-09 | 2006-08-15 | University Of Hawaii | MEMS transmission and circuit components |
US6556741B1 (en) | 2000-10-25 | 2003-04-29 | Omm, Inc. | MEMS optical switch with torsional hinge and method of fabrication thereof |
US6647164B1 (en) | 2000-10-31 | 2003-11-11 | 3M Innovative Properties Company | Gimbaled micro-mirror positionable by thermal actuators |
US6711318B2 (en) | 2001-01-29 | 2004-03-23 | 3M Innovative Properties Company | Optical switch based on rotating vertical micro-mirror |
US6556739B1 (en) | 2001-02-13 | 2003-04-29 | Omm, Inc. | Electronic damping of MEMS devices using a look-up table |
US6571029B1 (en) | 2001-02-13 | 2003-05-27 | Omm, Inc. | Method for determining and implementing electrical damping coefficients |
US6525396B2 (en) * | 2001-04-17 | 2003-02-25 | Texas Instruments Incorporated | Selection of materials and dimensions for a micro-electromechanical switch for use in the RF regime |
US7436573B2 (en) * | 2003-02-12 | 2008-10-14 | Texas Instruments Incorporated | Electrical connections in microelectromechanical devices |
US7459402B2 (en) * | 2003-02-12 | 2008-12-02 | Texas Instruments Incorporated | Protection layers in micromirror array devices |
US7183618B2 (en) * | 2004-08-14 | 2007-02-27 | Fusao Ishii | Hinge for micro-mirror devices |
US7320899B2 (en) * | 2004-10-21 | 2008-01-22 | Hewlett-Packard Development Company, L.P. | Micro-displays and their manufacture |
US20080068697A1 (en) * | 2004-10-29 | 2008-03-20 | Haluzak Charles C | Micro-Displays and Their Manufacture |
TWI249191B (en) * | 2004-12-31 | 2006-02-11 | Au Optronics Corp | Method for fabricating a microelectromechanical optical display device |
US7463406B2 (en) * | 2004-12-31 | 2008-12-09 | Au Optronics Corp. | Method for fabricating microelectromechanical optical display devices |
US7384799B2 (en) * | 2005-01-26 | 2008-06-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method to avoid amorphous-si damage during wet stripping processes in the manufacture of MEMS devices |
US7374962B2 (en) * | 2005-09-29 | 2008-05-20 | Miradia Inc. | Method of fabricating reflective spatial light modulator having high contrast ratio |
US8171804B2 (en) | 2006-12-22 | 2012-05-08 | Texas Instruments Incorporated | Motion conversion system |
US9138994B2 (en) | 2009-03-03 | 2015-09-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | MEMS devices and methods of fabrication thereof |
US11892619B2 (en) | 2019-09-04 | 2024-02-06 | Lumentum Operations Llc | MEMS device with a three-layer comb actuator structure and a two-layer hinge |
CN116025222B (zh) * | 2022-12-28 | 2024-09-20 | 厦门承宏五金有限公司 | 一种磁力机械锁 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4423401A (en) * | 1982-07-21 | 1983-12-27 | Tektronix, Inc. | Thin-film electrothermal device |
US4662746A (en) | 1985-10-30 | 1987-05-05 | Texas Instruments Incorporated | Spatial light modulator and method |
US5061049A (en) * | 1984-08-31 | 1991-10-29 | Texas Instruments Incorporated | Spatial light modulator and method |
US5096279A (en) * | 1984-08-31 | 1992-03-17 | Texas Instruments Incorporated | Spatial light modulator and method |
US4793699A (en) * | 1985-04-19 | 1988-12-27 | Canon Kabushiki Kaisha | Projection apparatus provided with an electro-mechanical transducer element |
US4740410A (en) * | 1987-05-28 | 1988-04-26 | The Regents Of The University Of California | Micromechanical elements and methods for their fabrication |
US4956610A (en) | 1988-02-12 | 1990-09-11 | Pgm Diversified Industries, Inc. | Current density measurement system by self-sustaining magnetic oscillation |
US5083857A (en) | 1990-06-29 | 1992-01-28 | Texas Instruments Incorporated | Multi-level deformable mirror device |
US5233456A (en) * | 1991-12-20 | 1993-08-03 | Texas Instruments Incorporated | Resonant mirror and method of manufacture |
US5374792A (en) * | 1993-01-04 | 1994-12-20 | General Electric Company | Micromechanical moving structures including multiple contact switching system |
US5399415A (en) * | 1993-02-05 | 1995-03-21 | Cornell Research Foundation, Inc. | Isolated tungsten microelectromechanical structures |
US9636413B2 (en) | 2012-11-15 | 2017-05-02 | Endocyte, Inc. | Conjugates for treating diseases caused by PSMA expressing cells |
-
1994
- 1994-06-30 US US08/268,741 patent/US5652671A/en not_active Expired - Fee Related
-
1995
- 1995-05-23 CA CA002149931A patent/CA2149931A1/en not_active Abandoned
- 1995-06-19 CN CN95107257A patent/CN1082192C/zh not_active Expired - Fee Related
- 1995-06-26 KR KR1019950017439A patent/KR100344610B1/ko not_active IP Right Cessation
- 1995-06-29 JP JP7164120A patent/JPH0854555A/ja active Pending
- 1995-06-29 EP EP95110147A patent/EP0690329B1/de not_active Expired - Lifetime
- 1995-06-29 DE DE69520306T patent/DE69520306T2/de not_active Expired - Fee Related
-
1996
- 1996-02-12 TW TW085101699A patent/TW378325B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CA2149931A1 (en) | 1995-12-31 |
JPH0854555A (ja) | 1996-02-27 |
CN1082192C (zh) | 2002-04-03 |
EP0690329A3 (de) | 1997-05-21 |
EP0690329A2 (de) | 1996-01-03 |
TW378325B (en) | 2000-01-01 |
KR100344610B1 (ko) | 2002-11-29 |
CN1117108A (zh) | 1996-02-21 |
KR960002469A (ko) | 1996-01-26 |
US5652671A (en) | 1997-07-29 |
EP0690329B1 (de) | 2001-03-14 |
DE69520306T2 (de) | 2001-09-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |