DE69620569T2 - Mikroventil und methode zu dessen herstellung, mikropumpe die dieses mikroventil benutzt und methode zu ihrer herstellung, sowie vorrichtung, die diese mikropumpe verwendet - Google Patents

Mikroventil und methode zu dessen herstellung, mikropumpe die dieses mikroventil benutzt und methode zu ihrer herstellung, sowie vorrichtung, die diese mikropumpe verwendet

Info

Publication number
DE69620569T2
DE69620569T2 DE69620569T DE69620569T DE69620569T2 DE 69620569 T2 DE69620569 T2 DE 69620569T2 DE 69620569 T DE69620569 T DE 69620569T DE 69620569 T DE69620569 T DE 69620569T DE 69620569 T2 DE69620569 T2 DE 69620569T2
Authority
DE
Germany
Prior art keywords
microvalve
micropump
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69620569T
Other languages
English (en)
Other versions
DE69620569D1 (de
Inventor
Tsukasa Funasaka
Takayoshi Fujimori
Hajime Miyazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Application granted granted Critical
Publication of DE69620569D1 publication Critical patent/DE69620569D1/de
Publication of DE69620569T2 publication Critical patent/DE69620569T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F04B53/1037—Flap valves
    • F04B53/1047—Flap valves the valve being formed by one or more flexible elements
    • F04B53/106—Flap valves the valve being formed by one or more flexible elements the valve being a membrane
    • F04B53/1067—Flap valves the valve being formed by one or more flexible elements the valve being a membrane fixed at its whole periphery and with an opening at its centre
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps
DE69620569T 1995-07-27 1996-07-29 Mikroventil und methode zu dessen herstellung, mikropumpe die dieses mikroventil benutzt und methode zu ihrer herstellung, sowie vorrichtung, die diese mikropumpe verwendet Expired - Lifetime DE69620569T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP19228595 1995-07-27
PCT/JP1996/002129 WO1997005385A1 (fr) 1995-07-27 1996-07-29 Microsoupape et son procede de realisation, micropompe utilisant cette microsoupape, et son procede de realisation, et dispositif utilisant cette micropompe

Publications (2)

Publication Number Publication Date
DE69620569D1 DE69620569D1 (de) 2002-05-16
DE69620569T2 true DE69620569T2 (de) 2002-10-31

Family

ID=16288742

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69620569T Expired - Lifetime DE69620569T2 (de) 1995-07-27 1996-07-29 Mikroventil und methode zu dessen herstellung, mikropumpe die dieses mikroventil benutzt und methode zu ihrer herstellung, sowie vorrichtung, die diese mikropumpe verwendet

Country Status (4)

Country Link
EP (1) EP0789146B1 (de)
JP (1) JP3726285B2 (de)
DE (1) DE69620569T2 (de)
WO (1) WO1997005385A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011108380A1 (de) * 2011-07-22 2013-01-24 Audi Ag Einrichtung zur Entlüftung und Belüftung eines Kraftstofftanks

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69813569T2 (de) * 1997-08-20 2004-04-08 Westonbridge International Ltd., Wellington Quay Mikropumpe mit einem einlasssteuerorgan zum selbstansaugen
JP3492570B2 (ja) * 1999-10-22 2004-02-03 日本碍子株式会社 マイクロピペット及び分注装置
US6669669B2 (en) * 2001-10-12 2003-12-30 Insulet Corporation Laminated patient infusion device
US6644944B2 (en) 2000-11-06 2003-11-11 Nanostream, Inc. Uni-directional flow microfluidic components
TW561223B (en) * 2001-04-24 2003-11-11 Matsushita Electric Works Ltd Pump and its producing method
US6715733B2 (en) * 2001-08-08 2004-04-06 Agilent Technologies, Inc. High temperature micro-machined valve
US20040188648A1 (en) * 2003-01-15 2004-09-30 California Institute Of Technology Integrated surface-machined micro flow controller method and apparatus
JP4095005B2 (ja) * 2003-09-16 2008-06-04 日本碍子株式会社 Ｄｎａチップの製造方法
US7284966B2 (en) * 2003-10-01 2007-10-23 Agency For Science, Technology & Research Micro-pump
FR2952135B1 (fr) * 2009-11-04 2013-02-22 Seb Sa Procede de pilotage d'une pompe piezoelectrique d'appareil electromenager et appareil electromenager mettant en oeuvre un tel procede
EP3549524B1 (de) 2012-03-30 2023-01-25 Insulet Corporation Flüssigkeitsabgabevorrichtung mit einem instrument für transkutanen zugang und einem einsatzmechanismus sowie blutzuckerüberwachungsvorrichtung zur verwendung damit
DE102013201342A1 (de) * 2013-01-29 2014-07-31 Robert Bosch Gmbh Verfahren zum Herstellen eines normal-geschlossenen Rückschlagventils für mikrofluidische Bauteile aus einem polymeren Schichtsystem und Rückschlagventil
WO2018035032A1 (en) 2016-08-14 2018-02-22 Insulet Corporation Automatic drug delivery device with trigger mechanism
US10751478B2 (en) 2016-10-07 2020-08-25 Insulet Corporation Multi-stage delivery system
US10780217B2 (en) 2016-11-10 2020-09-22 Insulet Corporation Ratchet drive for on body delivery system
US10603440B2 (en) 2017-01-19 2020-03-31 Insulet Corporation Cartridge hold-up volume reduction
US10695485B2 (en) 2017-03-07 2020-06-30 Insulet Corporation Very high volume user filled drug delivery device
CA3069489C (en) * 2017-07-11 2022-12-06 Microfab Service Gmbh Micro check valve and system with multiple micro check valves and method for the production thereof
US10973978B2 (en) 2017-08-03 2021-04-13 Insulet Corporation Fluid flow regulation arrangements for drug delivery devices
US11280327B2 (en) 2017-08-03 2022-03-22 Insulet Corporation Micro piston pump
US11786668B2 (en) 2017-09-25 2023-10-17 Insulet Corporation Drug delivery devices, systems, and methods with force transfer elements
US10874803B2 (en) 2018-05-31 2020-12-29 Insulet Corporation Drug cartridge with drive system
US11229736B2 (en) 2018-06-06 2022-01-25 Insulet Corporation Linear shuttle pump for drug delivery
WO2020018687A1 (en) 2018-07-17 2020-01-23 Insulet Corporation Semi-rigid and flexible elements for wearable drug delivery device reservoir
US11446435B2 (en) 2018-11-28 2022-09-20 Insulet Corporation Drug delivery shuttle pump system and valve assembly
US11369735B2 (en) 2019-11-05 2022-06-28 Insulet Corporation Component positioning of a linear shuttle pump
USD1024314S1 (en) 2022-06-01 2024-04-23 Insulet Corporation Automated drug delivery device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH679555A5 (de) * 1989-04-11 1992-03-13 Westonbridge Int Ltd
DE4006152A1 (de) * 1990-02-27 1991-08-29 Fraunhofer Ges Forschung Mikrominiaturisierte pumpe
JPH0466784A (ja) * 1990-07-06 1992-03-03 Seiko Epson Corp マイクロポンプおよびその製造方法
DE69313766T2 (de) * 1992-04-02 1998-02-26 Seiko Epson Corp Mikrosteuervorrichtung fuer fluidum und verfahren zu deren herstellung
GB2266751A (en) * 1992-05-02 1993-11-10 Westonbridge Int Ltd Piezoelectric micropump excitation voltage control.
DE4445686C2 (de) * 1994-12-21 1999-06-24 Fraunhofer Ges Forschung Mikroventilanordnung, insbesondere für pneumatische Steuerungen

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011108380A1 (de) * 2011-07-22 2013-01-24 Audi Ag Einrichtung zur Entlüftung und Belüftung eines Kraftstofftanks
DE102011108380B4 (de) * 2011-07-22 2016-07-07 Audi Ag Einrichtung zur Entlüftung und Belüftung eines Kraftstofftanks

Also Published As

Publication number Publication date
EP0789146B1 (de) 2002-04-10
EP0789146A1 (de) 1997-08-13
WO1997005385A1 (fr) 1997-02-13
JP3726285B2 (ja) 2005-12-14
DE69620569D1 (de) 2002-05-16
EP0789146A4 (de) 1998-10-28

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