DE69425459T2 - Substrat auf Keramikbasis und Verfahren zu dessen Herstellung - Google Patents

Substrat auf Keramikbasis und Verfahren zu dessen Herstellung

Info

Publication number
DE69425459T2
DE69425459T2 DE1994625459 DE69425459T DE69425459T2 DE 69425459 T2 DE69425459 T2 DE 69425459T2 DE 1994625459 DE1994625459 DE 1994625459 DE 69425459 T DE69425459 T DE 69425459T DE 69425459 T2 DE69425459 T2 DE 69425459T2
Authority
DE
Germany
Prior art keywords
ceramic
manufacture
based substrate
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE1994625459
Other languages
English (en)
Other versions
DE69425459D1 (de
Inventor
Iio Satoshi
Ushida Takahisa
Okamura Takashi
Watanabe Masakazu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP07549294A external-priority patent/JP4047940B2/ja
Priority claimed from JP09393694A external-priority patent/JP3469310B2/ja
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Publication of DE69425459D1 publication Critical patent/DE69425459D1/de
Application granted granted Critical
Publication of DE69425459T2 publication Critical patent/DE69425459T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0209—Pretreatment of the material to be coated by heating
    • C23C16/0218—Pretreatment of the material to be coated by heating in a reactive atmosphere
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/62222—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products obtaining ceramic coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24355—Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
    • Y10T428/24612—Composite web or sheet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/25—Web or sheet containing structurally defined element or component and including a second component containing structurally defined particles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Chemical Vapour Deposition (AREA)
DE1994625459 1993-05-25 1994-05-25 Substrat auf Keramikbasis und Verfahren zu dessen Herstellung Expired - Fee Related DE69425459T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP14563493 1993-05-25
JP07549294A JP4047940B2 (ja) 1993-05-25 1994-03-23 ダイヤモンド被覆用セラミック基基材
JP09393694A JP3469310B2 (ja) 1993-05-25 1994-04-08 ダイヤモンド被覆用セラミック基基材及び被覆用基材の製造方法

Publications (2)

Publication Number Publication Date
DE69425459D1 DE69425459D1 (de) 2000-09-14
DE69425459T2 true DE69425459T2 (de) 2001-04-12

Family

ID=27301843

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1994625459 Expired - Fee Related DE69425459T2 (de) 1993-05-25 1994-05-25 Substrat auf Keramikbasis und Verfahren zu dessen Herstellung

Country Status (3)

Country Link
US (2) US5725932A (de)
EP (1) EP0627498B1 (de)
DE (1) DE69425459T2 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE9704742D0 (sv) * 1997-12-18 1997-12-18 Sandvik Ab Coated cemented carbide with improved properties and method of making such body
JP2000246512A (ja) * 1998-12-28 2000-09-12 Ngk Spark Plug Co Ltd ダイヤモンド類被覆切削工具
EP1266043B8 (de) * 2000-03-24 2007-06-13 Kennametal Inc. Werkzeug aus zementiertem karbid und verfahren seiner herstellung
US6638474B2 (en) 2000-03-24 2003-10-28 Kennametal Inc. method of making cemented carbide tool
JP3590579B2 (ja) * 2000-12-11 2004-11-17 オーエスジー株式会社 ダイヤモンド被覆部材およびその製造方法
DE10243104A1 (de) 2002-09-17 2004-03-25 Gebr. Brasseler Gmbh & Co. Kg Rotierendes Instrument aus Keramik
JP4001845B2 (ja) * 2003-06-13 2007-10-31 三菱マテリアル神戸ツールズ株式会社 表面被覆歯切工具用超硬合金基材、及び表面被覆歯切工具
US7777600B2 (en) * 2004-05-20 2010-08-17 Powerpath Technologies Llc Eddy current inductive drive electromechanical liner actuator and switching arrangement
SE529855C2 (sv) * 2005-12-30 2007-12-11 Sandvik Intellectual Property Belagt hårdmetallskär och sätt att tillverka detta
US7929245B2 (en) * 2007-03-13 2011-04-19 IntriPlex Technologies Damper for use in disk drive data storage applications
JP5716861B1 (ja) * 2013-11-29 2015-05-13 三菱マテリアル株式会社 ダイヤモンド被覆超硬合金製切削工具及びその製造方法
KR20180122316A (ko) * 2016-03-04 2018-11-12 린텍 가부시키가이샤 반도체 가공용 시트
CN110105087B (zh) * 2018-10-10 2022-04-22 西南交通大学 一种Ti3C2薄膜表面官能团的调控方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5487719A (en) 1977-12-23 1979-07-12 Sumitomo Electric Industries Super hard alloy and method of making same
JPS5867859A (ja) * 1981-10-19 1983-04-22 Hitachi Metals Ltd 被覆超硬合金および製造法
JPS58126972A (ja) 1982-01-22 1983-07-28 Sumitomo Electric Ind Ltd ダイヤモンド被覆超硬合金工具
US4649084A (en) * 1985-05-06 1987-03-10 General Electric Company Process for adhering an oxide coating on a cobalt-enriched zone, and articles made from said process
JPS627267A (ja) * 1985-07-03 1987-01-14 Konishiroku Photo Ind Co Ltd 網点形成方法
US4731296A (en) * 1986-07-03 1988-03-15 Mitsubishi Kinzoku Kabushiki Kaisha Diamond-coated tungsten carbide-base sintered hard alloy material for insert of a cutting tool
JPH0621360B2 (ja) 1988-03-28 1994-03-23 東芝タンガロイ株式会社 耐剥離性にすぐれたダイヤモンド被覆燒結合金及びその製造方法
US4990403A (en) * 1989-01-20 1991-02-05 Idemitsu Petrochemical Company Limited Diamond coated sintered body
EP0504424B1 (de) * 1990-10-05 1999-12-15 Sumitomo Electric Industries, Ltd. Hartmaterial mit diamant bekleidet, wegwerfeinsatz, und methode zum herstellen dieses materials und einsatzes
JP2987956B2 (ja) * 1991-02-18 1999-12-06 住友電気工業株式会社 ダイヤモンドまたはダイヤモンド状炭素被覆硬質材料
JP2987955B2 (ja) * 1991-02-18 1999-12-06 住友電気工業株式会社 ダイヤモンドまたはダイヤモンド状炭素被覆硬質材料
JP2844934B2 (ja) * 1990-12-27 1999-01-13 三菱マテリアル株式会社 気相合成ダイヤモンド被覆切削工具の製造法
CA2060823C (en) * 1991-02-08 2002-09-10 Naoya Omori Diamond-or diamond-like carbon-coated hard materials
SE9101865D0 (sv) * 1991-06-17 1991-06-17 Sandvik Ab Titanbaserad karbonitridlegering med slitstarkt ytskikt
KR930701638A (ko) * 1991-06-24 1993-06-12 홍고오 므쯔미 다이어몬드류 피복부재 및 그 제조방법
ES2107547T3 (es) * 1991-07-22 1997-12-01 Sumitomo Electric Industries Material duro con revestimiento de diamante y procedimiento de fabricacion de este material.

Also Published As

Publication number Publication date
EP0627498A1 (de) 1994-12-07
DE69425459D1 (de) 2000-09-14
US5725932A (en) 1998-03-10
EP0627498B1 (de) 2000-08-09
US5858480A (en) 1999-01-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee