DE69227963T2 - Wafer-Korb zum enthalten von Halbleiter-Wafer - Google Patents

Wafer-Korb zum enthalten von Halbleiter-Wafer

Info

Publication number
DE69227963T2
DE69227963T2 DE69227963T DE69227963T DE69227963T2 DE 69227963 T2 DE69227963 T2 DE 69227963T2 DE 69227963 T DE69227963 T DE 69227963T DE 69227963 T DE69227963 T DE 69227963T DE 69227963 T2 DE69227963 T2 DE 69227963T2
Authority
DE
Germany
Prior art keywords
semiconductor wafers
containing semiconductor
wafer basket
basket
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69227963T
Other languages
English (en)
Other versions
DE69227963D1 (de
Inventor
Nobuyoshi Ogino
Toshitsugu Yajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Polymer Co Ltd
Shin Etsu Chemical Co Ltd
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Polymer Co Ltd, Shin Etsu Chemical Co Ltd, Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Polymer Co Ltd
Publication of DE69227963D1 publication Critical patent/DE69227963D1/de
Application granted granted Critical
Publication of DE69227963T2 publication Critical patent/DE69227963T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D21/00—Nestable, stackable or joinable containers; Containers of variable capacity
    • B65D21/02—Containers specially shaped, or provided with fittings or attachments, to facilitate nesting, stacking, or joining together
    • B65D21/0209—Containers specially shaped, or provided with fittings or attachments, to facilitate nesting, stacking, or joining together stackable or joined together one-upon-the-other in the upright or upside-down position
    • B65D21/0217—Containers with a closure presenting stacking elements
    • B65D21/0223—Containers with a closure presenting stacking elements the closure and the bottom presenting local co-operating elements, e.g. projections and recesses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D43/00—Lids or covers for rigid or semi-rigid containers
    • B65D43/02—Removable lids or covers
    • B65D43/0202—Removable lids or covers without integral tamper element
    • B65D43/0204—Removable lids or covers without integral tamper element secured by snapping over beads or projections
    • B65D43/0212—Removable lids or covers without integral tamper element secured by snapping over beads or projections only on the outside, or a part turned to the outside, of the mouth
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2543/00—Lids or covers essentially for box-like containers
    • B65D2543/00009—Details of lids or covers for rigid or semi-rigid containers
    • B65D2543/00018—Overall construction of the lid
    • B65D2543/00064—Shape of the outer periphery
    • B65D2543/0012—Shape of the outer periphery having straight sides, e.g. with curved corners
    • B65D2543/00175—Shape of the outer periphery having straight sides, e.g. with curved corners four straight sides, e.g. trapezium or diamond
    • B65D2543/00194—Shape of the outer periphery having straight sides, e.g. with curved corners four straight sides, e.g. trapezium or diamond square or rectangular
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2543/00—Lids or covers essentially for box-like containers
    • B65D2543/00009—Details of lids or covers for rigid or semi-rigid containers
    • B65D2543/00018—Overall construction of the lid
    • B65D2543/00259—Materials used
    • B65D2543/00296—Plastic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2543/00—Lids or covers essentially for box-like containers
    • B65D2543/00009—Details of lids or covers for rigid or semi-rigid containers
    • B65D2543/00444—Contact between the container and the lid
    • B65D2543/00481—Contact between the container and the lid on the inside or the outside of the container
    • B65D2543/0049—Contact between the container and the lid on the inside or the outside of the container on the inside, or a part turned to the inside of the mouth of the container
    • B65D2543/00518—Skirt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2543/00—Lids or covers essentially for box-like containers
    • B65D2543/00009—Details of lids or covers for rigid or semi-rigid containers
    • B65D2543/00444—Contact between the container and the lid
    • B65D2543/00481—Contact between the container and the lid on the inside or the outside of the container
    • B65D2543/00537—Contact between the container and the lid on the inside or the outside of the container on the outside, or a part turned to the outside of the mouth of the container
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2543/00—Lids or covers essentially for box-like containers
    • B65D2543/00009—Details of lids or covers for rigid or semi-rigid containers
    • B65D2543/00444—Contact between the container and the lid
    • B65D2543/00481—Contact between the container and the lid on the inside or the outside of the container
    • B65D2543/00555—Contact between the container and the lid on the inside or the outside of the container on both the inside and the outside
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2543/00—Lids or covers essentially for box-like containers
    • B65D2543/00009—Details of lids or covers for rigid or semi-rigid containers
    • B65D2543/00444—Contact between the container and the lid
    • B65D2543/00574—Contact between the container and the lid secured locally, i.e. a lot less than half the periphery
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2543/00—Lids or covers essentially for box-like containers
    • B65D2543/00009—Details of lids or covers for rigid or semi-rigid containers
    • B65D2543/00444—Contact between the container and the lid
    • B65D2543/00592—Snapping means
    • B65D2543/00601—Snapping means on the container
    • B65D2543/00611—Profiles
    • B65D2543/00629—Massive bead
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2543/00—Lids or covers essentially for box-like containers
    • B65D2543/00009—Details of lids or covers for rigid or semi-rigid containers
    • B65D2543/00444—Contact between the container and the lid
    • B65D2543/00592—Snapping means
    • B65D2543/00601—Snapping means on the container
    • B65D2543/00675—Periphery concerned
    • B65D2543/00694—Segments
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2543/00—Lids or covers essentially for box-like containers
    • B65D2543/00009—Details of lids or covers for rigid or semi-rigid containers
    • B65D2543/00444—Contact between the container and the lid
    • B65D2543/00592—Snapping means
    • B65D2543/00712—Snapping means on the lid
    • B65D2543/00722—Profiles
    • B65D2543/00759—Flange or lip
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2543/00—Lids or covers essentially for box-like containers
    • B65D2543/00009—Details of lids or covers for rigid or semi-rigid containers
    • B65D2543/00444—Contact between the container and the lid
    • B65D2543/00592—Snapping means
    • B65D2543/00712—Snapping means on the lid
    • B65D2543/00722—Profiles
    • B65D2543/00777—Hole
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2543/00—Lids or covers essentially for box-like containers
    • B65D2543/00009—Details of lids or covers for rigid or semi-rigid containers
    • B65D2543/00444—Contact between the container and the lid
    • B65D2543/00592—Snapping means
    • B65D2543/00712—Snapping means on the lid
    • B65D2543/00787—Periphery concerned
    • B65D2543/00805—Segments
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2543/00—Lids or covers essentially for box-like containers
    • B65D2543/00009—Details of lids or covers for rigid or semi-rigid containers
    • B65D2543/00824—Means for facilitating removing of the closure
    • B65D2543/00888—Means for facilitating removing of the closure by applying lever forces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2543/00—Lids or covers essentially for box-like containers
    • B65D2543/00009—Details of lids or covers for rigid or semi-rigid containers
    • B65D2543/00953—Sealing means
    • B65D2543/00962—Sealing means inserted
    • B65D2543/00972—Collars or rings

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Closures For Containers (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
  • Packaging Frangible Articles (AREA)
DE69227963T 1991-08-30 1992-09-01 Wafer-Korb zum enthalten von Halbleiter-Wafer Expired - Fee Related DE69227963T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24525491A JPH0563066A (ja) 1991-08-30 1991-08-30 ウエーハ収納容器の係止構造

Publications (2)

Publication Number Publication Date
DE69227963D1 DE69227963D1 (de) 1999-02-04
DE69227963T2 true DE69227963T2 (de) 1999-08-19

Family

ID=17130948

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69227963T Expired - Fee Related DE69227963T2 (de) 1991-08-30 1992-09-01 Wafer-Korb zum enthalten von Halbleiter-Wafer

Country Status (4)

Country Link
US (1) US5390811A (de)
EP (1) EP0530053B1 (de)
JP (1) JPH0563066A (de)
DE (1) DE69227963T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015121865A1 (de) 2015-12-15 2017-06-22 Bs Systems Gmbh & Co. Kg Transportbox

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JP3292800B2 (ja) * 1995-10-12 2002-06-17 信越ポリマー株式会社 密封容器のクランプ構造
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USRE42402E1 (en) 1995-10-13 2011-05-31 Entegris, Inc. 300 mm microenvironment pod with door on side
US5628533A (en) * 1995-10-23 1997-05-13 Yazaki Corporation Torsional snap-fit latch
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JP2000115955A (ja) * 1998-10-01 2000-04-21 Yazaki Corp 電気接続箱の防水構造
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US6206196B1 (en) * 1999-01-06 2001-03-27 Fluoroware, Inc. Door guide for a wafer container
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DE69227963D1 (de) 1999-02-04
JPH0563066A (ja) 1993-03-12
EP0530053B1 (de) 1998-12-23
EP0530053A1 (de) 1993-03-03
US5390811A (en) 1995-02-21

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