DE69111488T2 - Industriematerial mit fluorpassivierter Schicht und Verfahren zum Herstellen desselben. - Google Patents

Industriematerial mit fluorpassivierter Schicht und Verfahren zum Herstellen desselben.

Info

Publication number
DE69111488T2
DE69111488T2 DE69111488T DE69111488T DE69111488T2 DE 69111488 T2 DE69111488 T2 DE 69111488T2 DE 69111488 T DE69111488 T DE 69111488T DE 69111488 T DE69111488 T DE 69111488T DE 69111488 T2 DE69111488 T2 DE 69111488T2
Authority
DE
Germany
Prior art keywords
nickel
industrial material
fluorine
substrate
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69111488T
Other languages
English (en)
Other versions
DE69111488D1 (de
Inventor
Tadahiro Ohmi
Kazuo Chiba
Yutaka Mikasa
Kenji Ishigami
Nobuhiro Miki
Matagoro Maeno
Hirohisa Kikuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stella Chemifa Corp
MA Aluminum Corp
Original Assignee
Mitsubishi Aluminum Co Ltd
Hashimoto Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Aluminum Co Ltd, Hashimoto Chemical Corp filed Critical Mitsubishi Aluminum Co Ltd
Publication of DE69111488D1 publication Critical patent/DE69111488D1/de
Application granted granted Critical
Publication of DE69111488T2 publication Critical patent/DE69111488T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/021—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal alloy layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C23C28/027—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material including at least one metal matrix material comprising a mixture of at least two metals or metal phases or metal matrix composites, e.g. metal matrix with embedded inorganic hard particles, CERMET, MMC.
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/0305—Selection of materials for the tube or the coatings thereon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9335—Product by special process
    • Y10S428/936—Chemical deposition, e.g. electroless plating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S428/00—Stock material or miscellaneous articles
    • Y10S428/922—Static electricity metal bleed-off metallic stock
    • Y10S428/9335—Product by special process
    • Y10S428/938—Vapor deposition or gas diffusion

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Composite Materials (AREA)
  • Inorganic Chemistry (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Chemically Coating (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Glass Compositions (AREA)
  • Preventing Corrosion Or Incrustation Of Metals (AREA)
DE69111488T 1990-03-08 1991-03-11 Industriematerial mit fluorpassivierter Schicht und Verfahren zum Herstellen desselben. Expired - Lifetime DE69111488T2 (de)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP5944390 1990-03-08
JP17717290 1990-07-04
JP28315190 1990-10-19
JP28315090 1990-10-19
JP40513190 1990-12-21

Publications (2)

Publication Number Publication Date
DE69111488D1 DE69111488D1 (de) 1995-08-31
DE69111488T2 true DE69111488T2 (de) 1996-01-11

Family

ID=27523511

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69111488T Expired - Lifetime DE69111488T2 (de) 1990-03-08 1991-03-11 Industriematerial mit fluorpassivierter Schicht und Verfahren zum Herstellen desselben.

Country Status (5)

Country Link
US (1) US6258411B1 (de)
EP (1) EP0446079B1 (de)
JP (1) JP2954716B2 (de)
AT (1) ATE125642T1 (de)
DE (1) DE69111488T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0464226A (ja) * 1990-07-04 1992-02-28 Tadahiro Omi 金属フッ化膜を備えた電子装置
DE69717182T2 (de) 1996-03-07 2003-07-24 Tadahiro Ohmi Excimerlasergenerator
JP3094000B2 (ja) * 1997-09-12 2000-10-03 昭和電工株式会社 フッ化表面層を有する金属材料もしくは金属皮膜ならびにフッ化方法
US6444083B1 (en) * 1999-06-30 2002-09-03 Lam Research Corporation Corrosion resistant component of semiconductor processing equipment and method of manufacturing thereof
JP5001489B2 (ja) * 2001-03-19 2012-08-15 東京エレクトロン株式会社 処理装置
JP3891815B2 (ja) * 2001-10-12 2007-03-14 昭和電工株式会社 皮膜形成処理用アルミニウム合金、ならびに耐食性に優れたアルミニウム合金材およびその製造方法
CN100392151C (zh) * 2003-05-09 2008-06-04 昭和电工株式会社 耐腐蚀性材料及其制造方法
CN1833052B (zh) * 2003-08-08 2010-10-20 昭和电工株式会社 带有黑膜的基质的生产方法和带有黑膜的基质
EP4006201A4 (de) 2019-07-31 2023-11-29 Resonac Corporation Laminat und verfahren zur herstellung davon
WO2021049235A1 (ja) 2019-09-13 2021-03-18 昭和電工株式会社 積層体およびその製造方法
SG11202113223VA (en) 2019-10-10 2021-12-30 Showa Denko Kk Laminate and method for producing same
KR102448366B1 (ko) * 2020-12-21 2022-09-29 에스케이스페셜티 주식회사 내스크래치성이 향상된 고순도 불화수소의 저장 용기용 금속재료 및 이의 제조 방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4397812A (en) * 1974-05-24 1983-08-09 Richardson Chemical Company Electroless nickel polyalloys
DE2751517C2 (de) * 1977-11-18 1983-10-20 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Oberflächenpassiviertes Halbleiterbauelement mit einer Halbleiterscheibe und Verfahren zur Herstellung desselben
JPS5913065A (ja) 1982-07-13 1984-01-23 Fujitsu Ltd 薄膜防食法
DE3407093A1 (de) * 1984-02-28 1985-08-29 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zur passivierung einer metallischen oberflaeche
US4608097A (en) * 1984-10-05 1986-08-26 Exxon Research And Engineering Co. Method for producing an electronically passivated surface on crystalline silicon using a fluorination treatment and an organic overlayer
US5009963A (en) 1988-07-20 1991-04-23 Tadahiro Ohmi Metal material with film passivated by fluorination and apparatus composed of the metal material
EP0352061B1 (de) * 1988-07-20 1994-09-21 Hashimoto Chemical Industries Co., Ltd. Metallischer Werkstoff mit durch Fluorierung passiviertem Film und aus dem metallischen Werkstoff bestehende Anlage

Also Published As

Publication number Publication date
DE69111488D1 (de) 1995-08-31
US6258411B1 (en) 2001-07-10
EP0446079A1 (de) 1991-09-11
JP2954716B2 (ja) 1999-09-27
JPH05302177A (ja) 1993-11-16
EP0446079B1 (de) 1995-07-26
ATE125642T1 (de) 1995-08-15

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