DE69524298D1 - Apparat und Verfahren zum Messen einer Verschiebung - Google Patents

Apparat und Verfahren zum Messen einer Verschiebung

Info

Publication number
DE69524298D1
DE69524298D1 DE69524298T DE69524298T DE69524298D1 DE 69524298 D1 DE69524298 D1 DE 69524298D1 DE 69524298 T DE69524298 T DE 69524298T DE 69524298 T DE69524298 T DE 69524298T DE 69524298 D1 DE69524298 D1 DE 69524298D1
Authority
DE
Germany
Prior art keywords
measuring displacement
displacement
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69524298T
Other languages
English (en)
Other versions
DE69524298T2 (de
Inventor
Takahiro Matsumoto
Koichi Sentoku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69524298D1 publication Critical patent/DE69524298D1/de
Application granted granted Critical
Publication of DE69524298T2 publication Critical patent/DE69524298T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02019—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations contacting different points on same face of object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE69524298T 1994-06-20 1995-06-19 Apparat und Verfahren zum Messen einer Verschiebung Expired - Lifetime DE69524298T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6137406A JPH085314A (ja) 1994-06-20 1994-06-20 変位測定方法及び変位測定装置

Publications (2)

Publication Number Publication Date
DE69524298D1 true DE69524298D1 (de) 2002-01-17
DE69524298T2 DE69524298T2 (de) 2002-06-13

Family

ID=15197903

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69524298T Expired - Lifetime DE69524298T2 (de) 1994-06-20 1995-06-19 Apparat und Verfahren zum Messen einer Verschiebung

Country Status (4)

Country Link
US (1) US5818588A (de)
EP (1) EP0689030B1 (de)
JP (1) JPH085314A (de)
DE (1) DE69524298T2 (de)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69722688T2 (de) * 1996-02-29 2004-01-15 Boeing Co Fiberoptisch-gekoppelter interferometrischer Sensor
GB2330977B (en) * 1997-06-09 2002-01-02 Matsushita Electric Ind Co Ltd Video recorder/reproducer
WO1999005471A1 (fr) * 1997-07-23 1999-02-04 Mitsubishi Denki Kabushiki Kaisha Instrument de mesure des longueurs
US5999261A (en) * 1998-02-10 1999-12-07 Seagate Technology, Inc. Split phase high performance, high frequency, high dynamic range interferometer
JP4536873B2 (ja) * 2000-06-05 2010-09-01 キヤノン株式会社 三次元形状計測方法及び装置
EP1419361A1 (de) 2001-08-23 2004-05-19 Zygo Corporation Dynamische interferometrische steuerung der richtung eines eingangsstrahls
US6738143B2 (en) * 2001-11-13 2004-05-18 Agilent Technologies, Inc System and method for interferometer non-linearity compensation
US6792368B2 (en) * 2002-01-17 2004-09-14 Agilent Technologies, Inc. System and method for heterodyne interferometer high velocity type non-linearity compensation
JP4198929B2 (ja) * 2002-03-27 2008-12-17 パイオニア株式会社 レーザ測長器及びレーザ測長方法
KR100468155B1 (ko) * 2002-06-27 2005-01-26 한국과학기술원 이종모드 헬륨-네온 레이저와 슈퍼 헤테로다인위상측정법을 이용한 헤테로다인 레이저 간섭계
US7428685B2 (en) 2002-07-08 2008-09-23 Zygo Corporation Cyclic error compensation in interferometry systems
EP1520151B1 (de) 2002-07-08 2018-10-10 Zygo Corporation Kompensation periodischer fehler in interferometriesystemen
US7616322B2 (en) 2002-07-08 2009-11-10 Zygo Corporation Cyclic error compensation in interferometry systems
WO2005022078A1 (en) * 2003-08-27 2005-03-10 The University Of Queensland Method and apparatus for precision measurement of phase shifts
GB2407155A (en) * 2003-10-14 2005-04-20 Univ Kent Canterbury Spectral interferometry method and apparatus
US7239397B2 (en) * 2003-12-31 2007-07-03 Corning Incorporated Device for high-accuracy measurement of dimensional changes
JP4804058B2 (ja) * 2005-07-28 2011-10-26 キヤノン株式会社 干渉測定装置
US7576868B2 (en) 2007-06-08 2009-08-18 Zygo Corporation Cyclic error compensation in interferometry systems
JP5558768B2 (ja) * 2008-10-24 2014-07-23 キヤノン株式会社 測定装置、光源装置、干渉測定装置、露光装置、及びデバイス製造方法
JP5697323B2 (ja) * 2009-10-22 2015-04-08 キヤノン株式会社 ヘテロダイン干渉計測装置
WO2012082555A2 (en) * 2010-12-16 2012-06-21 Zygo Corporation Cyclic error compensation in inteferometric encoder systems
JP5849103B2 (ja) * 2011-02-01 2016-01-27 ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ 干渉ヘテロダイン光学エンコーダシステム
US8692999B1 (en) * 2011-06-23 2014-04-08 Exelis, Inc. Crosstalk cancellation for a simultaneous phase shifting interferometer
JP5793355B2 (ja) * 2011-06-24 2015-10-14 株式会社ミツトヨ 斜入射干渉計
CN102853771B (zh) * 2012-09-19 2015-07-29 哈尔滨工业大学 小型化高速超精密激光外差干涉测量方法及装置
CN102944176B (zh) * 2012-11-09 2015-06-17 清华大学 一种外差光栅干涉仪位移测量系统
CN103630077B (zh) * 2013-12-12 2016-05-11 哈尔滨工业大学 一种使用双频激光的两轴光栅位移测量系统
JP6664211B2 (ja) * 2015-12-22 2020-03-13 株式会社ミツトヨ エンコーダ
WO2019186776A1 (ja) * 2018-03-28 2019-10-03 日本電気株式会社 測距装置及び制御方法
CN108592800B (zh) * 2018-05-02 2019-08-20 中国计量科学研究院 一种基于平面镜反射的激光外差干涉测量装置和方法
US11287322B2 (en) * 2019-02-06 2022-03-29 California Institute Of Technology Compact hyperspectral mid-infrared spectrometer
EP3770546A1 (de) * 2019-07-25 2021-01-27 sentronics metrology GmbH Vorrichtung und verfahren zur messung von höhenprofilen an einem objekt
WO2021092579A1 (en) 2019-11-08 2021-05-14 California Institute Of Technology Infrared spectrometer having dielectric-polymer-based spectral filter
TWI721719B (zh) * 2019-12-19 2021-03-11 財團法人工業技術研究院 量測裝置
JP2021148634A (ja) * 2020-03-19 2021-09-27 株式会社ミツトヨ レーザ干渉装置
US11409123B1 (en) * 2022-02-28 2022-08-09 Mloptic Corp. Active self-monitoring binocular calibration target

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3790284A (en) * 1972-05-08 1974-02-05 Hewlett Packard Co Interferometer system for measuring straightness and roll
JPH01206283A (ja) * 1988-02-13 1989-08-18 Brother Ind Ltd 光ヘテロダイン測定装置
JPH029006A (ja) * 1988-06-28 1990-01-12 Matsushita Electric Ind Co Ltd 磁気記録装置
JP2514699B2 (ja) 1988-09-28 1996-07-10 日本電信電話株式会社 回折格子による位置ずれ検出方法および位置ずれ検出装置
JPH0674964B2 (ja) 1989-03-31 1994-09-21 通商産業省工業技術院長 ２周波偏光ヘテロダイン干渉測定における信号光ビート検出装置
US5204535A (en) * 1991-05-31 1993-04-20 Nikon Corporation Alignment device having irradiation and detection light correcting optical elements
JP3244769B2 (ja) * 1991-07-11 2002-01-07 キヤノン株式会社 測定方法及び測定装置
DE69211086T2 (de) * 1991-10-03 1996-11-14 Canon K.K., Tokio/Tokyo Messverfahren und Messgerät

Also Published As

Publication number Publication date
EP0689030B1 (de) 2001-12-05
EP0689030A2 (de) 1995-12-27
US5818588A (en) 1998-10-06
JPH085314A (ja) 1996-01-12
EP0689030A3 (de) 1996-07-03
DE69524298T2 (de) 2002-06-13

Similar Documents

Publication Publication Date Title
DE69524298D1 (de) Apparat und Verfahren zum Messen einer Verschiebung
DE69123772D1 (de) Verfahren und Gerät zum Entfernungsmessen
DE69940749D1 (de) Verfahren und Vorrichtung zum Messen von Fernnebensprechen
DE69520850T2 (de) Verfahren und Vorrichtung zum Messen von Urinbestandteilen
DE59601159D1 (de) Verfahren zum gegenseitigen ausrichten von körpern und lagemesssonde hierfür
DE69637937D1 (de) Verfahren und Apparat zur Messung von Musterdimensionen
DE69524347T2 (de) Vorrichtung und Verfahren zum Wegmessung
DE69529133D1 (de) Vorrichtung und Verfahren zum Messen von Mehrphasenströmungen mittels Mikrowellen
DE69430841D1 (de) Verfahren und Vorrichtung zum Bestimmen der Netzwerkverzögerungen
DE69208005D1 (de) Verfahren und Vorrichtung für Abstandsmessung
DE69430152D1 (de) Verfahren und Vorrichtung zum Messen von Glukoseverwandten Substanzen
DE69506744D1 (de) Verfahren und Gerät zum Messen einer Brillenfassung
DE69836053D1 (de) Verfahren und Anordnung zum Messen von Bohrlochcharakteristiken und Formationseigenschaften
DE69736694D1 (de) Verfahren und Gerät zum Messen von nahem Übersprechen in Verbindungsleitungen
DE69601395D1 (de) Verfahren und Vorrichtung zum Messen von Spektren
DE69531635D1 (de) Verfahren zum messen und zur kontrolle von reibung
DE69119798D1 (de) Elektromagnetischer Apparat zum Messen der Leitfähigkeit und Verfahren zum Messen der Leitfähigkeit
DE69739337D1 (de) Apparat und verfahren zum zeichnen
DE69532249T2 (de) Verfahren und vorrichtung zum messen der herzschlagfrequenz
DE69524288D1 (de) Apparat und Skala zum Messen einer Dimension eines Objektes
NO953948L (no) Fremgangsmåte og apparat for måling av boretilstander
DE69429035D1 (de) Apparat zum Messen einer ringförmigen Distanz
DE69935274D1 (de) Verfahren und Apparat zum Messen der karakteristischen Positionswinkel eines Fahrzeugs
DE59704620D1 (de) Verfahren und vorrichtung zum messen und prüfen von werkstücken
DE69827406D1 (de) Verfahren und vorrichtung zum messen von strahlung

Legal Events

Date Code Title Description
8364 No opposition during term of opposition