DE69125651D1 - Korrosionsbeständiger Schutzüberzug auf Aluminiumsubstrat oder Oberfläche und Verfahren zur Herstellung derselben - Google Patents
Korrosionsbeständiger Schutzüberzug auf Aluminiumsubstrat oder Oberfläche und Verfahren zur Herstellung derselbenInfo
- Publication number
- DE69125651D1 DE69125651D1 DE69125651T DE69125651T DE69125651D1 DE 69125651 D1 DE69125651 D1 DE 69125651D1 DE 69125651 T DE69125651 T DE 69125651T DE 69125651 T DE69125651 T DE 69125651T DE 69125651 D1 DE69125651 D1 DE 69125651D1
- Authority
- DE
- Germany
- Prior art keywords
- corrosion
- manufacturing
- same
- protective coating
- aluminum substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/34—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases more than one element being applied in more than one step
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/80—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
- C25D11/02—Anodisation
- C25D11/04—Anodisation of aluminium or alloys based thereon
- C25D11/18—After-treatment, e.g. pore-sealing
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Electrochemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/534,807 US5069938A (en) | 1990-06-07 | 1990-06-07 | Method of forming a corrosion-resistant protective coating on aluminum substrate |
US07/534,796 US5192610A (en) | 1990-06-07 | 1990-06-07 | Corrosion-resistant protective coating on aluminum substrate and method of forming same |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69125651D1 true DE69125651D1 (de) | 1997-05-22 |
DE69125651T2 DE69125651T2 (de) | 1997-09-04 |
Family
ID=27064592
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1991625651 Expired - Fee Related DE69125651T2 (de) | 1990-06-07 | 1991-06-07 | Korrosionsbeständiger Schutzüberzug auf Aluminiumsubstrat oder Oberfläche und Verfahren zur Herstellung derselben |
DE1991628982 Expired - Fee Related DE69128982T2 (de) | 1990-06-07 | 1991-06-07 | Verfahren zur Herstellung eines korrosionsbeständigen Schutzüberzugs auf Aluminiumsubstrat |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE1991628982 Expired - Fee Related DE69128982T2 (de) | 1990-06-07 | 1991-06-07 | Verfahren zur Herstellung eines korrosionsbeständigen Schutzüberzugs auf Aluminiumsubstrat |
Country Status (2)
Country | Link |
---|---|
EP (2) | EP0460701B1 (de) |
DE (2) | DE69125651T2 (de) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5306895A (en) * | 1991-03-26 | 1994-04-26 | Ngk Insulators, Ltd. | Corrosion-resistant member for chemical apparatus using halogen series corrosive gas |
US5895586A (en) * | 1994-05-17 | 1999-04-20 | Hitachi, Ltd. | Plasma processing apparatus and plasma processing method in which a part of the processing chamber is formed using a pre-fluorinated material of aluminum |
US5756222A (en) * | 1994-08-15 | 1998-05-26 | Applied Materials, Inc. | Corrosion-resistant aluminum article for semiconductor processing equipment |
FR2730746B1 (fr) * | 1995-02-16 | 1997-04-30 | Fond Et Ateliers Du Belier | Procede de mouillage d'un insert en aluminium dans une piece moulee en aluminium |
JP3689524B2 (ja) * | 1996-03-22 | 2005-08-31 | キヤノン株式会社 | 酸化アルミニウム膜及びその形成方法 |
US6280597B1 (en) | 1997-09-12 | 2001-08-28 | Showa Denko K.K. | Fluorinated metal having a fluorinated layer and process for its production |
JP3094000B2 (ja) * | 1997-09-12 | 2000-10-03 | 昭和電工株式会社 | フッ化表面層を有する金属材料もしくは金属皮膜ならびにフッ化方法 |
JP4054148B2 (ja) * | 1999-02-01 | 2008-02-27 | 日本碍子株式会社 | 耐食性部材の製造方法及び耐食性部材 |
KR100767762B1 (ko) * | 2000-01-18 | 2007-10-17 | 에이에스엠 저펜 가부시기가이샤 | 자가 세정을 위한 원격 플라즈마 소스를 구비한 cvd 반도체 공정장치 |
DE10028772B4 (de) * | 2000-06-07 | 2005-03-17 | Technische Universität Dresden | Aluminiumwerkstoff mit ultrahydrophober Oberfläche, Verfahren zu dessen Herstellung sowie Verwendung |
EP1439368A4 (de) * | 2001-10-25 | 2006-05-03 | Showa Denko Kk | Wärmetauscher, verfahren zur fluorierung des wärmetauschers oder von bestandteilen davon und verfahren zur herstellung des wärmetauschers |
US6632325B2 (en) * | 2002-02-07 | 2003-10-14 | Applied Materials, Inc. | Article for use in a semiconductor processing chamber and method of fabricating same |
JP2006128370A (ja) | 2004-10-28 | 2006-05-18 | Tokyo Electron Ltd | 成膜装置、成膜方法、プログラムおよび記録媒体 |
DE102016102504A1 (de) * | 2016-02-08 | 2017-08-10 | Salzgitter Flachstahl Gmbh | Aluminiumbasierte Beschichtung für Stahlbleche oder Stahlbänder und Verfahren zur Herstellung hierzu |
DE102018101183A1 (de) * | 2017-10-17 | 2019-04-18 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Passives elektrisches Bauteil mit Isolierschicht |
US20200010946A1 (en) * | 2018-07-05 | 2020-01-09 | The Board Of Trustees Of The University Of Illinois | Ferrous structural component for use in fouling and corrosive environments, and method of making and using a ferrous structural component |
CN113026010A (zh) * | 2021-01-29 | 2021-06-25 | 昆明理工大学 | 一种铝材环保型碱性钝化液 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4111762A (en) * | 1975-01-31 | 1978-09-05 | Martin Marietta Corporation | Optically black coating and process for forming it |
-
1991
- 1991-06-07 DE DE1991625651 patent/DE69125651T2/de not_active Expired - Fee Related
- 1991-06-07 EP EP19910109363 patent/EP0460701B1/de not_active Expired - Lifetime
- 1991-06-07 EP EP19910109362 patent/EP0460700B1/de not_active Expired - Lifetime
- 1991-06-07 DE DE1991628982 patent/DE69128982T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0460700B1 (de) | 1997-04-16 |
DE69128982D1 (de) | 1998-04-09 |
EP0460701A1 (de) | 1991-12-11 |
EP0460700A1 (de) | 1991-12-11 |
DE69128982T2 (de) | 1998-08-27 |
DE69125651T2 (de) | 1997-09-04 |
EP0460701B1 (de) | 1998-03-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |