DE69225987T2 - Verfahren zur Herstellung eines Farbfilters - Google Patents
Verfahren zur Herstellung eines FarbfiltersInfo
- Publication number
- DE69225987T2 DE69225987T2 DE69225987T DE69225987T DE69225987T2 DE 69225987 T2 DE69225987 T2 DE 69225987T2 DE 69225987 T DE69225987 T DE 69225987T DE 69225987 T DE69225987 T DE 69225987T DE 69225987 T2 DE69225987 T2 DE 69225987T2
- Authority
- DE
- Germany
- Prior art keywords
- film
- color filter
- forming
- pattern
- colored layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title description 16
- 238000004519 manufacturing process Methods 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- 238000004070 electrodeposition Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 9
- 229920002120 photoresistant polymer Polymers 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 2
- 239000010408 film Substances 0.000 description 58
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229910052681 coesite Inorganic materials 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/164—Coating processes; Apparatus therefor using electric, electrostatic or magnetic means; powder coating
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Optical Filters (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3030464A JPH04269713A (ja) | 1991-02-25 | 1991-02-25 | 多色パターンの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE69225987D1 DE69225987D1 (de) | 1998-07-30 |
| DE69225987T2 true DE69225987T2 (de) | 1998-10-22 |
Family
ID=12304609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE69225987T Expired - Fee Related DE69225987T2 (de) | 1991-02-25 | 1992-02-19 | Verfahren zur Herstellung eines Farbfilters |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US6203950B1 (enExample) |
| EP (1) | EP0501657B1 (enExample) |
| JP (1) | JPH04269713A (enExample) |
| KR (1) | KR100276861B1 (enExample) |
| DE (1) | DE69225987T2 (enExample) |
| TW (1) | TW216830B (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07294725A (ja) * | 1994-03-01 | 1995-11-10 | Seiko Instr Inc | カラーフィルター及び多色液晶表示装置の製造方法 |
| RU2226293C2 (ru) * | 2001-10-02 | 2004-03-27 | ОПТИВА, Инк. | Панель дисплея и многослойная пластина для ее изготовления |
| CN105527747A (zh) | 2016-02-18 | 2016-04-27 | 京东方科技集团股份有限公司 | 彩膜基板及其制作方法、显示面板、显示装置 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL8105071A (nl) * | 1981-11-10 | 1983-06-01 | Philips Nv | Kleurenbeeldopneeminrichting. |
| US4522691A (en) | 1982-12-22 | 1985-06-11 | Seiko Instruments & Electronics Ltd. | Method for manufacturing a multicolor filter and a multicolor display device |
| JPS6033506A (ja) | 1983-08-04 | 1985-02-20 | Seiko Instr & Electronics Ltd | カラ−固体撮像素子の製造方法 |
| EP0226218B1 (en) | 1985-12-18 | 1993-07-14 | Canon Kabushiki Kaisha | Liquid crystal device |
| JP2640097B2 (ja) | 1986-03-20 | 1997-08-13 | セイコー電子工業株式会社 | 多色表示装置 |
| JPS6432233A (en) * | 1987-07-28 | 1989-02-02 | Sharp Kk | Liquid crystal display device |
| JP2593670B2 (ja) * | 1987-11-26 | 1997-03-26 | セイコー電子工業株式会社 | カラー表示装置の製造方法 |
| JPH01170902A (ja) * | 1987-12-25 | 1989-07-06 | Seiko Instr & Electron Ltd | カラーフィルターの製造方法 |
| EP0326112B1 (en) * | 1988-01-29 | 1994-09-14 | Toppan Printing Co., Ltd. | Electrode plate for display device and method for preparation thereof |
| EP0338412B2 (en) * | 1988-04-21 | 2000-05-10 | Asahi Glass Company Ltd. | Color liquid crystal display device and method for driving same |
| JPH0322221U (enExample) * | 1989-07-14 | 1991-03-07 |
-
1991
- 1991-02-25 JP JP3030464A patent/JPH04269713A/ja active Pending
-
1992
- 1992-02-19 DE DE69225987T patent/DE69225987T2/de not_active Expired - Fee Related
- 1992-02-19 EP EP92301330A patent/EP0501657B1/en not_active Expired - Lifetime
- 1992-02-24 US US07/840,345 patent/US6203950B1/en not_active Expired - Fee Related
- 1992-02-25 KR KR1019920002902A patent/KR100276861B1/ko not_active Expired - Fee Related
- 1992-04-17 TW TW081101481A patent/TW216830B/zh active
Also Published As
| Publication number | Publication date |
|---|---|
| EP0501657A1 (en) | 1992-09-02 |
| US6203950B1 (en) | 2001-03-20 |
| EP0501657B1 (en) | 1998-06-24 |
| KR100276861B1 (ko) | 2001-01-15 |
| TW216830B (enExample) | 1993-12-01 |
| JPH04269713A (ja) | 1992-09-25 |
| DE69225987D1 (de) | 1998-07-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE10317627B4 (de) | Verfahren zur Herstellung eines Matrixsubstrats für eine Flüssigkristallanzeigevorrichtung | |
| DE68924766T2 (de) | Flüssigkristall-Anzeigevorrichtung. | |
| DE69320099T2 (de) | Flüssigkristallanzeigetafel und Verfahren zu ihrer Herstellung | |
| DE69326745T2 (de) | Lichtsteuerelement für hochauflösende optische systeme und verfahren zu seiner herstellung | |
| DE19525745B4 (de) | Verfahren zur Bildung eines Abdeckungsmusters | |
| DE3784597T2 (de) | Fluessigkristallvorrichtung und verfahren zu ihrer herstellung mit hilfe von abstandshaltern, die durch aufdrucken geformt werden. | |
| DE102004037013B4 (de) | Flüssigkristallanzeigevorrichtung des Farbfilter-auf-Dünnschichttransistor-Typs und Verfahren zum Herstellen derselben | |
| DE69729827T2 (de) | Deformierbare Spiegelvorrichtung und Herstellungsmethode | |
| DE69222979T2 (de) | Verfahren zur Herstellung von Mikrolinsen | |
| DE4344897B4 (de) | Verfahren zur Herstellung von Dünnfilmtransistoren | |
| DE3874457T2 (de) | Fluessigkristall-anzeigevorrichtung. | |
| DE69126165T2 (de) | Verfahren zur Herstellung eines Farbfilters | |
| DE19648083B4 (de) | Flüssigkristall-Anzeigeeinrichtung und Verfahren zu deren Herstellung | |
| DE3224462C2 (enExample) | ||
| CH664533A5 (de) | Vorrichtung zum authentizitaetsnachweis. | |
| DE69213338T2 (de) | Elektrodenplatte und ihr Herstellungsprozess | |
| DE69114170T2 (de) | Fehler-Korrektur für Farbfilter. | |
| DE69518028T2 (de) | Verfahren zur Herstellung eines Farbfilters und mehrfarbige Flüssigkristallgeräte | |
| DE102014108433A1 (de) | Verfahren zur Herstellung eines Touch-Substrates | |
| DE3246076C2 (de) | Verfahren zur Herstellung von Farbfilterschichten für mehrfarbige Bildanzeigen | |
| DE4342123B4 (de) | Farbfilter, insbesondere für eine Flüssigkristallanzeigeeinrichtung, und Verfahren zu seiner Herstellung | |
| DE3841384C2 (de) | Anordnung mit einer Vielzahl von elektrischen Bauelementen mit nichtlinearer Strom-Spannungskennlinie sowie Verfahren zur Herstellung einer solchen Anordnung | |
| DE4447264B4 (de) | Verfahren zur Herstellung einer Halbton-Phasenverschiebungsmaske | |
| DE69225987T2 (de) | Verfahren zur Herstellung eines Farbfilters | |
| DE2123887C3 (enExample) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |