DE69221090D1 - Verfahren zur Herstellung dünner Oxidschichte für elektrisch löschbare und programmierbare Nurlesespeicherzelle - Google Patents
Verfahren zur Herstellung dünner Oxidschichte für elektrisch löschbare und programmierbare NurlesespeicherzelleInfo
- Publication number
- DE69221090D1 DE69221090D1 DE69221090T DE69221090T DE69221090D1 DE 69221090 D1 DE69221090 D1 DE 69221090D1 DE 69221090 T DE69221090 T DE 69221090T DE 69221090 T DE69221090 T DE 69221090T DE 69221090 D1 DE69221090 D1 DE 69221090D1
- Authority
- DE
- Germany
- Prior art keywords
- production
- memory cells
- programmable read
- electrically erasable
- oxide layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
- H01L29/7883—Programmable transistors with only two possible levels of programmation charging by tunnelling of carriers, e.g. Fowler-Nordheim tunnelling
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/911—Differential oxidation and etching
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/981—Utilizing varying dielectric thickness
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Non-Volatile Memory (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITMI913355A IT1252214B (it) | 1991-12-13 | 1991-12-13 | Procedimento per la definizione di porzioni di ossido sottile particolarmente per celle di memoria a sola lettura programmabili e cancellabile elettricamente. |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69221090D1 true DE69221090D1 (de) | 1997-09-04 |
DE69221090T2 DE69221090T2 (de) | 1998-03-05 |
Family
ID=11361336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69221090T Expired - Fee Related DE69221090T2 (de) | 1991-12-13 | 1992-11-17 | Verfahren zur Herstellung dünner Oxidschichte für elektrisch löschbare und programmierbare Nurlesespeicherzelle |
Country Status (5)
Country | Link |
---|---|
US (2) | US5393684A (de) |
EP (1) | EP0546353B1 (de) |
JP (1) | JPH05259467A (de) |
DE (1) | DE69221090T2 (de) |
IT (1) | IT1252214B (de) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6236597B1 (en) | 1996-09-16 | 2001-05-22 | Altera Corporation | Nonvolatile memory cell with multiple gate oxide thicknesses |
US5750428A (en) * | 1996-09-27 | 1998-05-12 | United Microelectronics Corp. | Self-aligned non-volatile process with differentially grown gate oxide thickness |
IT1289525B1 (it) * | 1996-12-24 | 1998-10-15 | Sgs Thomson Microelectronics | Cella di memoria per dispositivi di tipo eeprom e relativo processo di fabbricazione |
IT1289524B1 (it) * | 1996-12-24 | 1998-10-15 | Sgs Thomson Microelectronics | Cella di memoria per dispositivi di tipo eeprom e relativo processo di fabbricazione |
US5895240A (en) * | 1997-06-30 | 1999-04-20 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of making stepped edge structure of an EEPROM tunneling window |
JP4081854B2 (ja) * | 1998-05-11 | 2008-04-30 | 沖電気工業株式会社 | 半導体装置の製造方法 |
US6373094B2 (en) * | 1998-09-11 | 2002-04-16 | Texas Instruments Incorporated | EEPROM cell using conventional process steps |
KR100495090B1 (ko) * | 1998-10-02 | 2005-09-02 | 삼성전자주식회사 | Eeprom의 터널영역 축소방법 |
KR100481856B1 (ko) * | 2002-08-14 | 2005-04-11 | 삼성전자주식회사 | 이이피롬 및 마스크롬을 구비하는 반도체 장치 및 그 제조방법 |
KR100660903B1 (ko) * | 2005-12-23 | 2006-12-26 | 삼성전자주식회사 | 프로그래밍 속도를 개선한 이이피롬, 이의 제조 방법 및이의 동작 방법 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5519851A (en) * | 1978-07-31 | 1980-02-12 | Hitachi Ltd | Manufacture of non-volatile memories |
JPS61174774A (ja) * | 1985-01-30 | 1986-08-06 | Toshiba Corp | 不揮発性半導体メモリ装置の製造方法 |
JPS61222175A (ja) * | 1985-03-01 | 1986-10-02 | Fujitsu Ltd | 半導体記憶装置の製造方法 |
EP0350771B1 (de) * | 1988-07-15 | 1994-10-12 | Texas Instruments Incorporated | Elektrisch löschbare und elektrisch programmierbare Nurlesespeicherzelle mit einem selbstjustierten Tunneleffekt-Fenster |
DE68915508T2 (de) * | 1988-10-25 | 1994-12-15 | Matsushita Electronics Corp | Verfahren zur Herstellung einer nicht-flüchtigen Speicheranordnung. |
US4957877A (en) * | 1988-11-21 | 1990-09-18 | Intel Corporation | Process for simultaneously fabricating EEPROM cell and flash EPROM cell |
US5215934A (en) * | 1989-12-21 | 1993-06-01 | Tzeng Jyh Cherng J | Process for reducing program disturbance in eeprom arrays |
US5198381A (en) * | 1991-09-12 | 1993-03-30 | Vlsi Technology, Inc. | Method of making an E2 PROM cell with improved tunneling properties having two implant stages |
US5273923A (en) * | 1991-10-09 | 1993-12-28 | Motorola, Inc. | Process for fabricating an EEPROM cell having a tunnel opening which overlaps field isolation regions |
-
1991
- 1991-12-13 IT ITMI913355A patent/IT1252214B/it active IP Right Grant
-
1992
- 1992-11-17 DE DE69221090T patent/DE69221090T2/de not_active Expired - Fee Related
- 1992-11-17 EP EP92119581A patent/EP0546353B1/de not_active Expired - Lifetime
- 1992-12-10 JP JP4330492A patent/JPH05259467A/ja active Pending
- 1992-12-10 US US07/988,474 patent/US5393684A/en not_active Expired - Lifetime
-
1994
- 1994-10-26 US US08/329,309 patent/US5527728A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0546353A2 (de) | 1993-06-16 |
DE69221090T2 (de) | 1998-03-05 |
EP0546353A3 (en) | 1993-08-18 |
JPH05259467A (ja) | 1993-10-08 |
ITMI913355A0 (it) | 1991-12-13 |
US5393684A (en) | 1995-02-28 |
ITMI913355A1 (it) | 1993-06-13 |
US5527728A (en) | 1996-06-18 |
IT1252214B (it) | 1995-06-05 |
EP0546353B1 (de) | 1997-07-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |