DE69113288D1 - Laserstruktur mit verteilter Rückkopplung und Herstellungsverfahren. - Google Patents

Laserstruktur mit verteilter Rückkopplung und Herstellungsverfahren.

Info

Publication number
DE69113288D1
DE69113288D1 DE69113288T DE69113288T DE69113288D1 DE 69113288 D1 DE69113288 D1 DE 69113288D1 DE 69113288 T DE69113288 T DE 69113288T DE 69113288 T DE69113288 T DE 69113288T DE 69113288 D1 DE69113288 D1 DE 69113288D1
Authority
DE
Germany
Prior art keywords
distributed feedback
laser structure
manufacturing process
active layer
cladding layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69113288T
Other languages
English (en)
Other versions
DE69113288T2 (de
Inventor
Roeland Gustaaf Frans Baets
Geert Jozef Ivo Morthier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Interuniversitair Microelektronica Centrum vzw IMEC
Original Assignee
Interuniversitair Microelektronica Centrum vzw IMEC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Interuniversitair Microelektronica Centrum vzw IMEC filed Critical Interuniversitair Microelektronica Centrum vzw IMEC
Publication of DE69113288D1 publication Critical patent/DE69113288D1/de
Application granted granted Critical
Publication of DE69113288T2 publication Critical patent/DE69113288T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
    • H01S5/1206Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers having a non constant or multiplicity of periods
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers
    • H01S5/1225Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers with a varying coupling constant along the optical axis

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
DE69113288T 1990-01-23 1991-01-23 Laserstruktur mit verteilter Rückkopplung und Herstellungsverfahren. Expired - Fee Related DE69113288T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL9000164A NL9000164A (nl) 1990-01-23 1990-01-23 Laseropbouw met gedistribueerde terugkoppeling en werkwijze ter vervaardiging daarvan.

Publications (2)

Publication Number Publication Date
DE69113288D1 true DE69113288D1 (de) 1995-11-02
DE69113288T2 DE69113288T2 (de) 1996-03-14

Family

ID=19856467

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69113288T Expired - Fee Related DE69113288T2 (de) 1990-01-23 1991-01-23 Laserstruktur mit verteilter Rückkopplung und Herstellungsverfahren.

Country Status (4)

Country Link
EP (1) EP0439236B1 (de)
AT (1) ATE128579T1 (de)
DE (1) DE69113288T2 (de)
NL (1) NL9000164A (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4322163A1 (de) * 1993-07-03 1995-01-12 Ant Nachrichtentech Auf DFB- oder DBR-Gitter basierendes optoelektronisches Bauelement mit quasi-kontinuierlich axial verteilbarer Brechungsindex-Variation, mit axial beliebig verteilbarer und variierbarer Phasenverschiebung, sowie mit axial quasi-kontinuierlich variierbarem Gitter-Kopplungskoeffizienten
DE4322164A1 (de) * 1993-07-03 1995-01-12 Ant Nachrichtentech Optoelektronisches Bauelement mit Rückkopplungsgitter, mit axial quasi-kontinuierlich und nahezu beliebig variierbarem Gitterkopplungs-Koeffizienten, mit quasi-kontinuierlich axial verteilbarer Brechungsindex-Variation, sowie mit axial nahezu beliebig verteilbarer und variierbarer Phasenverschiebung
DE4334525A1 (de) * 1993-10-09 1995-04-13 Deutsche Bundespost Telekom Optoelektronisches Bauelement mit verteilter Rückkopplung und variierbarem Kopplungskoeffizienten
JPH08255954A (ja) * 1995-03-17 1996-10-01 Mitsubishi Electric Corp 半導体レーザの構造及びその製造方法
JP6483521B2 (ja) * 2015-05-21 2019-03-13 日本電信電話株式会社 半導体レーザ
JP6588859B2 (ja) * 2016-05-13 2019-10-09 日本電信電話株式会社 半導体レーザ
JP6588858B2 (ja) * 2016-05-13 2019-10-09 日本電信電話株式会社 半導体レーザ
JP2018006440A (ja) * 2016-06-29 2018-01-11 日本電信電話株式会社 半導体レーザ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4775980A (en) * 1983-12-14 1988-10-04 Hitachi, Ltd. Distributed-feedback semiconductor laser device
JPH0666509B2 (ja) * 1983-12-14 1994-08-24 株式会社日立製作所 分布帰還型半導体レ−ザ装置
JP2768940B2 (ja) * 1987-07-08 1998-06-25 三菱電機株式会社 単一波長発振半導体レーザ装置
GB2209408B (en) * 1987-09-04 1991-08-21 Plessey Co Plc Optical waveguide device having surface relief diffraction grating

Also Published As

Publication number Publication date
EP0439236A1 (de) 1991-07-31
NL9000164A (nl) 1991-08-16
DE69113288T2 (de) 1996-03-14
EP0439236B1 (de) 1995-09-27
ATE128579T1 (de) 1995-10-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee