DE69222701D1 - Herstellungsverfahren für mikromechanische Elemente - Google Patents

Herstellungsverfahren für mikromechanische Elemente

Info

Publication number
DE69222701D1
DE69222701D1 DE69222701T DE69222701T DE69222701D1 DE 69222701 D1 DE69222701 D1 DE 69222701D1 DE 69222701 T DE69222701 T DE 69222701T DE 69222701 T DE69222701 T DE 69222701T DE 69222701 D1 DE69222701 D1 DE 69222701D1
Authority
DE
Germany
Prior art keywords
manufacturing process
micromechanical elements
micromechanical
elements
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69222701T
Other languages
English (en)
Other versions
DE69222701T2 (de
Inventor
Igor I Bol
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Application granted granted Critical
Publication of DE69222701D1 publication Critical patent/DE69222701D1/de
Publication of DE69222701T2 publication Critical patent/DE69222701T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P11/00—Connecting or disconnecting metal parts or objects by metal-working techniques not otherwise provided for 
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
  • Preventing Corrosion Or Incrustation Of Metals (AREA)
DE69222701T 1991-07-03 1992-07-01 Herstellungsverfahren für mikromechanische Elemente Expired - Fee Related DE69222701T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/725,174 US5149397A (en) 1991-07-03 1991-07-03 Fabrication methods for micromechanical elements

Publications (2)

Publication Number Publication Date
DE69222701D1 true DE69222701D1 (de) 1997-11-20
DE69222701T2 DE69222701T2 (de) 1998-05-07

Family

ID=24913458

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69222701T Expired - Fee Related DE69222701T2 (de) 1991-07-03 1992-07-01 Herstellungsverfahren für mikromechanische Elemente

Country Status (5)

Country Link
US (1) US5149397A (de)
EP (1) EP0522787B1 (de)
JP (1) JPH05230679A (de)
CA (1) CA2063769C (de)
DE (1) DE69222701T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5248379A (en) * 1992-01-06 1993-09-28 Xerox Corporation Method to manufacture lenses, optical systems and focusing mirrors by micromachining
US5258097A (en) * 1992-11-12 1993-11-02 Ford Motor Company Dry-release method for sacrificial layer microstructure fabrication
US5417801A (en) * 1993-06-29 1995-05-23 Xerox Corporation Process to manufacture bushings for micromechanical elements
DE19955975A1 (de) 1999-11-19 2001-05-23 Inst Mikrotechnik Mainz Gmbh Lithographisches Verfahren zur Herstellung von Mikrobauteilen
DE10063991B4 (de) * 2000-12-21 2005-06-02 Infineon Technologies Ag Verfahren zur Herstellung von mikromechanischen Bauelementen
JP5389455B2 (ja) * 2008-02-21 2014-01-15 セイコーインスツル株式会社 摺動部品及び時計
TW200940437A (en) * 2008-03-27 2009-10-01 Sunonwealth Electr Mach Ind Co Miniaturized motor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4375643A (en) * 1980-02-14 1983-03-01 Xerox Corporation Application of grown oxide bumper insulators to a high-speed VLSI SASMESFET
CA1308596C (en) * 1986-01-13 1992-10-13 Rohm And Haas Company Microplastic structures and method of manufacture
US4997521A (en) * 1987-05-20 1991-03-05 Massachusetts Institute Of Technology Electrostatic micromotor
US4740410A (en) * 1987-05-28 1988-04-26 The Regents Of The University Of California Micromechanical elements and methods for their fabrication
US5043043A (en) * 1990-06-22 1991-08-27 Massachusetts Institute Of Technology Method for fabricating side drive electrostatic micromotor

Also Published As

Publication number Publication date
CA2063769C (en) 1999-11-09
EP0522787B1 (de) 1997-10-15
EP0522787A1 (de) 1993-01-13
US5149397A (en) 1992-09-22
JPH05230679A (ja) 1993-09-07
CA2063769A1 (en) 1993-01-04
DE69222701T2 (de) 1998-05-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee