FR2640254B1 - Procede de fabrication de trichloromonosilane - Google Patents

Procede de fabrication de trichloromonosilane

Info

Publication number
FR2640254B1
FR2640254B1 FR898915325A FR8915325A FR2640254B1 FR 2640254 B1 FR2640254 B1 FR 2640254B1 FR 898915325 A FR898915325 A FR 898915325A FR 8915325 A FR8915325 A FR 8915325A FR 2640254 B1 FR2640254 B1 FR 2640254B1
Authority
FR
France
Prior art keywords
trichloromonosilane
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR898915325A
Other languages
English (en)
Other versions
FR2640254A1 (fr
Inventor
Karl Forwald
Gunnar Schuessler
Oeyvind Soerli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elkem ASA
Original Assignee
Elkem ASA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elkem ASA filed Critical Elkem ASA
Publication of FR2640254A1 publication Critical patent/FR2640254A1/fr
Application granted granted Critical
Publication of FR2640254B1 publication Critical patent/FR2640254B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
    • C01B33/10742—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material
    • C01B33/10757—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane
    • C01B33/10763—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by hydrochlorination of silicon or of a silicon-containing material with the preferential formation of trichlorosilane from silicon
FR898915325A 1988-12-08 1989-11-22 Procede de fabrication de trichloromonosilane Expired - Fee Related FR2640254B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO885454A NO166032C (no) 1988-12-08 1988-12-08 Fremgangsmaate ved fremstilling av triklormonosilan.

Publications (2)

Publication Number Publication Date
FR2640254A1 FR2640254A1 (fr) 1990-06-15
FR2640254B1 true FR2640254B1 (fr) 1993-08-27

Family

ID=19891500

Family Applications (1)

Application Number Title Priority Date Filing Date
FR898915325A Expired - Fee Related FR2640254B1 (fr) 1988-12-08 1989-11-22 Procede de fabrication de trichloromonosilane

Country Status (9)

Country Link
US (1) US4986971A (fr)
JP (1) JPH02208217A (fr)
BR (1) BR8906363A (fr)
CA (1) CA2003168C (fr)
DD (1) DD285967A5 (fr)
DE (1) DE3938897A1 (fr)
FR (1) FR2640254B1 (fr)
NO (1) NO166032C (fr)
RU (1) RU1838236C (fr)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5871705A (en) * 1996-09-19 1999-02-16 Tokuyama Corporation Process for producing trichlorosilane
DE102004017453A1 (de) * 2004-04-08 2005-10-27 Wacker-Chemie Gmbh Verfahren zur Herstellung von Trichlormonosilan
DE502006008382D1 (de) * 2005-03-05 2011-01-05 Jssi Gmbh Reaktor und verfahren zur herstellung von silizium
JP4664892B2 (ja) * 2006-12-05 2011-04-06 株式会社大阪チタニウムテクノロジーズ シリコン塩化物の製造方法
JP4620694B2 (ja) * 2007-01-31 2011-01-26 株式会社大阪チタニウムテクノロジーズ 高純度トリクロロシランの製造方法
JP5337749B2 (ja) 2010-03-10 2013-11-06 信越化学工業株式会社 トリクロロシランの製造方法
JP5909153B2 (ja) 2012-06-14 2016-04-26 信越化学工業株式会社 高純度多結晶シリコンの製造方法
JP5879283B2 (ja) 2013-02-13 2016-03-08 信越化学工業株式会社 トリクロロシランの製造方法
JP5886234B2 (ja) 2013-04-11 2016-03-16 信越化学工業株式会社 シラン化合物またはクロロシラン化合物の精製方法、多結晶シリコンの製造方法、および、弱塩基性イオン交換樹脂の再生処理方法
DE102013215011A1 (de) 2013-07-31 2015-02-05 Wacker Chemie Ag Verfahren zur Herstellung von Trichlorsilan
JP6069167B2 (ja) 2013-10-23 2017-02-01 信越化学工業株式会社 多結晶シリコンの製造方法
JP6095613B2 (ja) 2014-07-10 2017-03-15 信越化学工業株式会社 クロロシランの精製方法
US11845667B2 (en) 2018-04-18 2023-12-19 Wacker Chemie Ag Method for producing chlorosilanes
US20220041455A1 (en) * 2018-12-18 2022-02-10 Wacker Chemie Ag Process for preparing chlorsilanes
US20220073357A1 (en) * 2018-12-18 2022-03-10 Wacker Chemie Ag Process for preparing chlorsilanes
US20220212938A1 (en) * 2019-04-29 2022-07-07 Wacker Chemie Ag Process for producing trichlorosilane with structure-optimised silicon particles
EP3976533A1 (fr) 2019-05-29 2022-04-06 Wacker Chemie AG Procédé de production de trichlorosilane comprenant des particules de silicium à structure optimisée
KR20210089208A (ko) * 2019-06-14 2021-07-15 와커 헤미 아게 구조-최적화된 규소 입자를 갖는 메틸클로로실란의 생산 방법
JP7278888B2 (ja) * 2019-06-28 2023-05-22 高純度シリコン株式会社 トリクロロシランの製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA652188A (en) * 1962-11-13 Chassaing Pierre Production of trichlorosilane
FR1239350A (fr) * 1959-06-24 1960-12-16 Pechiney Perfectionnement à la fabrication industrielle du trichlorosilane
US3592391A (en) * 1969-01-27 1971-07-13 Knapsack Ag Nozzle for atomizing molten material
US4347199A (en) * 1981-03-02 1982-08-31 Dow Corning Corporation Method and apparatus for rapidly freezing molten metals and metalloids in particulate form
JPS5832011A (ja) * 1981-08-17 1983-02-24 Nippon Aerojiru Kk 珪素と塩化水素からトリクロルシランと四塩化珪素を製造する方法
US4419060A (en) * 1983-03-14 1983-12-06 Dow Corning Corporation Apparatus for rapidly freezing molten metals and metalloids in particulate form

Also Published As

Publication number Publication date
NO166032C (no) 1991-05-22
NO166032B (no) 1991-02-11
DD285967A5 (de) 1991-01-10
DE3938897A1 (de) 1990-06-13
DE3938897C2 (fr) 1992-07-23
RU1838236C (ru) 1993-08-30
JPH055765B2 (fr) 1993-01-25
NO885454L (no) 1990-06-11
CA2003168C (fr) 1997-07-15
FR2640254A1 (fr) 1990-06-15
BR8906363A (pt) 1990-08-21
US4986971A (en) 1991-01-22
CA2003168A1 (fr) 1990-06-08
NO885454D0 (no) 1988-12-08
JPH02208217A (ja) 1990-08-17

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Legal Events

Date Code Title Description
ST Notification of lapse