DE69408285T2 - Verfahren zur Herstellung von supraleitenden Josephson Hochtemperaturanordnungen - Google Patents

Verfahren zur Herstellung von supraleitenden Josephson Hochtemperaturanordnungen

Info

Publication number
DE69408285T2
DE69408285T2 DE69408285T DE69408285T DE69408285T2 DE 69408285 T2 DE69408285 T2 DE 69408285T2 DE 69408285 T DE69408285 T DE 69408285T DE 69408285 T DE69408285 T DE 69408285T DE 69408285 T2 DE69408285 T2 DE 69408285T2
Authority
DE
Germany
Prior art keywords
manufacture
high temperature
temperature devices
superconducting josephson
josephson
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69408285T
Other languages
English (en)
Other versions
DE69408285D1 (de
Inventor
Chan-Hoon Park
Jin-Pyo Hong
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electro Mechanics Co Ltd
Original Assignee
Samsung Electro Mechanics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electro Mechanics Co Ltd filed Critical Samsung Electro Mechanics Co Ltd
Application granted granted Critical
Publication of DE69408285D1 publication Critical patent/DE69408285D1/de
Publication of DE69408285T2 publication Critical patent/DE69408285T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/10—Junction-based devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices
    • H10N60/0941—Manufacture or treatment of Josephson-effect devices comprising high-Tc ceramic materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S505/00—Superconductor technology: apparatus, material, process
    • Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
    • Y10S505/728—Etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Weting (AREA)
DE69408285T 1993-11-29 1994-11-29 Verfahren zur Herstellung von supraleitenden Josephson Hochtemperaturanordnungen Expired - Fee Related DE69408285T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019930025721A KR100264006B1 (ko) 1993-11-29 1993-11-29 고온초전도 조셉슨소자의 제조방법

Publications (2)

Publication Number Publication Date
DE69408285D1 DE69408285D1 (de) 1998-03-05
DE69408285T2 true DE69408285T2 (de) 1998-07-09

Family

ID=19369275

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69408285T Expired - Fee Related DE69408285T2 (de) 1993-11-29 1994-11-29 Verfahren zur Herstellung von supraleitenden Josephson Hochtemperaturanordnungen

Country Status (5)

Country Link
US (1) US5599465A (de)
EP (1) EP0655789B1 (de)
JP (1) JP2994560B2 (de)
KR (1) KR100264006B1 (de)
DE (1) DE69408285T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI111198B (fi) * 1993-12-27 2003-06-13 Sumitomo Electric Industries Menetelmä portaan muodostamiseksi substraatin kasvatuspinnalle oksidisuprajohdetta käyttävää suprajohtavaa laitetta varten sekä menetelmä porrastyyppisen Josephson-liitoslaitteen valmistamiseksi
JP3392653B2 (ja) * 1996-09-02 2003-03-31 財団法人国際超電導産業技術研究センター 酸化物超電導体ジョセフソン接合素子及びその製造方法
WO1998033665A1 (en) * 1997-02-03 1998-08-06 The Trustees Of Columbia University In The City Of New York Formation of superconducting devices using a selective etching technique
DE19808778C2 (de) * 1998-03-03 1999-12-09 Forschungszentrum Juelich Gmbh Verfahren zur Herstellung eines ABO¶3¶-Substrates mit einer Stufe
JP3959612B2 (ja) 2002-01-22 2007-08-15 東京エレクトロン株式会社 基板処理装置及び基板処理方法
CN102738381A (zh) * 2012-07-11 2012-10-17 南京大学 一种高温超导Josephson双晶结的制备方法
KR102611656B1 (ko) * 2016-08-30 2023-12-08 삼성에스디아이 주식회사 이차 전지

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6015055B2 (ja) * 1976-09-06 1985-04-17 富士写真フイルム株式会社 マスク画像の形成方法
US4106975A (en) * 1977-06-30 1978-08-15 International Business Machines Corporation Process for etching holes
JPH0323684A (ja) * 1989-06-20 1991-01-31 Shimadzu Corp ジョセフソン接合素子
US5196395A (en) * 1991-03-04 1993-03-23 Superconductor Technologies, Inc. Method for producing crystallographic boundary junctions in oxide superconducting thin films
JPH05251771A (ja) * 1991-12-02 1993-09-28 Sumitomo Electric Ind Ltd 人工粒界型ジョセフソン接合素子およびその作製方法
JPH0685337A (ja) * 1992-09-02 1994-03-25 Fuji Electric Co Ltd 段差型ジョセフソン素子の製造方法
EP0612114B1 (de) * 1993-02-15 1997-05-14 Sumitomo Electric Industries, Ltd. Verfahren zum Erzeugen einer strukturierten oxydsupraleitenden Dünnschicht

Also Published As

Publication number Publication date
JPH0923029A (ja) 1997-01-21
KR100264006B1 (ko) 2000-08-16
KR950015841A (ko) 1995-06-17
EP0655789B1 (de) 1998-01-28
US5599465A (en) 1997-02-04
DE69408285D1 (de) 1998-03-05
JP2994560B2 (ja) 1999-12-27
EP0655789A1 (de) 1995-05-31

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee