DE69505749D1 - Dickenmessverfahren für transparentes material - Google Patents

Dickenmessverfahren für transparentes material

Info

Publication number
DE69505749D1
DE69505749D1 DE69505749T DE69505749T DE69505749D1 DE 69505749 D1 DE69505749 D1 DE 69505749D1 DE 69505749 T DE69505749 T DE 69505749T DE 69505749 T DE69505749 T DE 69505749T DE 69505749 D1 DE69505749 D1 DE 69505749D1
Authority
DE
Germany
Prior art keywords
pct
transparent material
thickness
measurement method
sec
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69505749T
Other languages
English (en)
Other versions
DE69505749T2 (de
Inventor
Jingwei Zhang
Pascal Grente
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SGCC SAS
Original Assignee
SGCC SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SGCC SAS filed Critical SGCC SAS
Application granted granted Critical
Publication of DE69505749D1 publication Critical patent/DE69505749D1/de
Publication of DE69505749T2 publication Critical patent/DE69505749T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
DE69505749T 1994-02-18 1995-02-17 Dickenmessverfahren für transparentes material Expired - Fee Related DE69505749T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9401846A FR2716531B1 (fr) 1994-02-18 1994-02-18 Procédé de mesure d'épaisseur d'un matériau transparent.
PCT/FR1995/000184 WO1995022740A1 (fr) 1994-02-18 1995-02-17 Procede de mesure d'epaisseur d'un materiau transparent

Publications (2)

Publication Number Publication Date
DE69505749D1 true DE69505749D1 (de) 1998-12-10
DE69505749T2 DE69505749T2 (de) 1999-07-01

Family

ID=9460207

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69505749T Expired - Fee Related DE69505749T2 (de) 1994-02-18 1995-02-17 Dickenmessverfahren für transparentes material

Country Status (14)

Country Link
US (1) US5657124A (de)
EP (1) EP0695414B1 (de)
JP (1) JPH08509298A (de)
CN (1) CN1123570A (de)
AT (1) ATE173082T1 (de)
AU (1) AU690966B2 (de)
BR (1) BR9506143A (de)
CA (1) CA2160802A1 (de)
DE (1) DE69505749T2 (de)
ES (1) ES2126255T3 (de)
FR (1) FR2716531B1 (de)
MX (1) MX9504353A (de)
NO (1) NO954112D0 (de)
WO (1) WO1995022740A1 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2762083B1 (fr) * 1997-04-11 1999-07-02 Verreries Souchon Neuvesel Procede optique de mesure de l'epaisseur de la paroi et/ou de l'ovalisation d'un recipient et dispositif en faisant application
FR2780778B3 (fr) * 1998-07-03 2000-08-11 Saint Gobain Vitrage Procede et dispositif pour la mesure de l'epaisseur d'un materiau transparent
US6307212B1 (en) * 1999-04-01 2001-10-23 The United States Of America As Represented By The Secretary Of The Navy High resolution imaging using optically transparent phosphors
DE19928171B4 (de) * 1999-06-19 2011-01-05 Leybold Optics Gmbh Verfahren zur kontinuierlichen Bestimmung der optischen Schichtdicke von Beschichtungen
US6683695B1 (en) 1999-07-21 2004-01-27 Electronic Design To Market, Inc. Method and apparatus for detecting properties of reflective transparent surface coatings on a sheet of transparent material
US6693275B1 (en) 2000-03-23 2004-02-17 Plastipak Packaging, Inc. Method and apparatus for inspecting blow molded containers
US20040061873A1 (en) * 2002-09-26 2004-04-01 Davis Brett L. Method and apparatus for detecting media thickness
US7057735B2 (en) * 2002-11-14 2006-06-06 Fitel U.S.A. Corp. Method for measuring the optical and physical thickness of optically transparent objects
CN1307402C (zh) * 2004-06-03 2007-03-28 中南大学 高精度在线铝板凸度检测装置
US7417749B1 (en) 2004-09-01 2008-08-26 Electric Design To Market, Inc. Method and apparatus for protecting an optical transmission measurement when sensing transparent materials
US20060054843A1 (en) * 2004-09-13 2006-03-16 Electronic Design To Market, Inc. Method and apparatus of improving optical reflection images of a laser on a changing surface location
US20060285120A1 (en) * 2005-02-25 2006-12-21 Verity Instruments, Inc. Method for monitoring film thickness using heterodyne reflectometry and grating interferometry
US7339682B2 (en) * 2005-02-25 2008-03-04 Verity Instruments, Inc. Heterodyne reflectometer for film thickness monitoring and method for implementing
US20060266743A1 (en) * 2005-05-30 2006-11-30 National Chiao Tung University Laser-ablated fiber devices and method of manufacturing the same
CN100422776C (zh) * 2005-06-17 2008-10-01 陈南光 激光微加工处理全光纤型元件的制作方法
US7545503B2 (en) * 2005-09-27 2009-06-09 Verity Instruments, Inc. Self referencing heterodyne reflectometer and method for implementing
EP1946040B1 (de) * 2005-11-07 2017-03-22 Cardinal CG Company Verfahren und vorrichtung zum identifizieren von fotokatalytischen beschichtungen
US7583368B1 (en) 2006-04-05 2009-09-01 Electronic Design To Market, Inc. Method of enhancing measurement of stress in glass
US7505496B2 (en) * 2006-04-05 2009-03-17 Ciena Corporation Systems and methods for real-time compensation for non-linearity in optical sources for analog signal transmission
US7652760B1 (en) 2006-04-05 2010-01-26 Electronic Design To Market, Inc. System for detecting coatings on transparent or semi-transparent materials
US20080065351A1 (en) * 2006-09-11 2008-03-13 George Panotopoulos Thickness measurement based navigation apparatus and methods
US20110206830A1 (en) * 2010-02-19 2011-08-25 United Solar Ovonic Llc Reverse interferometric method and apparatus for measuring layer thickness
FR2971847B1 (fr) * 2011-02-18 2013-07-19 Tiama Procede et dispositif pour detecter des defauts de repartition de matiere dans des recipients transparents
FR2977312B1 (fr) * 2011-06-29 2014-06-13 Sidel Participations Procede de mesure de l'epaisseur d'une paroi transparente d'un recipient par interferometrie et dispositif pour la mise en oeuvre du procede
CN103438802B (zh) * 2013-09-17 2016-04-20 上海理工大学 光纤涂覆层几何参数测量方法
US9593939B1 (en) * 2013-12-30 2017-03-14 Flextronics Ap, Llc Glue thickness inspection (GTI)
MX359196B (es) * 2014-02-14 2018-09-19 Halliburton Energy Services Inc Espectroscopía in situ para el monitoreo de la fabricación de elementos computacionales integrados.
TWI700473B (zh) * 2014-06-04 2020-08-01 美商康寧公司 用於量測玻璃物品厚度的方法及系統
WO2019101803A1 (en) * 2017-11-24 2019-05-31 Abb Schweiz Ag System and method for characterizing a coating such as a paint film by radiation, and painting facility with such a system
US10852125B2 (en) 2017-11-28 2020-12-01 Koh Young Technology Inc. Apparatus for inspecting film on substrate by using optical interference and method thereof
US10859371B2 (en) 2017-11-28 2020-12-08 Koh Young Technology Inc. Apparatus for inspecting substrate and method thereof
KR102195240B1 (ko) * 2017-11-28 2020-12-24 주식회사 고영테크놀러지 기판 검사 장치 및 기판 검사 방법
CN113405478A (zh) * 2021-06-01 2021-09-17 西安工业大学 一种透明材料厚度测量方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1329240A (en) * 1969-11-11 1973-09-05 British Aircraft Corp Ltd Optical measurement of the thickness of translucent objects
AU8181375A (en) * 1974-06-07 1976-12-09 Decca Ltd Determination of thickness of uniform films
JPS5535214A (en) * 1978-09-04 1980-03-12 Asahi Chem Ind Co Ltd Method and device for film-thickness measurement making use of infrared-ray interference
FR2589578B1 (fr) * 1985-11-05 1988-02-05 Univ Reims Champagne Ardenne Procede et dispositif de controle optique par reflexion d'un materiau ou composant semi-transparent
US5402230A (en) * 1991-12-16 1995-03-28 Tsinghua University Heterodyne interferometric optical fiber displacement sensor for measuring displacement of an object

Also Published As

Publication number Publication date
FR2716531A1 (fr) 1995-08-25
AU690966B2 (en) 1998-05-07
DE69505749T2 (de) 1999-07-01
WO1995022740A1 (fr) 1995-08-24
NO954112L (no) 1995-10-16
NO954112D0 (no) 1995-10-16
FR2716531B1 (fr) 1996-05-03
ES2126255T3 (es) 1999-03-16
AU1815595A (en) 1995-09-04
CN1123570A (zh) 1996-05-29
US5657124A (en) 1997-08-12
MX9504353A (es) 1997-05-31
EP0695414A1 (de) 1996-02-07
CA2160802A1 (fr) 1995-08-24
JPH08509298A (ja) 1996-10-01
BR9506143A (pt) 1996-04-16
EP0695414B1 (de) 1998-11-04
ATE173082T1 (de) 1998-11-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee