DE69426521T2 - Metrologisches instrument - Google Patents

Metrologisches instrument

Info

Publication number
DE69426521T2
DE69426521T2 DE69426521T DE69426521T DE69426521T2 DE 69426521 T2 DE69426521 T2 DE 69426521T2 DE 69426521 T DE69426521 T DE 69426521T DE 69426521 T DE69426521 T DE 69426521T DE 69426521 T2 DE69426521 T2 DE 69426521T2
Authority
DE
Germany
Prior art keywords
metrological instrument
metrological
instrument
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69426521T
Other languages
English (en)
Other versions
DE69426521D1 (de
Inventor
Peter Seddon
John Coleman
Michael Mills
Nigel Aston
Dean Onyon
Trevor Dixey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taylor Hobson Ltd
Original Assignee
Taylor Hobson Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taylor Hobson Ltd filed Critical Taylor Hobson Ltd
Application granted granted Critical
Publication of DE69426521D1 publication Critical patent/DE69426521D1/de
Publication of DE69426521T2 publication Critical patent/DE69426521T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/34—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/02—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups with provision for altering or correcting the law of variation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
    • G01D5/2208—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils
    • G01D5/2216—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils by a movable ferromagnetic element, e.g. a core

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Technology Law (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
DE69426521T 1993-09-14 1994-09-14 Metrologisches instrument Expired - Fee Related DE69426521T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB9319037A GB2281779B (en) 1993-09-14 1993-09-14 Metrological instrument
PCT/GB1994/002007 WO1995008096A2 (en) 1993-09-14 1994-09-14 Metrological instrument

Publications (2)

Publication Number Publication Date
DE69426521D1 DE69426521D1 (de) 2001-02-08
DE69426521T2 true DE69426521T2 (de) 2001-08-09

Family

ID=10741997

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69426521T Expired - Fee Related DE69426521T2 (de) 1993-09-14 1994-09-14 Metrologisches instrument

Country Status (6)

Country Link
US (1) US5740616A (de)
EP (1) EP0668989B1 (de)
JP (1) JPH08503311A (de)
DE (1) DE69426521T2 (de)
GB (1) GB2281779B (de)
WO (1) WO1995008096A2 (de)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3256124B2 (ja) * 1996-02-22 2002-02-12 株式会社ミツトヨ 形状測定機
US6397667B1 (en) 1997-12-26 2002-06-04 Mitutoyo Corporation Surface property measuring device
JP3640201B2 (ja) * 1997-12-26 2005-04-20 株式会社ミツトヨ 表面性状測定機
DE29812172U1 (de) * 1998-07-08 1999-11-18 Ratiotec Konstruktion Und Vert Meßtaster
GB2339287B (en) 1998-07-09 2002-12-24 Taylor Hobson Ltd Transducer circuit
US6469687B1 (en) * 1998-12-28 2002-10-22 Koninklijke Philips Electronics N.V. Driver circuit and method for electro-optic display device
GB2350429B (en) 1999-05-28 2003-11-12 Taylor Hobson Ltd A metrological instrument
JP3443050B2 (ja) * 1999-10-21 2003-09-02 株式会社ミツトヨ 姿勢調整装置
JP3516630B2 (ja) 2000-03-29 2004-04-05 株式会社ミツトヨ 形状測定機及び形状測定方法
JP3632153B2 (ja) * 2000-11-06 2005-03-23 株式会社東京精密 粗さ測定方法及び粗さ測定装置
JP3831218B2 (ja) * 2001-08-21 2006-10-11 株式会社ミツトヨ 出力付き測定器
US6678964B2 (en) * 2001-10-11 2004-01-20 Robert Bosch Gmbh Tracer device
JP3691032B2 (ja) * 2002-08-23 2005-08-31 ファナック株式会社 加工装置
JP4529562B2 (ja) * 2004-07-06 2010-08-25 横浜ゴム株式会社 接触特性の評価方法及び接触状態の評価用コンピュータプログラム
US7346999B2 (en) * 2005-01-18 2008-03-25 General Electric Company Methods and system for inspection of fabricated components
DE102005034515B4 (de) * 2005-07-20 2019-06-19 Immobiliengesellschaft Helmut Fischer Gmbh & Co. Kg Messstativ zur Aufnahme einer Messvorrichtung
GB0804114D0 (en) 2008-03-05 2008-04-09 Renishaw Plc Surface sensing device
GB2464509C (en) * 2008-10-17 2014-05-21 Taylor Hobson Ltd Surface measurement instrument and method
EP2199732B1 (de) * 2008-12-19 2017-10-11 Klingelnberg AG Vorrichtung mit Rauheitsmesstaster
JP5485676B2 (ja) * 2009-12-16 2014-05-07 株式会社ミツトヨ 表面性状測定機
CA2910738C (en) 2013-07-09 2021-10-05 Chandra Sekhar Jalluri System and method for characterizing surfaces using size data
CN106979834B (zh) * 2017-04-14 2023-03-14 贵阳新天光电科技有限公司 一种测长机的阿贝头测力系统及其控制系统
WO2018199922A1 (en) * 2017-04-25 2018-11-01 Hewlett-Packard Development Company, L.P. Encoder providing error detection
JP6458335B1 (ja) * 2018-02-07 2019-01-30 株式会社東京精密 表面形状測定機
US11806867B2 (en) * 2018-02-09 2023-11-07 Konica Minolta, Inc. Profiling apparatus

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB549987A (en) * 1941-03-15 1942-12-17 Kapella Ltd Improvements in or relating to the measurement of surface roughness
GB601053A (en) * 1943-08-02 1948-04-27 Jack & Heintz Res Corp Improvement in displacement pick-ups for indicating surface roughness or irregularities
GB701091A (en) * 1948-04-05 1953-12-16 Black & Decker Mfg Co Improvements in electrical circuit arrangements of electro-magnetic devices for indicating the magnitude of a deflection
GB899285A (en) * 1957-11-01 1962-06-20 Taylor Taylor & Hobson Ltd Improvements in or relating to apparatus for measuring or indicating the roughnesses or undulations of a surface
GB1155562A (en) * 1965-06-18 1969-06-18 Kent Ltd G Improvements in or relating to Electric Circuit Arrangements Employing Field Effect Transistors
GB1477508A (en) * 1974-08-21 1977-06-22 Rank Organisation Ltd Measuring apparatus
US4140998A (en) * 1976-03-15 1979-02-20 Sangamo Weston, Inc. High accuracy position indicator
US4041445A (en) * 1976-06-28 1977-08-09 Chevron Research Company Method of connecting flexible numbers of geophone flyer groups to data acquisition units
JPS5635774Y2 (de) * 1976-10-08 1981-08-24
GB2009409A (en) * 1977-12-03 1979-06-13 Beecham Group Ltd Measuring and recording surface profile
JPS56148007A (en) * 1980-04-18 1981-11-17 Mitsutoyo Mfg Co Ltd Profile measuring apparatus
DE3152731C2 (de) * 1981-02-14 1986-11-27 Mitutoyo Mfg. Co., Ltd., Tokio/Tokyo Konturmeßinstrument
US4665739A (en) * 1984-04-10 1987-05-19 Mitutoyo Mfg. Co., Ltd Surface roughness measuring instrument
DE3543906A1 (de) * 1985-12-12 1987-06-25 Hommelwerke Gmbh Einrichtung zur messung der gestalt einer oberflaeche entlang einer abtastlinie
DE3769350D1 (de) * 1986-03-04 1991-05-23 Rank Taylor Hobson Ltd Positionskontrolle eines zu bearbeitenden werkstuecks.
GB8614746D0 (en) * 1986-06-17 1986-07-23 Nicholas M J Sensing device
GB2192062B (en) * 1986-06-27 1990-02-28 Rank Taylor Hobson Ltd Metrological apparatus
DE3723466A1 (de) * 1987-07-16 1989-01-26 Barry Controls Gmbh Nachstelleinrichtung zum korrigieren der lage einer maschine
DE3903278C2 (de) * 1989-02-03 1995-09-28 Rexroth Mannesmann Gmbh Induktive Wegaufnehmeranordnung
JPH03115902A (ja) * 1989-06-23 1991-05-16 Rank Taylor Hobson Ltd 度量衡装置およびその校正の方法
US5214962A (en) * 1991-09-05 1993-06-01 Sverdrup Technology, Inc. Constant-resistance signal conditioner for dynamic strain measurement
DE4129687C2 (de) * 1991-09-08 2002-11-14 Helmut Fischer Gmbh & Co Vorrichtung zur Messung der Dicke dünner Schichten
US5528003A (en) * 1994-12-14 1996-06-18 International Business Machines Corporation Data compression for pen stroke input

Also Published As

Publication number Publication date
EP0668989B1 (de) 2001-01-03
EP0668989A1 (de) 1995-08-30
WO1995008096A2 (en) 1995-03-23
GB2281779A (en) 1995-03-15
GB9319037D0 (en) 1993-10-27
JPH08503311A (ja) 1996-04-09
US5740616A (en) 1998-04-21
GB2281779B (en) 1997-04-23
DE69426521D1 (de) 2001-02-08
WO1995008096A3 (en) 1995-04-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee