DE69520702T2 - Optischer Wellenleiter und Verfahren zu seiner Herstellung - Google Patents
Optischer Wellenleiter und Verfahren zu seiner HerstellungInfo
- Publication number
- DE69520702T2 DE69520702T2 DE69520702T DE69520702T DE69520702T2 DE 69520702 T2 DE69520702 T2 DE 69520702T2 DE 69520702 T DE69520702 T DE 69520702T DE 69520702 T DE69520702 T DE 69520702T DE 69520702 T2 DE69520702 T2 DE 69520702T2
- Authority
- DE
- Germany
- Prior art keywords
- core
- optical waveguide
- diffraction grating
- cladding
- ultraviolet light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 title claims description 61
- 238000000034 method Methods 0.000 title description 29
- 238000004519 manufacturing process Methods 0.000 title description 17
- 230000008569 process Effects 0.000 title description 10
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium dioxide Chemical compound O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 claims description 78
- 229940119177 germanium dioxide Drugs 0.000 claims description 38
- 230000008859 change Effects 0.000 claims description 28
- 239000011248 coating agent Substances 0.000 claims description 16
- 238000000576 coating method Methods 0.000 claims description 16
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052810 boron oxide Inorganic materials 0.000 claims description 11
- 239000003638 chemical reducing agent Substances 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 4
- 229910052731 fluorine Inorganic materials 0.000 claims description 4
- 239000011737 fluorine Substances 0.000 claims description 4
- 238000005253 cladding Methods 0.000 description 48
- 239000013307 optical fiber Substances 0.000 description 48
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 30
- 239000011521 glass Substances 0.000 description 17
- 230000005540 biological transmission Effects 0.000 description 12
- 238000002310 reflectometry Methods 0.000 description 12
- 230000007547 defect Effects 0.000 description 7
- 230000001902 propagating effect Effects 0.000 description 7
- 235000012239 silicon dioxide Nutrition 0.000 description 6
- 239000010453 quartz Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000001427 coherent effect Effects 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000000411 transmission spectrum Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- VGRFVJMYCCLWPQ-UHFFFAOYSA-N germanium Chemical compound [Ge].[Ge] VGRFVJMYCCLWPQ-UHFFFAOYSA-N 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 230000001678 irradiating effect Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000007792 addition Methods 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000002050 diffraction method Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000005049 silicon tetrachloride Substances 0.000 description 2
- 239000004071 soot Substances 0.000 description 2
- IEXRMSFAVATTJX-UHFFFAOYSA-N tetrachlorogermane Chemical compound Cl[Ge](Cl)(Cl)Cl IEXRMSFAVATTJX-UHFFFAOYSA-N 0.000 description 2
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 229910008310 Si—Ge Inorganic materials 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- ILAHWRKJUDSMFH-UHFFFAOYSA-N boron tribromide Chemical compound BrB(Br)Br ILAHWRKJUDSMFH-UHFFFAOYSA-N 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02114—Refractive index modulation gratings, e.g. Bragg gratings characterised by enhanced photosensitivity characteristics of the fibre, e.g. hydrogen loading, heat treatment
- G02B6/02119—Photosensitivity profiles determining the grating structure, e.g. radial or longitudinal
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
- G02B6/02133—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/02123—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating
- G02B6/02133—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference
- G02B6/02138—Refractive index modulation gratings, e.g. Bragg gratings characterised by the method of manufacture of the grating using beam interference based on illuminating a phase mask
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02057—Optical fibres with cladding with or without a coating comprising gratings
- G02B6/02076—Refractive index modulation gratings, e.g. Bragg gratings
- G02B6/0208—Refractive index modulation gratings, e.g. Bragg gratings characterised by their structure, wavelength response
- G02B6/021—Refractive index modulation gratings, e.g. Bragg gratings characterised by their structure, wavelength response characterised by the core or cladding or coating, e.g. materials, radial refractive index profiles, cladding shape
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Fibers, Optical Fiber Cores, And Optical Fiber Bundles (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2048794 | 1994-02-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69520702D1 DE69520702D1 (de) | 2001-05-23 |
| DE69520702T2 true DE69520702T2 (de) | 2001-09-06 |
Family
ID=12028508
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69520702T Expired - Lifetime DE69520702T2 (de) | 1994-02-17 | 1995-02-17 | Optischer Wellenleiter und Verfahren zu seiner Herstellung |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US5627933A (https=) |
| EP (1) | EP0668514B1 (https=) |
| CN (2) | CN1147746C (https=) |
| DE (1) | DE69520702T2 (https=) |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19530461A1 (de) * | 1995-08-20 | 1997-02-27 | Oliver Hamann | Verfahren zur Polarisation von in optischen Wellenleitern geführtem Licht |
| US6236782B1 (en) | 1995-08-29 | 2001-05-22 | Arroyo Optics, Inc. | Grating assisted coupler devices |
| JPH09145927A (ja) * | 1995-11-20 | 1997-06-06 | Sumitomo Electric Ind Ltd | 導波路型光フィルタ |
| JP3935941B2 (ja) | 1996-01-16 | 2007-06-27 | ブリティッシュ・テレコミュニケーションズ・パブリック・リミテッド・カンパニー | 光媒体内に屈折率パターンを記録するための方法及び装置 |
| JP3929495B2 (ja) * | 1996-01-18 | 2007-06-13 | ブリティッシュ・テレコミュニケーションズ・パブリック・リミテッド・カンパニー | 光感応性屈折率クラッドを備えた光導波路 |
| US6169830B1 (en) | 1996-08-26 | 2001-01-02 | Arroyo Optics, Inc. | Methods of fabricating grating assisted coupler devices |
| US5985523A (en) * | 1996-09-09 | 1999-11-16 | The United States Of America As Represented By The Secretary Of The Navy | Method for irradiating patterns in optical waveguides containing radiation sensitive constituents |
| SE510703C2 (sv) * | 1996-09-17 | 1999-06-14 | Optisk Forskning Inst | Optisk organ samt förfarande vid sådant organ |
| US6195483B1 (en) * | 1996-09-30 | 2001-02-27 | The United States Of America As Represented By The Secretary Of The Navy | Fiber Bragg gratings in chalcogenide or chalcohalide based infrared optical fibers |
| AU729612B2 (en) * | 1996-11-19 | 2001-02-08 | Alcatel | Optical waveguide with Bragg grating |
| DE19647789A1 (de) * | 1996-11-19 | 1998-05-20 | Alsthom Cge Alcatel | Planarer optischer Wellenleiter, Planarer optischer Wellenleiter mit Bragg-Gitter und Herstellungsverfahren hierfür |
| GB9703078D0 (en) * | 1997-02-14 | 1997-04-02 | Univ Southampton | Optical fibre and optical fibre device |
| JP3152182B2 (ja) * | 1997-10-07 | 2001-04-03 | 日立電線株式会社 | ガラス導波路素子及びその製造方法 |
| US5995697A (en) * | 1997-11-19 | 1999-11-30 | Northern Telecom Limited | Partially coated grating optical fibre, method of producing same and fibre telecommunications system |
| JP3725319B2 (ja) * | 1998-01-28 | 2005-12-07 | 昭和電線電纜株式会社 | グレーティング形成用フォトセンシティブファイバの製造方法 |
| US6058231A (en) * | 1998-02-13 | 2000-05-02 | 3M Innovative Properties Company | Boron-doped optical fiber |
| US6298184B1 (en) | 1998-12-04 | 2001-10-02 | Cidra Corporation | Method and apparatus for forming a tube-encased bragg grating |
| TW419607B (en) | 1999-01-13 | 2001-01-21 | Sumitomo Electric Industries | Optical fiber grating element, manufacture method of the same and optical filter |
| FR2788859B1 (fr) * | 1999-01-25 | 2002-07-19 | Cit Alcatel | Fibre optique photosensible pour filtre a reseau de bragg, methode de fabrication de ladite fibre, et compensateur de dispersion chromatique et de pente de dispersion chromatique comprenant une telle fibre |
| US6977137B2 (en) | 1999-07-29 | 2005-12-20 | Corning Incorporated | Direct writing of optical devices in silica-based glass using femtosecond pulse lasers |
| US6573026B1 (en) | 1999-07-29 | 2003-06-03 | Corning Incorporated | Femtosecond laser writing of glass, including borosilicate, sulfide, and lead glasses |
| US6370837B1 (en) | 1999-08-04 | 2002-04-16 | Anthony B. Mcmahon | System for laying masonry blocks |
| KR20020038786A (ko) * | 1999-09-30 | 2002-05-23 | 알프레드 엘. 미첼슨 | 실리카 유리의 심층 ｕｖ 레이저 내부 유도 치밀화방법 |
| KR100318744B1 (ko) * | 2000-02-21 | 2001-12-28 | 윤종용 | 광파이버를 이용한 액정 디스플레이어의 후방 조명장치 |
| JP2002071997A (ja) * | 2000-08-30 | 2002-03-12 | Sumitomo Electric Ind Ltd | 光ファイバおよび光部品 |
| CA2354321A1 (en) * | 2001-07-26 | 2003-01-26 | Viamode Photonics Inc. | Apparatus for writing features in or on photosensitive medium |
| US7233739B2 (en) * | 2001-10-22 | 2007-06-19 | Patel C Kumar N | Optical bit stream reader system |
| US20030156819A1 (en) * | 2002-02-15 | 2003-08-21 | Mark Pruss | Optical waveguide |
| US6650796B2 (en) * | 2002-02-21 | 2003-11-18 | Northrop Grumman Corporation | Waveguide optical frequency router |
| US6950591B2 (en) * | 2002-05-16 | 2005-09-27 | Corning Incorporated | Laser-written cladding for waveguide formations in glass |
| SE0201600D0 (sv) * | 2002-05-30 | 2002-05-30 | Ortoplan As | Method for forming gratings |
| EP1408354A1 (en) * | 2002-10-10 | 2004-04-14 | Corning O.T.I. SRL | Optical fiber with Bragg grating |
| US7689087B2 (en) * | 2003-03-21 | 2010-03-30 | Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of Industry, Through The Communications Research Centre Canada | Method of changing the birefringence of an optical waveguide by laser modification of the cladding |
| EP1462831B1 (en) * | 2003-03-21 | 2008-05-14 | Her Majesty in Right of Canada as Represented by the Minister of Industry | Bragg grating and method of producing a bragg using an ultrafast laser |
| US7031571B2 (en) | 2003-03-21 | 2006-04-18 | Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of Industry Through The Communications Research Centre Canada | Bragg grating and method of producing a Bragg grating using an ultrafast laser |
| CN100363764C (zh) * | 2004-09-03 | 2008-01-23 | 中国科学院半导体研究所 | 紫外写入二氧化硅波导上制备布拉格光栅的方法 |
| US20090034786A1 (en) * | 2007-06-02 | 2009-02-05 | Newell Steven P | Application for Non-Display of Images Having Adverse Content Categorizations |
| US8272236B2 (en) * | 2008-06-18 | 2012-09-25 | Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of Industry, Through The Communications Research Centre Canada | High temperature stable fiber grating sensor and method for producing same |
| JP5850992B1 (ja) * | 2014-07-30 | 2016-02-03 | 株式会社フジクラ | 光デバイス、及び、光デバイスの製造方法 |
| CN107688211B (zh) * | 2016-08-04 | 2020-09-25 | 苏州旭创科技有限公司 | 一种光波导器件及其制作方法 |
| WO2019069989A1 (ja) * | 2017-10-06 | 2019-04-11 | 住友電気工業株式会社 | 光ファイバ用プリフォーム、光ファイバ用プリフォームの製造方法、及び、光ファイバ用プリフォームの脈理ピッチの設定方法 |
| CN110196467A (zh) * | 2019-06-14 | 2019-09-03 | 武汉光迅科技股份有限公司 | 一种多输入型阵列波导光栅及其制作方法 |
| US11726260B2 (en) | 2020-09-29 | 2023-08-15 | Google Llc | Substrate coupled grating couplers in photonic integrated circuits |
| CN114038740B (zh) * | 2021-10-29 | 2025-09-02 | 上海华力集成电路制造有限公司 | 一种掩模制备方法和掩模结构 |
| CN114089470B (zh) * | 2022-01-20 | 2022-05-06 | 深圳珑璟光电科技有限公司 | 一种全息光波导及其制作装置、近眼显示设备 |
| CN114488397B (zh) * | 2022-01-27 | 2023-09-19 | 苏州大学 | 一种基于印刷电路板的平面光波导结构及其制作方法 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3474657D1 (en) * | 1984-01-31 | 1988-11-24 | Nippon Telegraph & Telephone | Method of fabricating optical fiber preforms |
| EP0191063B1 (en) * | 1984-08-13 | 1992-05-13 | United Technologies Corporation | Method for impressing grating within fiber optics |
| JPH0629156B2 (ja) * | 1985-10-09 | 1994-04-20 | 住友電気工業株式会社 | 光フアイバの製造方法 |
| US4820018A (en) * | 1987-10-30 | 1989-04-11 | Gte Laboratories Incorporated | Optical fiber for light amplification |
| US5461687A (en) * | 1992-03-18 | 1995-10-24 | Trw Inc. | Wavelength controlled optical true time delay generator |
| SG125045A1 (en) * | 1992-06-24 | 2006-09-29 | British Telecomm | Optical device including refractive index modulation |
| US5400422A (en) * | 1993-01-21 | 1995-03-21 | The United States Of America As Represented By The Secretary Of The Navy | Technique to prepare high-reflectance optical fiber bragg gratings with single exposure in-line or fiber draw tower |
-
1995
- 1995-02-16 CN CNB951021141A patent/CN1147746C/zh not_active Expired - Lifetime
- 1995-02-16 US US08/389,828 patent/US5627933A/en not_active Expired - Lifetime
- 1995-02-16 CN CN03158002.5A patent/CN1265221C/zh not_active Expired - Lifetime
- 1995-02-17 EP EP95102264A patent/EP0668514B1/en not_active Expired - Lifetime
- 1995-02-17 DE DE69520702T patent/DE69520702T2/de not_active Expired - Lifetime
-
1997
- 1997-01-28 US US08/789,779 patent/US5790726A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP0668514A3 (https=) | 1995-09-27 |
| US5790726A (en) | 1998-08-04 |
| CN1492244A (zh) | 2004-04-28 |
| CN1265221C (zh) | 2006-07-19 |
| CN1147746C (zh) | 2004-04-28 |
| US5627933A (en) | 1997-05-06 |
| DE69520702D1 (de) | 2001-05-23 |
| EP0668514B1 (en) | 2001-04-18 |
| EP0668514A2 (en) | 1995-08-23 |
| CN1115033A (zh) | 1996-01-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |