DE69506001T2 - Positiv arbeitende lichtempfindliche zusammensetzung - Google Patents

Positiv arbeitende lichtempfindliche zusammensetzung

Info

Publication number
DE69506001T2
DE69506001T2 DE69506001T DE69506001T DE69506001T2 DE 69506001 T2 DE69506001 T2 DE 69506001T2 DE 69506001 T DE69506001 T DE 69506001T DE 69506001 T DE69506001 T DE 69506001T DE 69506001 T2 DE69506001 T2 DE 69506001T2
Authority
DE
Germany
Prior art keywords
light sensitive
sensitive composition
working light
positively working
positively
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69506001T
Other languages
English (en)
Other versions
DE69506001D1 (de
Inventor
M Rahman
Daniel Aubin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EMD Performance Materials Corp
Original Assignee
Clariant Finance BVI Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Clariant Finance BVI Ltd filed Critical Clariant Finance BVI Ltd
Application granted granted Critical
Publication of DE69506001D1 publication Critical patent/DE69506001D1/de
Publication of DE69506001T2 publication Critical patent/DE69506001T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
DE69506001T 1994-10-24 1995-10-12 Positiv arbeitende lichtempfindliche zusammensetzung Expired - Fee Related DE69506001T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US32775894A 1994-10-24 1994-10-24
US44626195A 1995-05-22 1995-05-22
PCT/US1995/012719 WO1996012988A1 (en) 1994-10-24 1995-10-12 Positive photosensitive composition

Publications (2)

Publication Number Publication Date
DE69506001D1 DE69506001D1 (de) 1998-12-17
DE69506001T2 true DE69506001T2 (de) 1999-06-10

Family

ID=26986049

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69506001T Expired - Fee Related DE69506001T2 (de) 1994-10-24 1995-10-12 Positiv arbeitende lichtempfindliche zusammensetzung

Country Status (7)

Country Link
EP (1) EP0788620B1 (de)
JP (1) JP3592332B2 (de)
KR (1) KR100384569B1 (de)
CN (1) CN1082676C (de)
DE (1) DE69506001T2 (de)
TW (1) TW421731B (de)
WO (1) WO1996012988A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69821304T2 (de) * 1997-10-03 2004-11-18 Jsr Corp. Strahlungsempfindliche Harzzusammensetzung
KR101042667B1 (ko) * 2004-07-05 2011-06-20 주식회사 동진쎄미켐 포토레지스트 조성물

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2571136B2 (ja) * 1989-11-17 1997-01-16 日本ゼオン株式会社 ポジ型レジスト組成物
US5312905A (en) * 1990-07-27 1994-05-17 Fuji Photo Film Co., Ltd. 2-diazo-1,2-naphthoquinone compounds
US5260162A (en) * 1990-12-17 1993-11-09 Khanna Dinesh N Photosensitizer compositions containing diazo fluorinated esters of hexafluoro-bis-phenols or bis-hexafluoroethers
JPH04284454A (ja) * 1991-03-14 1992-10-09 Sumitomo Chem Co Ltd ポジ型レジスト組成物

Also Published As

Publication number Publication date
KR100384569B1 (ko) 2003-08-19
CN1161751A (zh) 1997-10-08
JPH10507850A (ja) 1998-07-28
EP0788620A1 (de) 1997-08-13
TW421731B (en) 2001-02-11
WO1996012988A1 (en) 1996-05-02
JP3592332B2 (ja) 2004-11-24
CN1082676C (zh) 2002-04-10
EP0788620B1 (de) 1998-11-11
DE69506001D1 (de) 1998-12-17
KR970707469A (ko) 1997-12-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: AZ ELECTRONIC MATERIALS USA CORP. (N.D.GES.D. STAA

8328 Change in the person/name/address of the agent

Representative=s name: PATENTANWAELTE ISENBRUCK BOESL HOERSCHLER WICHMANN HU

8339 Ceased/non-payment of the annual fee