DE69217051D1 - Mikroprobe für einen oberflächen-rastermikroskop - Google Patents

Mikroprobe für einen oberflächen-rastermikroskop

Info

Publication number
DE69217051D1
DE69217051D1 DE69217051T DE69217051T DE69217051D1 DE 69217051 D1 DE69217051 D1 DE 69217051D1 DE 69217051 T DE69217051 T DE 69217051T DE 69217051 T DE69217051 T DE 69217051T DE 69217051 D1 DE69217051 D1 DE 69217051D1
Authority
DE
Germany
Prior art keywords
scanning microscope
surface scanning
micro sample
micro
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69217051T
Other languages
English (en)
Other versions
DE69217051T2 (de
Inventor
Rudolf Buser
Juergen Brugger
Christian Linder
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BTG International Ltd
Original Assignee
BRUGGER JUERGEN NEUCHATEL CH
BUSER RUDOLF ALFRED NEUCHATEL CH
LINDER CHRISTIAN NEUCHATEL CH
British Technology Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BRUGGER JUERGEN NEUCHATEL CH, BUSER RUDOLF ALFRED NEUCHATEL CH, LINDER CHRISTIAN NEUCHATEL CH, British Technology Group Ltd filed Critical BRUGGER JUERGEN NEUCHATEL CH
Publication of DE69217051D1 publication Critical patent/DE69217051D1/de
Application granted granted Critical
Publication of DE69217051T2 publication Critical patent/DE69217051T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/16—Probe manufacture

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE69217051T 1991-06-13 1992-06-12 Mikroprobe für einen oberflächen-rastermikroskop Expired - Fee Related DE69217051T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB919112777A GB9112777D0 (en) 1991-06-13 1991-06-13 Microprobe for surface scanning microscopes
PCT/GB1992/001060 WO1992022783A1 (en) 1991-06-13 1992-06-12 Microprobe for surface-scanning microscopes

Publications (2)

Publication Number Publication Date
DE69217051D1 true DE69217051D1 (de) 1997-03-06
DE69217051T2 DE69217051T2 (de) 1997-05-07

Family

ID=10696634

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69217051T Expired - Fee Related DE69217051T2 (de) 1991-06-13 1992-06-12 Mikroprobe für einen oberflächen-rastermikroskop

Country Status (5)

Country Link
EP (1) EP0588888B1 (de)
JP (1) JPH06508435A (de)
DE (1) DE69217051T2 (de)
GB (1) GB9112777D0 (de)
WO (1) WO1992022783A1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3192887B2 (ja) * 1994-09-21 2001-07-30 キヤノン株式会社 プローブ、該プローブを用いた走査型プローブ顕微鏡、および前記プローブを用いた記録再生装置
JP2002079499A (ja) * 2000-09-08 2002-03-19 Terumo Corp 針形状物の作製方法および作製された針
US7637960B2 (en) * 2005-11-15 2009-12-29 University Of Houston Short and thin silicon cantilever with tip and fabrication thereof

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2558263B1 (fr) * 1984-01-12 1986-04-25 Commissariat Energie Atomique Accelerometre directif et son procede de fabrication par microlithographie
DE68903951T2 (de) * 1989-08-16 1993-07-08 Ibm Verfahren fuer die herstellung mikromechanischer messfuehler fuer afm/stm-profilometrie und mikromechanischer messfuehlerkopf.
US5021364A (en) * 1989-10-31 1991-06-04 The Board Of Trustees Of The Leland Stanford Junior University Microcantilever with integral self-aligned sharp tetrahedral tip
JP3030574B2 (ja) * 1990-08-16 2000-04-10 キヤノン株式会社 微小変位型情報検知探針素子及びこれを用いた走査型トンネル顕微鏡、原子間力顕微鏡、情報処理装置

Also Published As

Publication number Publication date
EP0588888B1 (de) 1997-01-22
GB9112777D0 (en) 1991-07-31
JPH06508435A (ja) 1994-09-22
WO1992022783A1 (en) 1992-12-23
DE69217051T2 (de) 1997-05-07
EP0588888A1 (de) 1994-03-30

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: BRITISH TECHNOLOGY GROUP LTD., LONDON, GB

8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: BTG INTERNATIONAL LTD., LONDON, GB

8339 Ceased/non-payment of the annual fee