DE69522586T2 - Manipulator für einen testkopf einer automatischen testanlage - Google Patents

Manipulator für einen testkopf einer automatischen testanlage

Info

Publication number
DE69522586T2
DE69522586T2 DE69522586T DE69522586T DE69522586T2 DE 69522586 T2 DE69522586 T2 DE 69522586T2 DE 69522586 T DE69522586 T DE 69522586T DE 69522586 T DE69522586 T DE 69522586T DE 69522586 T2 DE69522586 T2 DE 69522586T2
Authority
DE
Germany
Prior art keywords
test head
manipulator
cable
test
vertical member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69522586T
Other languages
English (en)
Other versions
DE69522586D1 (de
Inventor
H Slocum
A Hochmuth
H Levy
Sepehr Kiani
Ryan Vallance
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teradyne Inc
Original Assignee
AESOP Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AESOP Inc filed Critical AESOP Inc
Publication of DE69522586D1 publication Critical patent/DE69522586D1/de
Application granted granted Critical
Publication of DE69522586T2 publication Critical patent/DE69522586T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20305—Robotic arm
    • Y10T74/20311—Robotic arm including power cable or connector
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T74/00—Machine element or mechanism
    • Y10T74/20—Control lever and linkage systems
    • Y10T74/20207—Multiple controlling elements for single controlled element
    • Y10T74/20341—Power elements as controlling elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manipulator (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Numerical Control (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
DE69522586T 1995-02-23 1995-10-11 Manipulator für einen testkopf einer automatischen testanlage Expired - Lifetime DE69522586T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US39264795A 1995-02-23 1995-02-23
PCT/US1995/013438 WO1996026446A1 (en) 1995-02-23 1995-10-11 Manipulator for automatic test equipment test head

Publications (2)

Publication Number Publication Date
DE69522586D1 DE69522586D1 (de) 2001-10-11
DE69522586T2 true DE69522586T2 (de) 2002-07-11

Family

ID=23551455

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69522586T Expired - Lifetime DE69522586T2 (de) 1995-02-23 1995-10-11 Manipulator für einen testkopf einer automatischen testanlage

Country Status (6)

Country Link
US (1) US5931048A (de)
EP (1) EP0811167B1 (de)
JP (2) JP3869465B2 (de)
AT (1) ATE205303T1 (de)
DE (1) DE69522586T2 (de)
WO (1) WO1996026446A1 (de)

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US6853181B1 (en) 2003-12-31 2005-02-08 Teradyne, Inc. Silicon-on-insulator channel architecture for automatic test equipment
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US6888343B1 (en) 1999-01-13 2005-05-03 Intest Ip Corporation Test head manipulator
US6837125B1 (en) 1999-07-14 2005-01-04 Teradyne, Inc. Automatic test manipulator with support internal to test head
WO2001004644A1 (en) * 1999-07-14 2001-01-18 Teradyne, Inc. Automatic test manipulator with support internal to test head
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MY144519A (en) * 2000-03-01 2011-09-30 Intest Corp Vertical counter balanced test head manipulator
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US6788078B2 (en) 2001-11-16 2004-09-07 Delaware Capital Formation, Inc. Apparatus for scan testing printed circuit boards
US6646431B1 (en) 2002-01-22 2003-11-11 Elite E/M, Inc. Test head manipulator
US6828774B2 (en) * 2002-02-27 2004-12-07 Teradyne, Inc. Rear-mounted gimbal for supporting test head
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US6722215B2 (en) 2002-06-18 2004-04-20 Michael Caradonna Manipulator apparatus with low-cost compliance
ATE364844T1 (de) * 2002-10-02 2007-07-15 Intest Corp Testkopfpositionierungsvorrichtung
US7235964B2 (en) * 2003-03-31 2007-06-26 Intest Corporation Test head positioning system and method
EP1947466B1 (de) 2003-08-06 2012-07-04 inTEST Corporation Testkopfpositionierungssystem
US8607935B2 (en) * 2005-12-20 2013-12-17 Intuitive Surgical Operations, Inc. Guide systems for laminated spring assemblies
US7378860B2 (en) * 2006-09-22 2008-05-27 Verigy (Singapore) Pte. Ltd. Wafer test head architecture and method of use
EP2104862B1 (de) * 2006-12-29 2012-08-08 inTEST Corporation System und verfahren zur testkopfpositionierung
TWI439709B (zh) * 2006-12-29 2014-06-01 Intest Corp 用於使負載沿平移軸線平移之操縱器與負載定位系統
MY172746A (en) * 2007-02-23 2019-12-11 Intest Corp Test head manipulator
DE102007011700B4 (de) * 2007-03-09 2009-03-26 Hubertus Heigl Handhabungsvorrichtung zum Positionieren eines Testkopfs, insbesondere an einer Prüfeinrichtung
WO2008137182A2 (en) 2007-05-07 2008-11-13 Intest Corporation Cradle and cable handler for a test head manipulator
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JP4514236B2 (ja) * 2008-02-25 2010-07-28 株式会社協同 プローブカード移載装置
DE112009005202T5 (de) * 2009-09-02 2012-07-19 Advantest Corporation Prüfvorrichtung, Prüfverfahren und Prog ramm
US8981807B2 (en) * 2010-07-27 2015-03-17 Intest Corporation Positioner system and method of positioning
US20140317453A1 (en) 2011-07-12 2014-10-23 Intest Corporation Method and apparatus for docking a test head with a peripheral
CN103558421B (zh) * 2013-11-02 2015-12-02 国家电网公司 用于断路器电气试验的接线杆
US10545173B2 (en) * 2013-11-26 2020-01-28 Commscope Connectivity Uk Limited Balunless test fixture
US10094854B2 (en) 2015-10-23 2018-10-09 Teradyne, Inc. Manipulator in automatic test equipment
KR102653657B1 (ko) * 2016-02-12 2024-04-03 (주)테크윙 반도체소자 테스트용 핸들러
KR101640749B1 (ko) * 2016-03-04 2016-07-19 (주)에스엠디에스피 모바일 모듈 및 이를 구비한 컨택 장치
US10634718B2 (en) 2016-10-10 2020-04-28 Reid-Ashman Manufacturing, Inc. Manipulator for moving a test head
US20180364131A1 (en) * 2017-06-14 2018-12-20 Optofidelity Oy Testing apparatus
US11498207B2 (en) 2021-01-08 2022-11-15 Teradyne, Inc. Test head manipulator configured to address uncontrolled test head rotation

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US4062455A (en) * 1976-11-22 1977-12-13 Flatau Carl R Remote manipulator
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Also Published As

Publication number Publication date
DE69522586D1 (de) 2001-10-11
JP3869465B2 (ja) 2007-01-17
JP2006322944A (ja) 2006-11-30
WO1996026446A1 (en) 1996-08-29
JP4589271B2 (ja) 2010-12-01
US5931048A (en) 1999-08-03
EP0811167A1 (de) 1997-12-10
ATE205303T1 (de) 2001-09-15
EP0811167B1 (de) 2001-09-05
JPH11501722A (ja) 1999-02-09

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: TERADYNE INC., BOSTON, MASS., US

8364 No opposition during term of opposition