DE69524288D1 - Apparat und Skala zum Messen einer Dimension eines Objektes - Google Patents
Apparat und Skala zum Messen einer Dimension eines ObjektesInfo
- Publication number
- DE69524288D1 DE69524288D1 DE69524288T DE69524288T DE69524288D1 DE 69524288 D1 DE69524288 D1 DE 69524288D1 DE 69524288 T DE69524288 T DE 69524288T DE 69524288 T DE69524288 T DE 69524288T DE 69524288 D1 DE69524288 D1 DE 69524288D1
- Authority
- DE
- Germany
- Prior art keywords
- dimension
- scale
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14113194A JPH07324912A (ja) | 1994-05-31 | 1994-05-31 | 計尺装置 |
JP13908594 | 1994-06-21 | ||
JP14653194A JP3542381B2 (ja) | 1994-06-28 | 1994-06-28 | 計測装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69524288D1 true DE69524288D1 (de) | 2002-01-17 |
DE69524288T2 DE69524288T2 (de) | 2002-05-23 |
Family
ID=27317798
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69524288T Expired - Fee Related DE69524288T2 (de) | 1994-05-31 | 1995-05-31 | Apparat und Skala zum Messen einer Dimension eines Objektes |
Country Status (6)
Country | Link |
---|---|
US (2) | US5812265A (de) |
EP (1) | EP0685709B1 (de) |
KR (1) | KR100299930B1 (de) |
CN (1) | CN1057831C (de) |
DE (1) | DE69524288T2 (de) |
TW (1) | TW285712B (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19725633C1 (de) * | 1997-06-17 | 1998-12-17 | Zentrum Fuer Neuroinformatik G | Verfahren und Anordnung zur Analyse der Beschaffenheit einer Oberfläche |
GB2336729B (en) * | 1998-04-25 | 2001-10-31 | Ibm | A reticle for an object measurement system |
US6094256A (en) * | 1998-09-29 | 2000-07-25 | Nikon Precision Inc. | Method for forming a critical dimension test structure and its use |
US6381016B1 (en) * | 2000-07-14 | 2002-04-30 | Advanced Micro Devices, Inc. | Lead width inspection system and methods |
US6538753B2 (en) | 2001-05-22 | 2003-03-25 | Nikon Precision, Inc. | Method and apparatus for dimension measurement of a pattern formed by lithographic exposure tools |
JP4856222B2 (ja) * | 2009-08-28 | 2012-01-18 | 照明 與語 | 3次元形状測定方法 |
TWI393852B (zh) * | 2009-12-07 | 2013-04-21 | Univ Nat Yunlin Sci & Tech | 玻璃基板量測方法及其裝置 |
US9528938B2 (en) | 2015-02-23 | 2016-12-27 | Li-Cor, Inc. | Fluorescence biopsy specimen imager and methods |
JP6732807B2 (ja) * | 2015-06-26 | 2020-07-29 | リ−コール,インコーポレイティド | 生検標本蛍光イメージング装置及び方法 |
US10489964B2 (en) | 2016-04-21 | 2019-11-26 | Li-Cor, Inc. | Multimodality multi-axis 3-D imaging with X-ray |
WO2017223378A1 (en) | 2016-06-23 | 2017-12-28 | Li-Cor, Inc. | Complementary color flashing for multichannel image presentation |
EP3545488A1 (de) | 2016-11-23 | 2019-10-02 | Li-Cor, Inc. | Bewegungsadaptives interaktives bildgebungsverfahren |
CN106441104B (zh) * | 2016-12-26 | 2019-02-01 | 中国科学院长春光学精密机械与物理研究所 | 一种尺寸测量系统 |
US10386301B2 (en) | 2017-04-25 | 2019-08-20 | Li-Cor, Inc. | Top-down and rotational side view biopsy specimen imager and methods |
WO2019097928A1 (ja) * | 2017-11-20 | 2019-05-23 | 味の素株式会社 | 計測用構造物および計測システム |
CN111536872B (zh) * | 2020-05-12 | 2022-04-15 | 河北工业大学 | 基于视觉的二维平面测距装置及方法、标记点识别装置 |
US11835418B2 (en) * | 2021-09-30 | 2023-12-05 | Opto-Alignment Technology, Inc. | Simultaneous multi-surface non-contact optical profiler |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2650518A (en) * | 1951-03-22 | 1953-09-01 | William J Zaroff | Apparatus for measuring feet |
DE2640284A1 (de) * | 1976-09-08 | 1978-03-09 | Zeiss Carl Fa | Okular zur laengen- und winkelmessung durch ein mikroskop |
US4269515A (en) * | 1979-08-07 | 1981-05-26 | Altman Associates, Inc. | Electro-optical system for inspecting printed circuit boards |
US4393401A (en) * | 1980-11-10 | 1983-07-12 | The Fairchild Engineering Company | Method and apparatus for dimensionally measuring articles |
DE3323836A1 (de) * | 1983-07-01 | 1985-01-03 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur festlegung einer koordinate auf einer oberflaeche eines festkoerpers und vorrichtung zur durchfuehrung eines solchen verfahrens |
JPH01116402A (ja) * | 1987-10-30 | 1989-05-09 | Fuji Photo Film Co Ltd | 矩形シートの寸度測定方法及び装置 |
WO1990009559A1 (en) * | 1989-02-15 | 1990-08-23 | Josef Zybert | Position determination method and apparatus |
JPH0585004A (ja) | 1991-09-30 | 1993-04-06 | Canon Inc | 記録装置 |
-
1995
- 1995-05-31 CN CN95108571A patent/CN1057831C/zh not_active Expired - Fee Related
- 1995-05-31 KR KR1019950014358A patent/KR100299930B1/ko not_active IP Right Cessation
- 1995-05-31 DE DE69524288T patent/DE69524288T2/de not_active Expired - Fee Related
- 1995-05-31 EP EP95108339A patent/EP0685709B1/de not_active Expired - Lifetime
- 1995-06-17 TW TW084106250A patent/TW285712B/zh active
-
1997
- 1997-07-01 US US08/886,212 patent/US5812265A/en not_active Expired - Fee Related
- 1997-07-11 US US08/893,524 patent/US5933239A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US5933239A (en) | 1999-08-03 |
KR950033415A (ko) | 1995-12-26 |
CN1123909A (zh) | 1996-06-05 |
EP0685709A2 (de) | 1995-12-06 |
DE69524288T2 (de) | 2002-05-23 |
KR100299930B1 (ko) | 2002-06-20 |
EP0685709A3 (de) | 1997-04-23 |
EP0685709B1 (de) | 2001-12-05 |
US5812265A (en) | 1998-09-22 |
CN1057831C (zh) | 2000-10-25 |
TW285712B (de) | 1996-09-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |