DE69228537T2 - Methode und vorrichtung zur oberflächenanalyse - Google Patents

Methode und vorrichtung zur oberflächenanalyse

Info

Publication number
DE69228537T2
DE69228537T2 DE69228537T DE69228537T DE69228537T2 DE 69228537 T2 DE69228537 T2 DE 69228537T2 DE 69228537 T DE69228537 T DE 69228537T DE 69228537 T DE69228537 T DE 69228537T DE 69228537 T2 DE69228537 T2 DE 69228537T2
Authority
DE
Germany
Prior art keywords
small
sub2
sub1
small region
values
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69228537T
Other languages
German (de)
English (en)
Other versions
DE69228537D1 (de
Inventor
Kiyohide K.K. Tokai-Rika-Denki-Seisakusho Niwa-Gun Aichi-Ken 480-01 Imaeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokai Rika Co Ltd
Original Assignee
Tokai Rika Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokai Rika Co Ltd filed Critical Tokai Rika Co Ltd
Application granted granted Critical
Publication of DE69228537D1 publication Critical patent/DE69228537D1/de
Publication of DE69228537T2 publication Critical patent/DE69228537T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/59—Transmissivity
    • G01N21/5907—Densitometers
    • G01N21/5911—Densitometers of the scanning type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Spectrometry And Color Measurement (AREA)
DE69228537T 1991-03-19 1992-03-19 Methode und vorrichtung zur oberflächenanalyse Expired - Fee Related DE69228537T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5475791A JPH1096691A (ja) 1991-03-19 1991-03-19 面分析方法及び面分析装置
PCT/JP1992/000335 WO1992016827A1 (fr) 1991-03-19 1992-03-19 Procede et dispositif d'analyse de surface

Publications (2)

Publication Number Publication Date
DE69228537D1 DE69228537D1 (de) 1999-04-08
DE69228537T2 true DE69228537T2 (de) 1999-07-08

Family

ID=12979646

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69228537T Expired - Fee Related DE69228537T2 (de) 1991-03-19 1992-03-19 Methode und vorrichtung zur oberflächenanalyse

Country Status (5)

Country Link
US (1) US5418367A (enExample)
EP (1) EP0577835B1 (enExample)
JP (1) JPH1096691A (enExample)
DE (1) DE69228537T2 (enExample)
WO (1) WO1992016827A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5936233A (en) * 1998-02-26 1999-08-10 The Curators Of The University Of Missouri Buried object detection and neutralization system
US6389881B1 (en) * 1999-05-27 2002-05-21 Acoustic Systems, Inc. Method and apparatus for pattern match filtering for real time acoustic pipeline leak detection and location
US6673554B1 (en) * 1999-06-14 2004-01-06 Trellie Bioinformatics, Inc. Protein localization assays for toxicity and antidotes thereto
US6734962B2 (en) * 2000-10-13 2004-05-11 Chemimage Corporation Near infrared chemical imaging microscope
JP5188001B2 (ja) * 2001-05-24 2013-04-24 エムイーエス メディカル エレクトロニック システムズ リミテッド 精液分析
JP2006119076A (ja) * 2004-10-25 2006-05-11 Jasco Corp マッピングデータ解析装置及び方法
JP4637643B2 (ja) * 2005-05-18 2011-02-23 日本分光株式会社 分光分析装置
JP4856436B2 (ja) * 2006-02-08 2012-01-18 日本分光株式会社 マッピングデータ表示方法、プログラム、および装置
JP4709129B2 (ja) * 2006-12-19 2011-06-22 株式会社堀場製作所 試料分析装置
US20150301323A1 (en) * 2012-11-15 2015-10-22 Shimadzu Corporation System for setting analysis target region
JP6324201B2 (ja) 2013-06-20 2018-05-16 キヤノン株式会社 分光データ処理装置、及び分光データ処理方法
CN109116391B (zh) * 2018-07-23 2020-06-23 武汉大学 一种基于改进正交分解的区域划分方法
US10775530B1 (en) * 2019-08-29 2020-09-15 Peter Wilk Apparatus and method of detecting a mineral in the ground
CN111445964B (zh) * 2020-03-27 2023-05-12 合肥金星智控科技股份有限公司 成分分析结果的可视化方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5352198A (en) * 1976-10-22 1978-05-12 Hitachi Ltd Picture input apparatus of netlike red corpuscle
JPS6147522A (ja) * 1984-08-14 1986-03-08 Tech Res & Dev Inst Of Japan Def Agency 映像装置
JPH087331B2 (ja) * 1988-03-12 1996-01-29 株式会社日立製作所 赤外吸収スペクトル測定顕微鏡装置

Also Published As

Publication number Publication date
EP0577835A1 (en) 1994-01-12
EP0577835A4 (enExample) 1994-01-26
WO1992016827A1 (fr) 1992-10-01
JPH1096691A (ja) 1998-04-14
EP0577835B1 (en) 1999-03-03
DE69228537D1 (de) 1999-04-08
US5418367A (en) 1995-05-23

Similar Documents

Publication Publication Date Title
DE69228537T2 (de) Methode und vorrichtung zur oberflächenanalyse
DE69330969T2 (de) Multispektrale bildanalyse
DE4202822C2 (de) Optische Spektralanalysevorrichtung
DE69115701T2 (de) Konfokales optisches rastermikroskop
DE69115523T2 (de) Kompensationsverfahren zur Verwendung in Farbmesseinrichtungen
DE3586961T2 (de) Farbensensor.
DE69315607T2 (de) Verfahren und Vorrichtung zum Standardisieren und Kalibrieren eines spektrometrischen Instruments
DE60008579T2 (de) Verfahren zur untersuchung von zellproben durch bildherstellung und analysen
EP0489719B1 (de) Belichtungssteuerungsverfahren für ein fotografisches Farbkopiergerät
DE69021813T2 (de) Apparat und Verfahren für die Ausmessung von dünnen mehrschichtigen Lagen.
DE68913359T2 (de) Verfahren zur Driftfehlerkompensierung in einem Monochromator.
EP1625936A2 (de) Verfahren zur qualitativen Beurteilung eines Materials mit mindestens einem Erkennungsmerkmal
DE112015004726T5 (de) Spektrokopiemessverfahren und Spektrokopiemessvorrichtung
DE69907468T2 (de) System zur farbklassifizierung von fasern
DE69510663T2 (de) Verfahren und vorrichtung zur bestimmung von parametern der spektralen empfindlichkeit von farbempfindlichen rezeptoren im auge
DE3854020T2 (de) Verfahren zur Untersuchung von Blättern mit gleichzeitiger Auslösung der Messbereiche und der spektralen Bänder.
DE69416098T2 (de) Verfahren und Vorrichtung zur Kennzeichnung und Unterscheidung von legalen Banknoten und Dokumenten
DE68904316T2 (de) Verfahren zur kontrastoptimierung im bild einer probe.
DE112020001271B4 (de) Verfahren und Vorrichtung zur Bestimmung der Oberflächenfarbe von zumindest teilweise lichtdurchlässigen Materialien
DE10317669B4 (de) Verfahren zur Separierung von Detektionskanälen eines mikroskopischen Systems
EP0505769A1 (de) Verfahren zur Ermittlung der Flächendeckung einer Vorlage, insbesondere einer Druckplatte, sowie Vorrichtung zur Durchführung des Verfahrens
DE112021007554T5 (de) Multikapillarelektrophoresevorrichtung
DE102020122838A1 (de) Verfahren zum Erlangen einer Quantenwirkungsgradverteilung, Verfahren zum Anzeigen einer Quantenwirkungsgradverteilung, Programm zum Erlangen einer Quantenwirkungsgradverteilung, Programm zum Anzeigen einer Quantenwirkungsgradverteilung, Fluoreszenzspektrophotometer und Anzeigevorrichtung
WO2010083984A2 (de) Vorrichtung und verfahren zur abbildung der oberfläche einer probe
DE102019210405A1 (de) Verfahren zur Untersuchung von Substanzen, Computerprogrammprodukt zur Verwendung in diesem Verfahren, sowie mobiles elektronisches Gerät

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee