DE69128982D1 - Verfahren zur Herstellung eines korrosionsbeständigen Schutzüberzugs auf Aluminiumsubstrat - Google Patents

Verfahren zur Herstellung eines korrosionsbeständigen Schutzüberzugs auf Aluminiumsubstrat

Info

Publication number
DE69128982D1
DE69128982D1 DE69128982T DE69128982T DE69128982D1 DE 69128982 D1 DE69128982 D1 DE 69128982D1 DE 69128982 T DE69128982 T DE 69128982T DE 69128982 T DE69128982 T DE 69128982T DE 69128982 D1 DE69128982 D1 DE 69128982D1
Authority
DE
Germany
Prior art keywords
corrosion
production
protective coating
aluminum substrate
resistant protective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69128982T
Other languages
English (en)
Other versions
DE69128982T2 (de
Inventor
D Arcy H Lorimer
Craig A Bercaw
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US07/534,807 external-priority patent/US5069938A/en
Priority claimed from US07/534,796 external-priority patent/US5192610A/en
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Application granted granted Critical
Publication of DE69128982D1 publication Critical patent/DE69128982D1/de
Publication of DE69128982T2 publication Critical patent/DE69128982T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/34—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases more than one element being applied in more than one step
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/80—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C25D11/04—Anodisation of aluminium or alloys based thereon
    • C25D11/18—After-treatment, e.g. pore-sealing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Electrochemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
DE1991628982 1990-06-07 1991-06-07 Verfahren zur Herstellung eines korrosionsbeständigen Schutzüberzugs auf Aluminiumsubstrat Expired - Fee Related DE69128982T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/534,807 US5069938A (en) 1990-06-07 1990-06-07 Method of forming a corrosion-resistant protective coating on aluminum substrate
US07/534,796 US5192610A (en) 1990-06-07 1990-06-07 Corrosion-resistant protective coating on aluminum substrate and method of forming same

Publications (2)

Publication Number Publication Date
DE69128982D1 true DE69128982D1 (de) 1998-04-09
DE69128982T2 DE69128982T2 (de) 1998-08-27

Family

ID=27064592

Family Applications (2)

Application Number Title Priority Date Filing Date
DE1991628982 Expired - Fee Related DE69128982T2 (de) 1990-06-07 1991-06-07 Verfahren zur Herstellung eines korrosionsbeständigen Schutzüberzugs auf Aluminiumsubstrat
DE1991625651 Expired - Fee Related DE69125651T2 (de) 1990-06-07 1991-06-07 Korrosionsbeständiger Schutzüberzug auf Aluminiumsubstrat oder Oberfläche und Verfahren zur Herstellung derselben

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE1991625651 Expired - Fee Related DE69125651T2 (de) 1990-06-07 1991-06-07 Korrosionsbeständiger Schutzüberzug auf Aluminiumsubstrat oder Oberfläche und Verfahren zur Herstellung derselben

Country Status (2)

Country Link
EP (2) EP0460701B1 (de)
DE (2) DE69128982T2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1120817B8 (de) * 1991-03-26 2007-10-10 Ngk Insulators, Ltd. Verwendung eines korrosion beständigen Substratshalters
WO1995031822A1 (fr) * 1994-05-17 1995-11-23 Hitachi, Ltd. Dispositif et procede de traitement au plasma
US5756222A (en) * 1994-08-15 1998-05-26 Applied Materials, Inc. Corrosion-resistant aluminum article for semiconductor processing equipment
FR2730746B1 (fr) * 1995-02-16 1997-04-30 Fond Et Ateliers Du Belier Procede de mouillage d'un insert en aluminium dans une piece moulee en aluminium
JP3689524B2 (ja) * 1996-03-22 2005-08-31 キヤノン株式会社 酸化アルミニウム膜及びその形成方法
US6280597B1 (en) 1997-09-12 2001-08-28 Showa Denko K.K. Fluorinated metal having a fluorinated layer and process for its production
JP3094000B2 (ja) * 1997-09-12 2000-10-03 昭和電工株式会社 フッ化表面層を有する金属材料もしくは金属皮膜ならびにフッ化方法
JP4054148B2 (ja) 1999-02-01 2008-02-27 日本碍子株式会社 耐食性部材の製造方法及び耐食性部材
KR100767762B1 (ko) * 2000-01-18 2007-10-17 에이에스엠 저펜 가부시기가이샤 자가 세정을 위한 원격 플라즈마 소스를 구비한 cvd 반도체 공정장치
DE10028772B4 (de) * 2000-06-07 2005-03-17 Technische Universität Dresden Aluminiumwerkstoff mit ultrahydrophober Oberfläche, Verfahren zu dessen Herstellung sowie Verwendung
CA2461523A1 (en) * 2001-10-25 2003-05-01 Showa Denko K.K. Heat exchanger, method for fluorination of the heat exchanger or component members thereof, and method of manufacturing the heat exchanger
US6632325B2 (en) * 2002-02-07 2003-10-14 Applied Materials, Inc. Article for use in a semiconductor processing chamber and method of fabricating same
JP2006128370A (ja) 2004-10-28 2006-05-18 Tokyo Electron Ltd 成膜装置、成膜方法、プログラムおよび記録媒体
DE102016102504A1 (de) 2016-02-08 2017-08-10 Salzgitter Flachstahl Gmbh Aluminiumbasierte Beschichtung für Stahlbleche oder Stahlbänder und Verfahren zur Herstellung hierzu
DE102018101183A1 (de) * 2017-10-17 2019-04-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Passives elektrisches Bauteil mit Isolierschicht
US20200010946A1 (en) * 2018-07-05 2020-01-09 The Board Of Trustees Of The University Of Illinois Ferrous structural component for use in fouling and corrosive environments, and method of making and using a ferrous structural component
CN113026010A (zh) * 2021-01-29 2021-06-25 昆明理工大学 一种铝材环保型碱性钝化液

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4111762A (en) * 1975-01-31 1978-09-05 Martin Marietta Corporation Optically black coating and process for forming it

Also Published As

Publication number Publication date
DE69128982T2 (de) 1998-08-27
DE69125651T2 (de) 1997-09-04
DE69125651D1 (de) 1997-05-22
EP0460700B1 (de) 1997-04-16
EP0460700A1 (de) 1991-12-11
EP0460701B1 (de) 1998-03-04
EP0460701A1 (de) 1991-12-11

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee