DE69315953T2 - Trägervorrichtung und Positionierungseinrichtung für eine Rasterabtastsonde - Google Patents

Trägervorrichtung und Positionierungseinrichtung für eine Rasterabtastsonde

Info

Publication number
DE69315953T2
DE69315953T2 DE69315953T DE69315953T DE69315953T2 DE 69315953 T2 DE69315953 T2 DE 69315953T2 DE 69315953 T DE69315953 T DE 69315953T DE 69315953 T DE69315953 T DE 69315953T DE 69315953 T2 DE69315953 T2 DE 69315953T2
Authority
DE
Germany
Prior art keywords
scanning probe
positioning device
carriage assembly
raster scanning
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69315953T
Other languages
English (en)
Other versions
DE69315953D1 (de
Inventor
James Michael Hammond
Martin Allen Klos
Yves Martin
Kenneth Gilbert Roessler
Robert Marshall Stowell
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of DE69315953D1 publication Critical patent/DE69315953D1/de
Application granted granted Critical
Publication of DE69315953T2 publication Critical patent/DE69315953T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G01Q70/04—Probe holders with compensation for temperature or vibration induced errors
DE69315953T 1992-10-20 1993-10-14 Trägervorrichtung und Positionierungseinrichtung für eine Rasterabtastsonde Expired - Fee Related DE69315953T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/963,886 US5360974A (en) 1992-10-20 1992-10-20 Dual quad flexure scanner

Publications (2)

Publication Number Publication Date
DE69315953D1 DE69315953D1 (de) 1998-02-05
DE69315953T2 true DE69315953T2 (de) 1998-06-25

Family

ID=25507860

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69315953T Expired - Fee Related DE69315953T2 (de) 1992-10-20 1993-10-14 Trägervorrichtung und Positionierungseinrichtung für eine Rasterabtastsonde

Country Status (6)

Country Link
US (1) US5360974A (de)
EP (1) EP0594362B1 (de)
JP (1) JP2534442B2 (de)
AT (1) ATE161455T1 (de)
CA (1) CA2098041A1 (de)
DE (1) DE69315953T2 (de)

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US5483064A (en) * 1994-01-21 1996-01-09 Wyko Corporation Positioning mechanism and method for providing coaxial alignment of a probe and a scanning means in scanning tunneling and scanning force microscopy
JPH09511331A (ja) * 1994-03-18 1997-11-11 ランク・テイラー・ホブソン・リミテッド 計測触針アセンブリ
US6520005B2 (en) 1994-12-22 2003-02-18 Kla-Tencor Corporation System for sensing a sample
US5948972A (en) * 1994-12-22 1999-09-07 Kla-Tencor Corporation Dual stage instrument for scanning a specimen
US5693997A (en) * 1996-02-09 1997-12-02 Lucent Technologies Inc. Non-tilting plate actuator for use in a micropositioning device
US5854487A (en) * 1997-02-28 1998-12-29 Park Scientific Instruments Scanning probe microscope providing unobstructed top down and bottom up views
AU8760698A (en) * 1997-08-22 1999-03-16 Park Scientific Instruments Scanning probe microscope system removably attachable to an optical microscope objective
JP3563247B2 (ja) 1997-10-31 2004-09-08 日立建機株式会社 走査型プローブ顕微鏡
US6246052B1 (en) * 1999-09-20 2001-06-12 Veeco Instruments, Inc. Flexure assembly for a scanner
US6817104B2 (en) * 2002-05-15 2004-11-16 Sumitomo Heavy Industries, Ltd. X-Y stage apparatus
DE10249767B4 (de) * 2002-10-24 2006-11-23 Asmec Advanced Surface Mechanics Gmbh Probentisch für die Messung lateraler Kräfte und Verschiebungen
US7278298B2 (en) * 2004-11-30 2007-10-09 The Regents Of The University Of California Scanner for probe microscopy
WO2008151107A2 (en) * 2007-06-01 2008-12-11 Massachusetts Institute Of Technology High-resolution flexural stage for in-plane position and out-of-plane pitch/roll alignment
JP5563581B2 (ja) * 2008-10-09 2014-07-30 ニューカッスル イノベイション リミテッド 位置決めシステムおよび方法
US8063383B2 (en) 2008-11-04 2011-11-22 Sergiy Pryadkin Inertial positioner and an optical instrument for precise positioning
JP5295814B2 (ja) * 2009-02-17 2013-09-18 オリンパス株式会社 走査機構および走査型プローブ顕微鏡
CN104048779B (zh) * 2014-05-30 2016-07-06 合肥京东方光电科技有限公司 一种测温样本制作治具和制作设备
CN106644501B (zh) * 2016-09-19 2020-07-24 浙江吉利控股集团有限公司 柔性腿发射调节机构
CN111273418A (zh) * 2020-03-12 2020-06-12 中国科学院长春光学精密机械与物理研究所 一种真空条件下光学元件多自由度精密定位装置
NL2030512B1 (en) 2022-01-12 2023-07-17 Aidx Medical B V A movement platform for microscopic slide positioning

Family Cites Families (19)

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Publication number Priority date Publication date Assignee Title
SU470012A1 (ru) * 1973-11-30 1975-05-05 Предприятие П/Я А-7904 Устройство дл юстировки ионного источника
JPS5434683A (en) * 1977-08-22 1979-03-14 Jeol Ltd Sample fine-shifting device for electron beam exposure device or the like
US4575942A (en) * 1982-10-18 1986-03-18 Hitachi, Ltd. Ultra-precision two-dimensional moving apparatus
GB2129955B (en) * 1982-11-02 1986-07-09 Martock Design Ltd Adjustable mountings
US4520570A (en) * 1983-12-30 1985-06-04 International Business Machines Corporation Piezoelectric x-y-positioner
US4559717A (en) * 1984-02-21 1985-12-24 The United States Of America As Represented By The Secretary Of Commerce Flexure hinge
GB2185323B (en) * 1984-10-12 1988-01-06 Vickers Plc Microscope having an improved stage
JPS61273841A (ja) * 1985-05-28 1986-12-04 Agency Of Ind Science & Technol 機構学上自由度のない積上形二次元微動載物台
US4667415A (en) * 1985-11-29 1987-05-26 Gca Corporation Microlithographic reticle positioning system
JPS62174811A (ja) * 1986-01-29 1987-07-31 Hitachi Constr Mach Co Ltd 微細位置決め装置
EP0264147B1 (de) * 1986-09-09 1994-01-12 Hitachi Construction Machinery Co., Ltd. Vorrichtung zur Feinverstellung und Vorrichtung zum Steuern dieser Verstellungen
IT1206842B (it) * 1987-01-15 1989-05-11 Fidia Spa Dispositivo tastatore particolarmente per macchina a copiare
US4841191A (en) * 1987-02-20 1989-06-20 Hitachi, Ltd. Piezoelectric actuator control apparatus
US4757942A (en) * 1987-04-28 1988-07-19 Young Jr Olin E Double door mailbox
JP2577423B2 (ja) * 1988-02-29 1997-01-29 工業技術院長 大ストローク走査型トンネル顕微鏡
US4908519A (en) * 1988-10-11 1990-03-13 The Board Of Thustees Of The Leland Stanford Jr. University Loading mechanism and support structure having improved vibration damping useful in scanning tunneling microscopy
JP2547869B2 (ja) * 1988-11-09 1996-10-23 キヤノン株式会社 プローブユニット，該プローブの駆動方法及び該プローブユニットを備えた走査型トンネル電流検知装置
US5051646A (en) * 1989-04-28 1991-09-24 Digital Instruments, Inc. Method of driving a piezoelectric scanner linearly with time
US4925139A (en) * 1989-04-28 1990-05-15 International Business Machines Corporation Mechanical stage support for a scanning tunneling microscope

Also Published As

Publication number Publication date
JPH07113809A (ja) 1995-05-02
ATE161455T1 (de) 1998-01-15
EP0594362B1 (de) 1997-12-29
DE69315953D1 (de) 1998-02-05
US5360974A (en) 1994-11-01
JP2534442B2 (ja) 1996-09-18
CA2098041A1 (en) 1994-04-21
EP0594362A1 (de) 1994-04-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee