DE69407734D1 - Verfahren zur Herstellung diamantartiger Beschichtungen - Google Patents

Verfahren zur Herstellung diamantartiger Beschichtungen

Info

Publication number
DE69407734D1
DE69407734D1 DE69407734T DE69407734T DE69407734D1 DE 69407734 D1 DE69407734 D1 DE 69407734D1 DE 69407734 T DE69407734 T DE 69407734T DE 69407734 T DE69407734 T DE 69407734T DE 69407734 D1 DE69407734 D1 DE 69407734D1
Authority
DE
Germany
Prior art keywords
diamond
coatings
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69407734T
Other languages
English (en)
Other versions
DE69407734T2 (de
Inventor
David G O'neill
Jonathan G Storer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of DE69407734D1 publication Critical patent/DE69407734D1/de
Application granted granted Critical
Publication of DE69407734T2 publication Critical patent/DE69407734T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
DE69407734T 1993-11-09 1994-10-07 Verfahren zur Herstellung diamantartiger Beschichtungen Expired - Fee Related DE69407734T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/149,292 US5401543A (en) 1993-11-09 1993-11-09 Method for forming macroparticle-free DLC films by cathodic arc discharge

Publications (2)

Publication Number Publication Date
DE69407734D1 true DE69407734D1 (de) 1998-02-12
DE69407734T2 DE69407734T2 (de) 1998-07-02

Family

ID=22529604

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69407734T Expired - Fee Related DE69407734T2 (de) 1993-11-09 1994-10-07 Verfahren zur Herstellung diamantartiger Beschichtungen

Country Status (4)

Country Link
US (1) US5401543A (de)
EP (1) EP0652301B1 (de)
JP (1) JPH07188916A (de)
DE (1) DE69407734T2 (de)

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JP4793531B2 (ja) * 2001-07-17 2011-10-12 住友電気工業株式会社 非晶質炭素被膜と非晶質炭素被膜の製造方法および非晶質炭素被膜の被覆部材
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DE10214781B4 (de) * 2002-04-03 2006-11-16 Johann Wolfgang Goethe-Universität Frankfurt am Main FT-IR-Meßvorrichtung, insbesondere für die Spektrometrie wässriger Systeme
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JP4117553B2 (ja) * 2003-08-13 2008-07-16 日産自動車株式会社 チェーン駆動装置
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DE102004041235A1 (de) * 2004-08-26 2006-03-02 Ina-Schaeffler Kg Verschleißfeste Beschichtung und Verfahren zur Herstellung derselben
US20060059688A1 (en) * 2004-09-22 2006-03-23 Tseng Shao C Method for producing a dynamic fluid bearing with high rotation precision and high hardness
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JP6414404B2 (ja) * 2014-07-18 2018-10-31 日新電機株式会社 陰極部材及びこれを用いたプラズマ装置
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ATE115645T1 (de) * 1990-01-29 1994-12-15 Bausch & Lomb Verfahren zum aufdampfen eines diamantähnlichen films auf ein niedrig schmelzendes substrat.
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Also Published As

Publication number Publication date
EP0652301B1 (de) 1998-01-07
JPH07188916A (ja) 1995-07-25
EP0652301A1 (de) 1995-05-10
US5401543A (en) 1995-03-28
DE69407734T2 (de) 1998-07-02

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Legal Events

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8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee