DE69318922T3 - Verfahren und Gerät zum Messen der Verschiebung eines Gegenstands mittels Signalverarbeitung - Google Patents

Verfahren und Gerät zum Messen der Verschiebung eines Gegenstands mittels Signalverarbeitung

Info

Publication number
DE69318922T3
DE69318922T3 DE69318922T DE69318922T DE69318922T3 DE 69318922 T3 DE69318922 T3 DE 69318922T3 DE 69318922 T DE69318922 T DE 69318922T DE 69318922 T DE69318922 T DE 69318922T DE 69318922 T3 DE69318922 T3 DE 69318922T3
Authority
DE
Germany
Prior art keywords
displacement
measuring
signal processing
signal
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69318922T
Other languages
English (en)
Other versions
DE69318922D1 (de
DE69318922T2 (de
Inventor
Masahiko Igaki
Kenichi Kataoka
Katsuhiro Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17709892&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69318922(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69318922D1 publication Critical patent/DE69318922D1/de
Application granted granted Critical
Publication of DE69318922T2 publication Critical patent/DE69318922T2/de
Publication of DE69318922T3 publication Critical patent/DE69318922T3/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
DE69318922T 1992-09-30 1993-09-29 Verfahren und Gerät zum Messen der Verschiebung eines Gegenstands mittels Signalverarbeitung Expired - Lifetime DE69318922T3 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28685492A JP3170902B2 (ja) 1992-09-30 1992-09-30 信号処理方法及びそれを用いたエンコーダ

Publications (3)

Publication Number Publication Date
DE69318922D1 DE69318922D1 (de) 1998-07-09
DE69318922T2 DE69318922T2 (de) 1998-11-19
DE69318922T3 true DE69318922T3 (de) 2003-06-18

Family

ID=17709892

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69318922T Expired - Lifetime DE69318922T3 (de) 1992-09-30 1993-09-29 Verfahren und Gerät zum Messen der Verschiebung eines Gegenstands mittels Signalverarbeitung

Country Status (4)

Country Link
US (1) US5483059A (de)
EP (1) EP0591832B2 (de)
JP (1) JP3170902B2 (de)
DE (1) DE69318922T3 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2818800B2 (ja) * 1994-02-23 1998-10-30 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 位置に依存する信号を発生する装置
DE19652563A1 (de) 1996-12-17 1998-06-18 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
US6654128B2 (en) 1997-06-30 2003-11-25 Canon Kabushiki Kaisha Displacement information detecting apparatus
US5936236A (en) * 1997-11-26 1999-08-10 Renco Encoders, Inc. Method for generating a synthetic reference signal for comparison with scanning signals of a position measuring device
CA2236772C (en) * 1998-06-02 2003-07-29 Ching Shun Wang Focusing-type calculating means
DE19852665A1 (de) 1998-11-16 2000-05-25 Corrsys Korrelatorsysteme Gmbh Verfahren zur Erzeugung eines trägerfrequenz-modulierten Signals
US6194708B1 (en) * 1999-06-09 2001-02-27 Ching Shun Wang Focus-type encode device
US6803560B1 (en) * 1999-06-10 2004-10-12 Canon Kabushiki Kaisha Optical encoder
JP4724282B2 (ja) * 1999-10-12 2011-07-13 キヤノン株式会社 回転角検出装置
JP4428781B2 (ja) 1999-12-28 2010-03-10 キヤノン株式会社 光学式ロータリエンコーダ及びモータ制御装置
US6396052B1 (en) 2000-04-07 2002-05-28 Lexmark International, Inc. High precision analog encoder system
JP4726168B2 (ja) 2000-04-17 2011-07-20 キヤノン株式会社 光学スケール及び光学式エンコーダ
DE10339366A1 (de) 2003-08-27 2005-03-24 Dr. Johannes Heidenhain Gmbh Verfahren und Vorrichtung zur Regelung einer Lichtquelle eines Positionsmessgerätes
JP4174420B2 (ja) * 2003-12-15 2008-10-29 キヤノン株式会社 光偏向器
JP4908764B2 (ja) * 2005-02-04 2012-04-04 キヤノン株式会社 光学式エンコーダ
JP4928206B2 (ja) * 2006-09-22 2012-05-09 キヤノン株式会社 エンコーダ
CN101187670B (zh) * 2006-11-24 2011-12-07 安华高科技Ecbuip(新加坡)私人有限公司 具有污染物检测功能的光学编码器
JP5184905B2 (ja) * 2007-03-23 2013-04-17 キヤノン株式会社 揺動体装置、光偏向器、光偏向器を用いた画像形成装置
JP2009122383A (ja) * 2007-11-14 2009-06-04 Canon Inc 揺動体装置の製造方法、該製造方法により製造された揺動体装置によって構成される光偏向器及び光学機器
JP2009163198A (ja) * 2007-12-10 2009-07-23 Canon Inc 揺動体装置の製造方法、光偏向器、画像形成装置
TWI585372B (zh) * 2016-02-05 2017-06-01 曾信得 光學掃描式導光編碼器
TWI633282B (zh) * 2016-04-15 2018-08-21 曾信得 正向對焦掃描式導光編碼器
US11425972B2 (en) 2018-03-12 2022-08-30 Ykk Corporation Stopper and slide fastener comprising same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2054135B (en) * 1979-07-19 1984-03-14 Burroughs Corp Photo-electric displacement transducer
IT1144232B (it) * 1981-06-15 1986-10-29 Olivetti & Co Spa Trasduttore ottico
JPH0758206B2 (ja) * 1984-03-30 1995-06-21 株式会社日立製作所 モワレ縞を用いた位置検出装置
JPS60230017A (ja) * 1984-04-27 1985-11-15 Tokyo Keiki Co Ltd 光電型変位量検出装置
JPS6110716A (ja) * 1984-06-26 1986-01-18 Nippon Kogaku Kk <Nikon> 光電式エンコ−ダ
JPS6156912A (ja) * 1984-08-28 1986-03-22 Sharp Corp 光電式ロ−タリ−エンコ−ダ
JPS62157523A (ja) * 1985-12-28 1987-07-13 Aisin Warner Ltd 光式ロ−タリエンコ−ダ
JP2503561B2 (ja) * 1988-01-05 1996-06-05 株式会社ニコン レ―ザ―干渉式エンコ―ダ
US5057686A (en) * 1988-10-12 1991-10-15 Mitutoyo Corporation Self-stabilizing photoelectric displacement detector
JPH0625675B2 (ja) * 1989-08-30 1994-04-06 オ−クマ株式会社 平均化回折モアレ位置検出器
US5124548A (en) * 1990-05-03 1992-06-23 Canon Kabushiki Kaisha Encoder for detecting relative displacement having first and second scales and a light receiving device

Also Published As

Publication number Publication date
DE69318922D1 (de) 1998-07-09
EP0591832B2 (de) 2002-12-18
EP0591832A1 (de) 1994-04-13
JP3170902B2 (ja) 2001-05-28
JPH06109484A (ja) 1994-04-19
DE69318922T2 (de) 1998-11-19
US5483059A (en) 1996-01-09
EP0591832B1 (de) 1998-06-03

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings