ATE321254T1 - Verfahren zur messung von konturverunderungen - Google Patents

Verfahren zur messung von konturverunderungen

Info

Publication number
ATE321254T1
ATE321254T1 AT03795501T AT03795501T ATE321254T1 AT E321254 T1 ATE321254 T1 AT E321254T1 AT 03795501 T AT03795501 T AT 03795501T AT 03795501 T AT03795501 T AT 03795501T AT E321254 T1 ATE321254 T1 AT E321254T1
Authority
AT
Austria
Prior art keywords
split beams
differential phase
measuring
roundings
optical path
Prior art date
Application number
AT03795501T
Other languages
English (en)
Inventor
Ian Saunders
Brug Hedser Van
Jacobus Johannes Korpershoek
Original Assignee
Tno
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tno filed Critical Tno
Application granted granted Critical
Publication of ATE321254T1 publication Critical patent/ATE321254T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G01B9/02098—Shearing interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02097—Self-interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Image Analysis (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
AT03795501T 2002-09-13 2003-09-12 Verfahren zur messung von konturverunderungen ATE321254T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL1021457A NL1021457C2 (nl) 2002-09-13 2002-09-13 Werkwijze voor het meten van contourvariaties.

Publications (1)

Publication Number Publication Date
ATE321254T1 true ATE321254T1 (de) 2006-04-15

Family

ID=31987582

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03795501T ATE321254T1 (de) 2002-09-13 2003-09-12 Verfahren zur messung von konturverunderungen

Country Status (7)

Country Link
US (1) US7471398B2 (de)
EP (1) EP1540271B1 (de)
AT (1) ATE321254T1 (de)
AU (1) AU2003265007A1 (de)
DE (1) DE60304222T2 (de)
NL (1) NL1021457C2 (de)
WO (1) WO2004025216A1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7916304B2 (en) 2006-12-21 2011-03-29 Howard Hughes Medical Institute Systems and methods for 3-dimensional interferometric microscopy
KR101085061B1 (ko) * 2009-04-08 2011-11-18 한국과학기술원 고속카메라와 연속위상주사 방법을 이용한 진동둔감 간섭계
GB2474882B (en) * 2009-10-29 2014-04-09 Tgs Geophysical Company Uk Ltd Signal processing
EP3092468B1 (de) * 2014-05-27 2021-04-07 Ghgsat Inc. Auf fabry-perot-interferometer basierende satellitengestützter nachweis von atmosphärischer gasspuren
DE102014111979A1 (de) * 2014-08-21 2016-02-25 Martin Berz Interferometer
CN107923735B (zh) * 2015-08-17 2020-06-16 Qso干涉系统股份公司 用于推导物体表面的形貌的方法和设备
DE102016221996B4 (de) 2016-11-09 2022-04-28 Henkel Ag & Co. Kgaa Pflanzenbutter enthaltende kosmetische Reinigungszusammensetzung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1238711B (it) * 1990-04-13 1993-09-01 Galileo Spa Off Metodo ed impianto interferometrico a frange codificate per rivelazione del fronte d'onda in ottica.
JPH04310847A (ja) * 1991-04-10 1992-11-02 Olympus Optical Co Ltd 干渉縞の位相検出装置及び方法
JP3209645B2 (ja) * 1993-10-12 2001-09-17 三菱電機株式会社 位相シフトマスクの検査方法およびその方法に用いる検査装置
WO1999054924A1 (fr) * 1998-04-21 1999-10-28 Hitachi, Ltd. Dispositif et procede permettant de mesurer l'epaisseur d'un film mince, et procede et dispositif de production d'un film mince utilisant les premiers
US6690473B1 (en) * 1999-02-01 2004-02-10 Sensys Instruments Corporation Integrated surface metrology
NL1018943C2 (nl) * 2001-09-13 2003-03-14 Tno Werkwijze en inrichting voor het polijsten van een werkstukoppervlak.
IL146924A (en) * 2001-12-04 2007-03-08 Nova Measuring Instr Ltd Metal cmp process monitoring

Also Published As

Publication number Publication date
DE60304222D1 (de) 2006-05-11
EP1540271A1 (de) 2005-06-15
WO2004025216A1 (en) 2004-03-25
US20060119861A1 (en) 2006-06-08
EP1540271B1 (de) 2006-03-22
DE60304222T2 (de) 2006-11-02
US7471398B2 (en) 2008-12-30
AU2003265007A1 (en) 2004-04-30
NL1021457C2 (nl) 2004-03-16

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