DE69310947D1 - Kompakte Lasersonde für Profilometrie - Google Patents

Kompakte Lasersonde für Profilometrie

Info

Publication number
DE69310947D1
DE69310947D1 DE69310947T DE69310947T DE69310947D1 DE 69310947 D1 DE69310947 D1 DE 69310947D1 DE 69310947 T DE69310947 T DE 69310947T DE 69310947 T DE69310947 T DE 69310947T DE 69310947 D1 DE69310947 D1 DE 69310947D1
Authority
DE
Germany
Prior art keywords
profilometry
laser probe
compact laser
compact
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69310947T
Other languages
English (en)
Other versions
DE69310947T2 (de
Inventor
David H Kittell
Guy H Hayes
Peter J Degroot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of DE69310947D1 publication Critical patent/DE69310947D1/de
Application granted granted Critical
Publication of DE69310947T2 publication Critical patent/DE69310947T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C7/00—Tracing profiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
DE69310947T 1992-02-12 1993-02-11 Kompakte Lasersonde für Profilometrie Expired - Fee Related DE69310947T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/834,758 US5239366A (en) 1992-02-12 1992-02-12 Compact laser probe for profilometry

Publications (2)

Publication Number Publication Date
DE69310947D1 true DE69310947D1 (de) 1997-07-03
DE69310947T2 DE69310947T2 (de) 1997-12-18

Family

ID=25267734

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69310947T Expired - Fee Related DE69310947T2 (de) 1992-02-12 1993-02-11 Kompakte Lasersonde für Profilometrie

Country Status (6)

Country Link
US (2) US5239366A (de)
EP (1) EP0556041B1 (de)
JP (1) JP2505360B2 (de)
KR (1) KR930018259A (de)
DE (1) DE69310947T2 (de)
IL (1) IL104641A0 (de)

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US5239366A (en) * 1992-02-12 1993-08-24 Huges Aircraft Company Compact laser probe for profilometry
JP2586371B2 (ja) * 1992-12-22 1997-02-26 日本電気株式会社 圧電アクチュエータ
EP0708347A1 (de) * 1994-10-21 1996-04-24 Hewlett-Packard GmbH Vorrichtung zum Justieren, Abschwächungsvorrichtung, Kopplungsvorrichtung und Filtervorrichtung
DE4445642A1 (de) * 1994-12-21 1996-06-27 Marco Systemanalyse Entw Piezoaktuatorisches Antriebs- bzw. Verstellelement
US5895927A (en) * 1995-06-30 1999-04-20 The United States Of America As Represented By The Secretary Of The Air Force Electro-optic, noncontact, interior cross-sectional profiler
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US7206623B2 (en) * 2000-05-02 2007-04-17 Sensys Medical, Inc. Optical sampling interface system for in vivo measurement of tissue
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US7519406B2 (en) * 2004-04-28 2009-04-14 Sensys Medical, Inc. Noninvasive analyzer sample probe interface method and apparatus
US20060211931A1 (en) * 2000-05-02 2006-09-21 Blank Thomas B Noninvasive analyzer sample probe interface method and apparatus
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US6928225B2 (en) * 2001-04-03 2005-08-09 Schott Glas Method and assembly for mounting at least one optical fiber
US6781693B2 (en) * 2001-07-27 2004-08-24 Gigabit Optics Corporation System and method for optical multiplexing and/or demultiplexing
US6898596B2 (en) * 2001-10-23 2005-05-24 Therma-Wave, Inc. Evolution of library data sets
US6798523B2 (en) * 2001-12-04 2004-09-28 Honeywell International Inc. Sensor and method for detecting fiber optic faults
US20070149868A1 (en) * 2002-03-08 2007-06-28 Blank Thomas B Method and Apparatus for Photostimulation Enhanced Analyte Property Estimation
US7440786B2 (en) * 2002-03-08 2008-10-21 Sensys Medical, Inc. Method and apparatus for presentation of noninvasive glucose concentration information
US8718738B2 (en) * 2002-03-08 2014-05-06 Glt Acquisition Corp. Method and apparatus for coupling a sample probe with a sample site
AU2003218012A1 (en) * 2002-03-08 2003-09-22 Sensy Medical Inc. Compact apparatus for noninvasive measurement of glucose through near-infrared spectroscopy
US7697966B2 (en) * 2002-03-08 2010-04-13 Sensys Medical, Inc. Noninvasive targeting system method and apparatus
US20050054908A1 (en) * 2003-03-07 2005-03-10 Blank Thomas B. Photostimulation method and apparatus in combination with glucose determination
US20050187439A1 (en) * 2003-03-07 2005-08-25 Blank Thomas B. Sampling interface system for in-vivo estimation of tissue analyte concentration
US8504128B2 (en) * 2002-03-08 2013-08-06 Glt Acquisition Corp. Method and apparatus for coupling a channeled sample probe to tissue
DE10236755B4 (de) * 2002-08-10 2005-04-14 Sms Meer Gmbh Vorrichtung zur Messung der Wanddicke eines Rohres in einem Rohrwalzwerk
US6807742B2 (en) * 2002-09-06 2004-10-26 Trijicon, Inc. Reflex sight with multiple power sources for reticle
WO2004068193A2 (en) * 2003-01-23 2004-08-12 Corning Incorporated Lensed fiber having small form factor and method of making same
US20070234300A1 (en) * 2003-09-18 2007-10-04 Leake David W Method and Apparatus for Performing State-Table Driven Regression Testing
US20080033275A1 (en) * 2004-04-28 2008-02-07 Blank Thomas B Method and Apparatus for Sample Probe Movement Control
US8868147B2 (en) * 2004-04-28 2014-10-21 Glt Acquisition Corp. Method and apparatus for controlling positioning of a noninvasive analyzer sample probe
US20060206018A1 (en) * 2005-03-04 2006-09-14 Alan Abul-Haj Method and apparatus for noninvasive targeting
EP1976240B1 (de) 2007-03-26 2009-11-11 Research In Motion Limited System und Verfahren zur Bereitstellung von Ruffunktionssymbolen auf einer Benutzeroberfläche, die eine Benutzerauswahl einer Kommunikationsleitung für einen ausgehenden Ruf auf einem mobilen Endgerät ermöglicht
ATE494723T1 (de) 2007-03-26 2011-01-15 Research In Motion Ltd System und verfahren zur bereitstellung einer benutzeroberfläche, die eine benutzerauswahl einer kommunikationsleitung für einen ausgehenden ruf auf einem mobilen endgerät ermöglicht
US20090036759A1 (en) * 2007-08-01 2009-02-05 Ault Timothy E Collapsible noninvasive analyzer method and apparatus
WO2009076564A1 (en) * 2007-12-11 2009-06-18 Menard, Inc. Programmable strain gauge amplifier
US8593644B2 (en) * 2010-12-13 2013-11-26 Southwest Research Institute White light optical profilometer for measuring complex surfaces
TWI473963B (zh) * 2011-03-04 2015-02-21 Univ Nat Formosa 一維掃瞄表面形貌量測裝置與方法
US20150146201A1 (en) * 2013-05-02 2015-05-28 Michael Burka Optical probe with extended working distance
CN104330005A (zh) * 2014-10-28 2015-02-04 重庆佳速汽车零部件有限公司 换挡杆的杆体端部位置检具
CN104330008B (zh) * 2014-11-24 2016-08-24 沈阳黎明航空发动机(集团)有限责任公司 一种摇臂组合件尺寸测量装置及测量方法
RU2650840C1 (ru) * 2016-12-27 2018-04-17 Общество с ограниченной ответственностью "Спецдортехника" Лазерный профилометр для определения геометрических параметров профиля поверхности
CN111121651A (zh) 2018-10-31 2020-05-08 财团法人工业技术研究院 光学测量稳定性控制系统

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DE2922937C2 (de) * 1979-06-01 1981-07-02 Fabeg Gmbh, 7518 Bretten Kabelkupplung zum selbsttätigen Durchkuppeln elektrischer Heiz- und/oder Steuerstromleitungen sowie von Lichtleitern zur optischen Befehlsübertragung, insbesondere für Bahnfahrzeuge
SE445778B (sv) * 1980-04-03 1986-07-14 Gerhard Westerberg Kompensationsanordning vid en laserinterferometer
JPS6078410A (ja) * 1983-10-05 1985-05-04 Fujitsu Ltd 調整式光コネクタ
JPS60111210A (ja) * 1983-11-21 1985-06-17 Fujitsu Ltd 定偏波ファイバ用光コネクタ
JPS60225005A (ja) * 1984-04-24 1985-11-09 Tokyo Erekutoron Kk レ−ザ−光を利用した位置決め装置の補正方式
JPS6124710U (ja) * 1984-07-19 1986-02-14 株式会社 高橋製作所 反射望遠鏡に於ける温度補償装置
US4758065A (en) * 1985-03-08 1988-07-19 Mechanical Technology Incorporated Fiber optic sensor probe
DK155250C (da) * 1985-08-13 1989-07-24 Lars Bager Fremgangsmaade og apparat til maaling af afstandsvariationer
US4639139A (en) * 1985-09-27 1987-01-27 Wyko Corporation Optical profiler using improved phase shifting interferometry
US4667922A (en) * 1985-11-08 1987-05-26 The United States Of America As Represented By The United States Department Of Energy Support assembly having three dimension position adjustment capabilities
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JPH0196610A (ja) * 1987-10-08 1989-04-14 Sumitomo Electric Ind Ltd 光結合装置
US5147348A (en) * 1988-03-18 1992-09-15 Eli Lilly And Company Optical fiber rotational connector
JPH0216442A (ja) * 1988-07-04 1990-01-19 Mitsubishi Motors Corp 酸素センサ
US4909589A (en) * 1988-12-11 1990-03-20 Morris Robert K Rotatable photonic coupling
US5042949A (en) * 1989-03-17 1991-08-27 Greenberg Jeffrey S Optical profiler for films and substrates
JPH02308109A (ja) * 1989-05-23 1990-12-21 Nec Corp 光モジュールの固定構造
JP2959576B2 (ja) * 1990-02-07 1999-10-06 富士通株式会社 光学部材の固定構造
IT1239223B (it) * 1990-02-20 1993-09-28 Pirelli Cavi Spa Connettore ottico orientabile per collegamento di fibre ottiche a componenti ottici discreti e sensore impiegante uno o piu' connettori orientabili
US5138676A (en) * 1990-06-15 1992-08-11 Aster Corporation Miniature fiberoptic bend device and method
JPH0486705A (ja) * 1990-07-31 1992-03-19 Canon Inc ライトガイド
US5153669A (en) * 1991-03-27 1992-10-06 Hughes Danbury Optical Systems, Inc. Three wavelength optical measurement apparatus and method
US5293438A (en) * 1991-09-21 1994-03-08 Namiki Precision Jewel Co., Ltd. Microlensed optical terminals and optical system equipped therewith, and methods for their manufacture, especially an optical coupling method and optical coupler for use therewith
US5239366A (en) * 1992-02-12 1993-08-24 Huges Aircraft Company Compact laser probe for profilometry

Also Published As

Publication number Publication date
EP0556041B1 (de) 1997-05-28
US5239366A (en) 1993-08-24
US5448662A (en) 1995-09-05
KR930018259A (ko) 1993-09-21
EP0556041A3 (de) 1993-11-10
DE69310947T2 (de) 1997-12-18
JP2505360B2 (ja) 1996-06-05
EP0556041A2 (de) 1993-08-18
JPH0611317A (ja) 1994-01-21
IL104641A0 (en) 1993-06-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: RAYTHEON CO., LEXINGTON, MASS., US

8339 Ceased/non-payment of the annual fee