FR2618573B1 - Procede de fabrication de pieces de micromecanique - Google Patents
Procede de fabrication de pieces de micromecaniqueInfo
- Publication number
- FR2618573B1 FR2618573B1 FR8710643A FR8710643A FR2618573B1 FR 2618573 B1 FR2618573 B1 FR 2618573B1 FR 8710643 A FR8710643 A FR 8710643A FR 8710643 A FR8710643 A FR 8710643A FR 2618573 B1 FR2618573 B1 FR 2618573B1
- Authority
- FR
- France
- Prior art keywords
- micromechanical parts
- manufacturing micromechanical
- manufacturing
- parts
- micromechanical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- ing And Chemical Polishing (AREA)
- Micromachines (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8710643A FR2618573B1 (fr) | 1987-07-22 | 1987-07-22 | Procede de fabrication de pieces de micromecanique |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8710643A FR2618573B1 (fr) | 1987-07-22 | 1987-07-22 | Procede de fabrication de pieces de micromecanique |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2618573A1 FR2618573A1 (fr) | 1989-01-27 |
FR2618573B1 true FR2618573B1 (fr) | 1990-01-05 |
Family
ID=9353613
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8710643A Expired - Fee Related FR2618573B1 (fr) | 1987-07-22 | 1987-07-22 | Procede de fabrication de pieces de micromecanique |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2618573B1 (fr) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1256344A (en) * | 1969-05-23 | 1971-12-08 | North American Rockwell | Photographic manufacture of printed circuits |
FR2382032A1 (fr) * | 1977-02-24 | 1978-09-22 | Charrieau Christian | Procede d'obtention de plaques gravees et application de ce procede a la fabrication des emaux |
US4512848A (en) * | 1984-02-06 | 1985-04-23 | Exxon Research And Engineering Co. | Procedure for fabrication of microstructures over large areas using physical replication |
CA1308596C (fr) * | 1986-01-13 | 1992-10-13 | Rohm And Haas Company | Structure microplastique et methode de fabrication correspondante |
-
1987
- 1987-07-22 FR FR8710643A patent/FR2618573B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2618573A1 (fr) | 1989-01-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69130777T2 (de) | Herstellungsverfahren für Mikrolinsen | |
FR2734188B1 (fr) | Procede de fabrication de pieces monocristallines | |
FR2644088B1 (fr) | Procede de fabrication de coude de fonderie | |
FR2640254B1 (fr) | Procede de fabrication de trichloromonosilane | |
DE69117905D1 (de) | Herstellungsverfahren für Alkoxyphthalocyanine | |
NO175518C (no) | Fremgangsmåte for fremstilling av stikkpiller | |
NO174998C (no) | Fremgangsmåte for fremstilling av gjenstander | |
FR2577162B1 (fr) | Procede de fabrication de moules | |
FR2532661B1 (fr) | Procede de fabrication de ferrosilicium | |
DE68928905D1 (de) | Muster-Herstellungsverfahren | |
FR2595983B1 (fr) | Procede de fabrication de vitrages feuilletes | |
DE69028950D1 (de) | Muster-Herstellungsverfahren | |
FR2634477B1 (fr) | Procede de fabrication de preformes en matiere ceramique | |
FR2630105B1 (fr) | Procede de fabrication des dialkyldisulfures inferieurs | |
IT9020580A0 (it) | procedimento per la produzione | |
FR2567522B1 (fr) | Procede de fabrication de dianydride de silylnorbornane | |
TR25474A (tr) | PROPILEN-ETILEN-COPOLIMERISATLARIN üRETIMINE ILIS- KIN YÖNTEM | |
FR2651965B1 (fr) | Procede de fabrication de pulpes vegetales blanchies. | |
FR2529482B1 (fr) | Procede de fabrication de tiges creuses | |
TR25183A (tr) | Alkil etoksi karboksilatlarin yapimi icin islem | |
FR2647641B1 (fr) | Procede de fabrication de pulpes vegetales blanchies | |
DE69222701D1 (de) | Herstellungsverfahren für mikromechanische Elemente | |
FR2609327B1 (fr) | Procede perfectionne de fabrication de neige artificielle | |
FR2614765B1 (fr) | Procede de fabrication d'un roux | |
FR2596690B1 (fr) | Procede de fabrication de pieces moulees en matiere synthetique |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TP | Transmission of property | ||
ST | Notification of lapse |