DE69313766T2 - Mikrosteuervorrichtung fuer fluidum und verfahren zu deren herstellung - Google Patents
Mikrosteuervorrichtung fuer fluidum und verfahren zu deren herstellungInfo
- Publication number
- DE69313766T2 DE69313766T2 DE69313766T DE69313766T DE69313766T2 DE 69313766 T2 DE69313766 T2 DE 69313766T2 DE 69313766 T DE69313766 T DE 69313766T DE 69313766 T DE69313766 T DE 69313766T DE 69313766 T2 DE69313766 T2 DE 69313766T2
- Authority
- DE
- Germany
- Prior art keywords
- fluidum
- production
- control device
- micro control
- micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1037—Flap valves
- F04B53/1047—Flap valves the valve being formed by one or more flexible elements
- F04B53/106—Flap valves the valve being formed by one or more flexible elements the valve being a membrane
- F04B53/1067—Flap valves the valve being formed by one or more flexible elements the valve being a membrane fixed at its whole periphery and with an opening at its centre
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
- F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0005—Lift valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0015—Diaphragm or membrane valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
- F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M2205/00—General characteristics of the apparatus
- A61M2205/02—General characteristics of the apparatus characterised by a particular materials
- A61M2205/0244—Micromachined materials, e.g. made from silicon wafers, microelectromechanical systems [MEMS] or comprising nanotechnology
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M2207/00—Methods of manufacture, assembly or production
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
- A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
- A61M5/142—Pressure infusion, e.g. using pumps
- A61M5/14244—Pressure infusion, e.g. using pumps adapted to be carried by the patient, e.g. portable on the body
- A61M5/14276—Pressure infusion, e.g. using pumps adapted to be carried by the patient, e.g. portable on the body specially adapted for implantation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0094—Micropumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Reciprocating Pumps (AREA)
- Micromachines (AREA)
- Jet Pumps And Other Pumps (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8104092 | 1992-04-02 | ||
JP10688892 | 1992-04-24 | ||
JP10688792 | 1992-04-24 | ||
PCT/JP1993/000413 WO1993020351A1 (en) | 1992-04-02 | 1993-04-01 | Fluid controlling microdevice and method of manufacturing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69313766D1 DE69313766D1 (de) | 1997-10-16 |
DE69313766T2 true DE69313766T2 (de) | 1998-02-26 |
Family
ID=27303471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69313766T Expired - Fee Related DE69313766T2 (de) | 1992-04-02 | 1993-04-01 | Mikrosteuervorrichtung fuer fluidum und verfahren zu deren herstellung |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0587912B1 (de) |
JP (1) | JP3401788B2 (de) |
DE (1) | DE69313766T2 (de) |
WO (1) | WO1993020351A1 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010032799A1 (de) * | 2010-04-09 | 2011-10-13 | Albert-Ludwigs-Universität Freiburg | Mikroventil mit elastisch verformbarer Ventillippe, Herstellungsverfahren und Mikropumpe |
DE102011108380A1 (de) * | 2011-07-22 | 2013-01-24 | Audi Ag | Einrichtung zur Entlüftung und Belüftung eines Kraftstofftanks |
DE102012221835B3 (de) * | 2012-11-29 | 2013-10-10 | Robert Bosch Gmbh | Normal-geschlossenes Rückschlagventil für mikrofluidische Bauteile aus einem polymeren Schichtsystem und Verfahren zum Herstellen des Rückschlagventils |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69620569T2 (de) * | 1995-07-27 | 2002-10-31 | Seiko Epson Corp | Mikroventil und methode zu dessen herstellung, mikropumpe die dieses mikroventil benutzt und methode zu ihrer herstellung, sowie vorrichtung, die diese mikropumpe verwendet |
WO1997029283A1 (fr) * | 1996-02-09 | 1997-08-14 | Westonbridge International Limited | Filtre micro-usine pour micropompe |
US5865417A (en) * | 1996-09-27 | 1999-02-02 | Redwood Microsystems, Inc. | Integrated electrically operable normally closed valve |
DE19742439C1 (de) | 1997-09-26 | 1998-10-22 | Boehringer Ingelheim Int | Mikrostrukturiertes Filter |
US6247908B1 (en) * | 1998-03-05 | 2001-06-19 | Seiko Instruments Inc. | Micropump |
JP3492570B2 (ja) * | 1999-10-22 | 2004-02-03 | 日本碍子株式会社 | マイクロピペット及び分注装置 |
FR2839712A1 (fr) * | 2002-05-14 | 2003-11-21 | Westonbridge Internat Ltd | Dispositif micromecanique, en particulier fluidique, et son procede de fabrication, organe de controle d'entree de liquide et/ou organe de detection de pression de liquide et/ou micropompe formant un tel dispositif micromecanique |
JP4678135B2 (ja) * | 2003-06-17 | 2011-04-27 | セイコーエプソン株式会社 | ポンプ |
JP4095005B2 (ja) * | 2003-09-16 | 2008-06-04 | 日本碍子株式会社 | Dnaチップの製造方法 |
EP2074341A4 (de) * | 2006-10-04 | 2013-04-10 | Fluidigm Corp | Mikrofluidische rückschlagventile |
WO2008089493A2 (en) | 2007-01-19 | 2008-07-24 | Fluidigm Corporation | High precision microfluidic devices and methods |
JP4951027B2 (ja) * | 2009-05-26 | 2012-06-13 | パナソニック株式会社 | マイクロバルブ |
TWI636189B (zh) * | 2017-08-21 | 2018-09-21 | 研能科技股份有限公司 | 微型氣體控制裝置 |
CN112811518B (zh) * | 2021-01-06 | 2022-10-04 | 杭州电子科技大学 | 一种净水器水处理增压无泄漏能量回收方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5440504U (de) * | 1977-08-26 | 1979-03-17 | ||
JPS5939449Y2 (ja) * | 1981-07-01 | 1984-11-05 | 金一 相原 | 給油ポンプ |
CH679555A5 (de) * | 1989-04-11 | 1992-03-13 | Westonbridge Int Ltd |
-
1993
- 1993-04-01 DE DE69313766T patent/DE69313766T2/de not_active Expired - Fee Related
- 1993-04-01 JP JP51686393A patent/JP3401788B2/ja not_active Expired - Lifetime
- 1993-04-01 WO PCT/JP1993/000413 patent/WO1993020351A1/ja active IP Right Grant
- 1993-04-01 EP EP93906866A patent/EP0587912B1/de not_active Expired - Lifetime
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010032799A1 (de) * | 2010-04-09 | 2011-10-13 | Albert-Ludwigs-Universität Freiburg | Mikroventil mit elastisch verformbarer Ventillippe, Herstellungsverfahren und Mikropumpe |
DE102010032799B4 (de) * | 2010-04-09 | 2013-11-21 | Albert-Ludwigs-Universität Freiburg | Mikroventil mit elastisch verformbarer Ventillippe, Herstellungsverfahren und Mikropumpe |
DE102011108380A1 (de) * | 2011-07-22 | 2013-01-24 | Audi Ag | Einrichtung zur Entlüftung und Belüftung eines Kraftstofftanks |
DE102011108380B4 (de) * | 2011-07-22 | 2016-07-07 | Audi Ag | Einrichtung zur Entlüftung und Belüftung eines Kraftstofftanks |
DE102012221835B3 (de) * | 2012-11-29 | 2013-10-10 | Robert Bosch Gmbh | Normal-geschlossenes Rückschlagventil für mikrofluidische Bauteile aus einem polymeren Schichtsystem und Verfahren zum Herstellen des Rückschlagventils |
Also Published As
Publication number | Publication date |
---|---|
EP0587912A1 (de) | 1994-03-23 |
EP0587912B1 (de) | 1997-09-10 |
WO1993020351A1 (en) | 1993-10-14 |
DE69313766D1 (de) | 1997-10-16 |
EP0587912A4 (de) | 1994-10-19 |
JP3401788B2 (ja) | 2003-04-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69527511D1 (de) | Flache mikrolinse und verfahren zu deren herstellung | |
DE69529216D1 (de) | Selbstdichtende injektionsvorrichtung und verfahren zu deren herstellung | |
DE69836719D1 (de) | Elastische oberflächenwellenvorrichtung und verfahren zu deren herstellung | |
DE69311107T2 (de) | Ineinandergreifendes befestigungselement und verfahren zu deren herstellung | |
DE69315152T2 (de) | Brennereinrichtung und Verfahren zu deren Herstellung | |
DE69614001T2 (de) | Vakuumfiltervorrichtung und verfahren zu deren herstellung | |
DE59502879D1 (de) | Ausweiskarte und verfahren zu deren herstellung | |
DE69720523D1 (de) | Polyolefin-polyethylenoxid-mischungen und verfahren zu deren herstellung | |
ATA95691A (de) | Leistungstransistorvorrichtung und verfahren zu deren herstellung | |
DE69313766T2 (de) | Mikrosteuervorrichtung fuer fluidum und verfahren zu deren herstellung | |
DE59301736D1 (de) | Polyesterfaser und verfahren zu deren herstellung | |
DE69713845T2 (de) | Druckvorrichtung und verfahren zu deren herstellung | |
DE19651550B8 (de) | Halbleitervorrichtung und Verfahren zu deren Herstellung | |
DE69430254D1 (de) | Hochkapazitive klebefilme und verfahren zu deren herstellung | |
DE59608456D1 (de) | Photodiode und verfahren zu deren herstellung | |
DE69411167D1 (de) | Klebverbindung und verfahren zu deren herstellung | |
DE69415533D1 (de) | Mehrfarbige betondachziegel und verfahren und vorrichtung zu deren herstellung | |
DE59913422D1 (de) | Femfet-vorrichtung und verfahren zu deren herstellung | |
DE69422709T2 (de) | Längliche zinkoxydpartikel und verfahren zu deren herstellung | |
DE69610481D1 (de) | Prostaglandine und verfahren zu deren herstellung | |
DE69211134T2 (de) | Klebstoffe und verfahren zu deren herstellung | |
DE69531127D1 (de) | Halbleitervorrichtung und Verfahren zu deren Herstellung | |
DE69310350T2 (de) | Abdeckscheibe und verfahren zu deren herstellung | |
DE69329620D1 (de) | Verbindervorrichtung und verfahren zu seiner herstellung | |
DE69720105D1 (de) | Wellenleitervorrichtung und Verfahren zu deren Herstellung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |