DE69212427T2 - Integrierter elektro-optischer Modulator und dessen Herstellungsverfahren - Google Patents

Integrierter elektro-optischer Modulator und dessen Herstellungsverfahren

Info

Publication number
DE69212427T2
DE69212427T2 DE69212427T DE69212427T DE69212427T2 DE 69212427 T2 DE69212427 T2 DE 69212427T2 DE 69212427 T DE69212427 T DE 69212427T DE 69212427 T DE69212427 T DE 69212427T DE 69212427 T2 DE69212427 T2 DE 69212427T2
Authority
DE
Germany
Prior art keywords
manufacturing process
optical modulator
integrated electro
electro
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69212427T
Other languages
English (en)
Other versions
DE69212427D1 (de
Inventor
Serge Valette
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of DE69212427D1 publication Critical patent/DE69212427D1/de
Application granted granted Critical
Publication of DE69212427T2 publication Critical patent/DE69212427T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/061—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on electro-optical organic material
    • G02F1/065—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on electro-optical organic material in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12069—Organic material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12173—Masking
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Nonlinear Science (AREA)
  • Power Engineering (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
DE69212427T 1991-10-25 1992-10-22 Integrierter elektro-optischer Modulator und dessen Herstellungsverfahren Expired - Fee Related DE69212427T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9113201A FR2683054B1 (fr) 1991-10-25 1991-10-25 Modulateur electrooptique integre et procede de fabrication de ce modulateur.

Publications (2)

Publication Number Publication Date
DE69212427D1 DE69212427D1 (de) 1996-08-29
DE69212427T2 true DE69212427T2 (de) 1997-02-06

Family

ID=9418324

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69212427T Expired - Fee Related DE69212427T2 (de) 1991-10-25 1992-10-22 Integrierter elektro-optischer Modulator und dessen Herstellungsverfahren

Country Status (5)

Country Link
US (1) US5396363A (de)
EP (1) EP0539298B1 (de)
CA (1) CA2081090A1 (de)
DE (1) DE69212427T2 (de)
FR (1) FR2683054B1 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2726097B1 (fr) * 1994-10-25 1996-11-15 Commissariat Energie Atomique Cellule electro-optique a mode transverse electrique pour un modulateur et procede de realisation d'une telle cellule
US5533151A (en) * 1995-04-28 1996-07-02 Texas Instruments Incorporated Active cladding optical modulator using an electro-optic polymer on an inorganic waveguide
JP2850950B2 (ja) * 1996-01-19 1999-01-27 日本電気株式会社 導波型光デバイス
DE19637396A1 (de) * 1996-09-13 1998-03-19 Siemens Ag Koppelanordnung zum Aneinanderkoppeln von Wellenleitern
JP3425843B2 (ja) * 1996-09-30 2003-07-14 富士写真フイルム株式会社 光導波路素子の電極の形成方法
NL1006323C2 (nl) * 1997-06-16 1998-12-17 Mierij Meteo Bv Geintegreerd optisch golfgeleider systeem.
US5949944A (en) * 1997-10-02 1999-09-07 Lucent Technologies Inc. Apparatus and method for dissipating charge from lithium niobate devices
US6310712B1 (en) 1997-10-29 2001-10-30 Teloptics Corporation Discrete element light modulating microstructure devices
US6816296B2 (en) 1997-10-29 2004-11-09 Teloptics Corporation Optical switching network and network node and method of optical switching
US6768572B2 (en) 1997-10-29 2004-07-27 Teloptics Corporation Solid state free space switch array on a substrate
FR2776784A1 (fr) * 1998-03-30 1999-10-01 France Telecom Modulateur electro-optique integre hybride du type a effet pockels
DE19826658A1 (de) * 1998-06-16 1999-12-30 Siemens Ag Schaltungsträger mit integrierten, aktiven, optischen Funktionen
JP2000028978A (ja) * 1998-07-15 2000-01-28 Minolta Co Ltd 光シャッタ装置
US6486996B1 (en) 1998-10-27 2002-11-26 Teloptics Corporations Discrete element light modulating microstructure devices
JP2000208871A (ja) * 1999-01-19 2000-07-28 Oki Electric Ind Co Ltd 導波路型光素子，導波路型光素子の製造方法，光モジュ―ル，及び光モジュ―ルの製造方法
DK199901580A (da) * 1999-11-03 2001-05-04 Nkt Res As Silicium mesa struktur integreret i en glas på silicium bølgeleder, samt fremgangsmåde til fremstiiling heraf
US6408125B1 (en) 1999-11-10 2002-06-18 Corning Incorporated Germanium silicon oxynitride high index films for planar waveguides
DE10032933B4 (de) 2000-07-06 2004-07-15 Infineon Technologies Ag Integrierte Wellenleiteranordnung
DE102004021567A1 (de) * 2004-05-03 2005-12-08 Covion Organic Semiconductors Gmbh Elektronische Vorrichtungen enthaltend organische Halbleiter
KR102085731B1 (ko) 2014-03-31 2020-03-09 엘에스산전 주식회사 배전반 결선 시험 장치
US11262605B2 (en) * 2017-08-31 2022-03-01 Lightwave Logic Inc. Active region-less polymer modulator integrated on a common PIC platform and method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR323317A (fr) * 1902-07-30 1903-03-03 Societe Automobiles Charron, Girardot Et Voigt Embrayage
FR2625333B1 (fr) * 1987-12-24 1993-09-10 Commissariat Energie Atomique Procede de fabrication de microguides de lumiere a faibles pertes de propagation optique par depot de multicouches
US4923264A (en) * 1989-01-18 1990-05-08 University Of Pittsburgh Of The Commonwealth System Of Higher Education Resonance coupled optical coupler with semiconductor waveguide layer comprising a multi-quantum-well structure
WO1991003748A1 (en) * 1989-09-08 1991-03-21 Hoechst Celanese Corporation Electro-optic waveguide device
US5091799A (en) * 1990-10-31 1992-02-25 The United States Of America As Represented By The Secretary Of The Navy Buried heterostructure laser modulator

Also Published As

Publication number Publication date
FR2683054B1 (fr) 1993-12-03
FR2683054A1 (fr) 1993-04-30
DE69212427D1 (de) 1996-08-29
EP0539298B1 (de) 1996-07-24
EP0539298A1 (de) 1993-04-28
CA2081090A1 (en) 1993-04-26
US5396363A (en) 1995-03-07

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee