DE69518548D1 - Verfahren zur Herstellung eines keramischen Substrates - Google Patents

Verfahren zur Herstellung eines keramischen Substrates

Info

Publication number
DE69518548D1
DE69518548D1 DE69518548T DE69518548T DE69518548D1 DE 69518548 D1 DE69518548 D1 DE 69518548D1 DE 69518548 T DE69518548 T DE 69518548T DE 69518548 T DE69518548 T DE 69518548T DE 69518548 D1 DE69518548 D1 DE 69518548D1
Authority
DE
Germany
Prior art keywords
production
ceramic substrate
ceramic
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69518548T
Other languages
English (en)
Other versions
DE69518548T2 (de
Inventor
Yukihisa Takeuchi
Tsutomu Nanataki
Hisanori Yamamoto
Takahiro Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of DE69518548D1 publication Critical patent/DE69518548D1/de
Application granted granted Critical
Publication of DE69518548T2 publication Critical patent/DE69518548T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
    • H01L21/4807—Ceramic parts
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • C04B35/111—Fine ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/486—Fine ceramics
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/62218—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products obtaining ceramic films, e.g. by using temporary supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
    • H01L23/15—Ceramic or glass substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Composite Materials (AREA)
  • Compositions Of Oxide Ceramics (AREA)
DE69518548T 1994-11-09 1995-11-07 Verfahren zur Herstellung eines keramischen Substrates Expired - Lifetime DE69518548T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27503894 1994-11-09

Publications (2)

Publication Number Publication Date
DE69518548D1 true DE69518548D1 (de) 2000-09-28
DE69518548T2 DE69518548T2 (de) 2001-04-19

Family

ID=17550006

Family Applications (2)

Application Number Title Priority Date Filing Date
DE69514987T Expired - Lifetime DE69514987T2 (de) 1994-11-09 1995-11-07 Keramische Grünfolie und Verfahren zur Herstellung keramisches Substrat
DE69518548T Expired - Lifetime DE69518548T2 (de) 1994-11-09 1995-11-07 Verfahren zur Herstellung eines keramischen Substrates

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE69514987T Expired - Lifetime DE69514987T2 (de) 1994-11-09 1995-11-07 Keramische Grünfolie und Verfahren zur Herstellung keramisches Substrat

Country Status (3)

Country Link
US (2) US5733499A (de)
EP (2) EP0857702B1 (de)
DE (2) DE69514987T2 (de)

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US6051171A (en) * 1994-10-19 2000-04-18 Ngk Insulators, Ltd. Method for controlling firing shrinkage of ceramic green body
US6395117B1 (en) * 1994-10-19 2002-05-28 Ngk Insulators Method for producing ceramic green sheet
DE69514987T2 (de) * 1994-11-09 2000-06-29 Ngk Insulators, Ltd. Keramische Grünfolie und Verfahren zur Herstellung keramisches Substrat
DE69939619D1 (de) 1998-04-10 2008-11-06 Nippon Catalytic Chem Ind Keramikplatte und verfahren zum herstellen der keramikplatte
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DE10038987A1 (de) * 2000-08-10 2002-02-28 Bosch Gmbh Robert Keramische Schicht, keramischer Schichtkörper mit derartigen Schichten und Verfahren zu deren Herstellung
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EP1562244B1 (de) * 2002-10-11 2010-03-03 Nippon Shokubai Co., Ltd. Elektrolytblatt für eine festoxidbrennstoffzelle und verfahren zu seiner herstellung
JP4468767B2 (ja) * 2004-08-26 2010-05-26 日本碍子株式会社 セラミックス成形体の割掛率制御方法
US8962749B2 (en) * 2008-02-19 2015-02-24 Ngk Insulators, Ltd. Ceramic green sheet and method for producing the same
DE102008046336A1 (de) * 2008-09-09 2010-03-11 Osram Gesellschaft mit beschränkter Haftung LTCC-Schichtstapel
US8652697B2 (en) 2009-02-25 2014-02-18 Bloom Energy Corporation Controlling a fuel cell system based on fuel cell impedance characteristic
TWI479730B (zh) * 2009-03-20 2015-04-01 Bloom Energy Corp 不碎裂之固態氧化物燃料電池之電解質
US9601795B2 (en) 2009-10-23 2017-03-21 Nippon Shokubai Co., Ltd. Process for production of scandia-stabilized zirconia sheet, scandia-stabilized zirconia sheet obtained by the process, and scandia-stabilized zirconia sintered powder
WO2012114865A1 (ja) 2011-02-21 2012-08-30 日本碍子株式会社 粉末成形体の製造方法及び粉末成形体
CN103460474B (zh) 2011-03-30 2016-06-01 株式会社日本触媒 固体氧化物型燃料电池用电解质片、具备该电解质片的固体氧化物型燃料电池用单电池和固体氧化物型燃料电池、以及固体氧化物型燃料电池用电解质片的检査方法和固体氧化物型燃料电池用电解质片的制造方法
TWI552417B (zh) 2011-11-17 2016-10-01 博隆能源股份有限公司 對氧化鋯為主之電解質提供抗腐蝕性之多層塗層
TWI549348B (zh) 2011-11-18 2016-09-11 博隆能源股份有限公司 燃料電池之互連體及製造方法
US9452475B2 (en) 2012-03-01 2016-09-27 Bloom Energy Corporation Coatings for SOFC metallic interconnects
US9847520B1 (en) 2012-07-19 2017-12-19 Bloom Energy Corporation Thermal processing of interconnects
WO2014036058A1 (en) 2012-08-29 2014-03-06 Bloom Energy Corporation Interconnect for fuel cell stack
US9478812B1 (en) 2012-10-17 2016-10-25 Bloom Energy Corporation Interconnect for fuel cell stack
WO2014074478A1 (en) 2012-11-06 2014-05-15 Bloom Energy Corporation Improved interconnect and end plate design for fuel cell stack
US9583771B2 (en) 2013-05-16 2017-02-28 Bloom Energy Coporation Corrosion resistant barrier layer for a solid oxide fuel cell stack and method of making thereof
CA2924499A1 (en) 2013-10-01 2015-04-09 Bloom Energy Corporation Pre-formed powder delivery to powder press machine
WO2015080889A1 (en) 2013-11-27 2015-06-04 Bloom Energy Corporation Fuel cell interconnect with reduced voltage degradation over time
US10079393B1 (en) 2014-01-09 2018-09-18 Bloom Energy Corporation Method of fabricating an interconnect for a fuel cell stack
US9461320B2 (en) 2014-02-12 2016-10-04 Bloom Energy Corporation Structure and method for fuel cell system where multiple fuel cells and power electronics feed loads in parallel allowing for integrated electrochemical impedance spectroscopy (EIS)
US9461319B2 (en) 2014-02-21 2016-10-04 Bloom Energy Corporation Electrochemical impedance spectroscopy (EIS) analyzer and method of using thereof
US9993874B2 (en) 2014-02-25 2018-06-12 Bloom Energy Corporation Composition and processing of metallic interconnects for SOFC stacks
US9923211B2 (en) 2014-04-24 2018-03-20 Bloom Energy Corporation Fuel cell interconnect with reduced voltage degradation over time
EP3142179B1 (de) * 2014-07-30 2019-02-27 LG Chem, Ltd. Verfahren zur herstellung einer anorganischen elektrolytmembran mit verbesserter kompaktheit, zusammensetzung zur herstellung einer anorganischen elektrolytmembran und damit hergestellte anorganische elektrolytmembran
WO2016018106A1 (ko) * 2014-07-30 2016-02-04 주식회사 엘지화학 치밀도가 향상된 무기 전해질막의 제조방법, 이를 위한 무기 전해질막 제조용 조성물 및 이를 통해 제조된 무기 전해질막
US10573910B2 (en) 2015-09-14 2020-02-25 Bloom Energy Corporation Electrochemical impedance spectroscopy (“EIS”) analyzer and method of using thereof
US10763533B1 (en) 2017-03-30 2020-09-01 Bloom Energy Corporation Solid oxide fuel cell interconnect having a magnesium containing corrosion barrier layer and method of making thereof
WO2019006101A1 (en) * 2017-06-30 2019-01-03 Kyocera International, Inc. MICROELECTRONIC BUILDING CONSTRUCTION ACTIVATED BY REINFORCING AND DESIGNING CERAMIC INSULATION
JP6800546B2 (ja) * 2018-04-23 2020-12-16 森村Ｓｏｆｃテクノロジー株式会社 複合体、および、電気化学反応セルスタック

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DE69514987T2 (de) * 1994-11-09 2000-06-29 Ngk Insulators, Ltd. Keramische Grünfolie und Verfahren zur Herstellung keramisches Substrat

Also Published As

Publication number Publication date
EP0711738A3 (de) 1996-08-07
EP0711738A2 (de) 1996-05-15
US5955392A (en) 1999-09-21
EP0857702B1 (de) 2000-08-23
US5733499A (en) 1998-03-31
EP0711738B1 (de) 2000-02-09
DE69514987D1 (de) 2000-03-16
DE69518548T2 (de) 2001-04-19
DE69514987T2 (de) 2000-06-29
EP0857702A1 (de) 1998-08-12

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