DE69031039D1 - Keramische leiterplatte - Google Patents

Keramische leiterplatte

Info

Publication number
DE69031039D1
DE69031039D1 DE69031039T DE69031039T DE69031039D1 DE 69031039 D1 DE69031039 D1 DE 69031039D1 DE 69031039 T DE69031039 T DE 69031039T DE 69031039 T DE69031039 T DE 69031039T DE 69031039 D1 DE69031039 D1 DE 69031039D1
Authority
DE
Germany
Prior art keywords
ceramic pcb
pcb
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69031039T
Other languages
English (en)
Other versions
DE69031039T2 (de
Inventor
Yasuhito Fushii
Miyuki Nakamura
Yukihiko Nakajuma
Kazuo Kato
Akira Miyai
Kazuyuki Hiruta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=14194619&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69031039(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Publication of DE69031039D1 publication Critical patent/DE69031039D1/de
Application granted granted Critical
Publication of DE69031039T2 publication Critical patent/DE69031039T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/026—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/26—Cleaning or polishing of the conductive pattern
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/38—Improvement of the adhesion between the insulating substrate and the metal
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C04B2235/6565—Cooling rate
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C04B2235/6581—Total pressure below 1 atmosphere, e.g. vacuum
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/121—Metallic interlayers based on aluminium
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/122—Metallic interlayers based on refractory metals
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/124—Metallic interlayers based on copper
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
    • C04B2237/125—Metallic interlayers based on noble metals, e.g. silver
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/341—Silica or silicates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/34—Oxidic
    • C04B2237/343—Alumina or aluminates
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32—Ceramic
    • C04B2237/36—Non-oxidic
    • C04B2237/366—Aluminium nitride
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40—Metallic
    • C04B2237/407—Copper
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/52—Pre-treatment of the joining surfaces, e.g. cleaning, machining
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/52—Pre-treatment of the joining surfaces, e.g. cleaning, machining
    • C04B2237/525—Pre-treatment of the joining surfaces, e.g. cleaning, machining by heating
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/706—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the metallic layers or articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0355—Metal foils
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/07—Electric details
    • H05K2201/0753—Insulation
    • H05K2201/0761—Insulation resistance, e.g. of the surface of the PCB between the conductors
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
    • H05K2203/0779—Treatments involving liquids, e.g. plating, rinsing characterised by the specific liquids involved
    • H05K2203/0786—Using an aqueous solution, e.g. for cleaning or during drilling of holes
    • H05K2203/0789—Aqueous acid solution, e.g. for cleaning or etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Manufacturing Of Printed Wiring (AREA)
DE69031039T 1990-04-16 1990-11-16 Keramische leiterplatte Expired - Fee Related DE69031039T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9752390 1990-04-16
PCT/JP1990/001502 WO1991016805A1 (en) 1990-04-16 1990-11-16 Ceramic circuit board

Publications (2)

Publication Number Publication Date
DE69031039D1 true DE69031039D1 (de) 1997-08-14
DE69031039T2 DE69031039T2 (de) 1997-11-06

Family

ID=14194619

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69031039T Expired - Fee Related DE69031039T2 (de) 1990-04-16 1990-11-16 Keramische leiterplatte

Country Status (4)

Country Link
US (1) US5354415A (de)
EP (1) EP0480038B1 (de)
DE (1) DE69031039T2 (de)
WO (1) WO1991016805A1 (de)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09181423A (ja) * 1990-04-16 1997-07-11 Denki Kagaku Kogyo Kk セラミックス回路基板
JP3866320B2 (ja) * 1995-02-09 2007-01-10 日本碍子株式会社 接合体、および接合体の製造方法
JP4077888B2 (ja) * 1995-07-21 2008-04-23 株式会社東芝 セラミックス回路基板
JP3845925B2 (ja) * 1996-02-05 2006-11-15 住友電気工業株式会社 窒化アルミニウム基材を用いた半導体装置用部材及びその製造方法
JP3682552B2 (ja) * 1997-03-12 2005-08-10 同和鉱業株式会社 金属−セラミックス複合基板の製造方法
US6197435B1 (en) 1997-11-07 2001-03-06 Denki Kagaku Kogyo Kabushiki Kaisha Substrate
EP1063873A3 (de) * 1999-06-22 2003-04-23 Dr.-Ing. Jürgen Schulz-Harder Verfahren zum Herstellen von Substraten mit strukturierten Metallisierungen sowie Halte-und Fixierelement zur Verwendung bei dem Verfahren
JP4649027B2 (ja) * 1999-09-28 2011-03-09 株式会社東芝 セラミックス回路基板
EP1122780A3 (de) * 2000-01-31 2004-01-02 Ngk Insulators, Ltd. Laminatkühler, Leistungshalbleiter und seine Herstellung
KR100565139B1 (ko) * 2001-02-22 2006-03-30 니뽄 가이시 가부시키가이샤 전자 회로용 부재 및 그 제조 방법과 전자 부품
US7069645B2 (en) 2001-03-29 2006-07-04 Ngk Insulators, Ltd. Method for producing a circuit board
JP4887583B2 (ja) * 2001-08-09 2012-02-29 Ｄｏｗａメタルテック株式会社 セラミックス回路基板の製造方法
JP4811756B2 (ja) * 2001-09-28 2011-11-09 Ｄｏｗａメタルテック株式会社 金属−セラミックス接合回路基板の製造方法
US6800211B2 (en) * 2002-08-26 2004-10-05 Tong Hsing Electric Industries Ltd. Method for removing voids in a ceramic substrate
US20040112571A1 (en) * 2002-11-01 2004-06-17 Cooligy, Inc. Method and apparatus for efficient vertical fluid delivery for cooling a heat producing device
US8464781B2 (en) 2002-11-01 2013-06-18 Cooligy Inc. Cooling systems incorporating heat exchangers and thermoelectric layers
JP4394477B2 (ja) * 2003-03-27 2010-01-06 Ｄｏｗａホールディングス株式会社 金属−セラミックス接合基板の製造方法
JP4014528B2 (ja) * 2003-03-28 2007-11-28 日本碍子株式会社 ヒートスプレッダモジュールの製造方法及びヒートスプレッダモジュール
US7591302B1 (en) 2003-07-23 2009-09-22 Cooligy Inc. Pump and fan control concepts in a cooling system
TWI385720B (zh) * 2004-03-24 2013-02-11 Tosoh Corp Etching composition and etching treatment method
KR101108454B1 (ko) * 2004-04-05 2012-01-31 미쓰비시 마테리알 가부시키가이샤 Ａｌ／ＡｌＮ 접합체, 전력 모듈용 기판 및 전력 모듈, 그리고 Ａｌ／ＡｌＮ 접합체의 제조 방법
JP2006179856A (ja) * 2004-11-25 2006-07-06 Fuji Electric Holdings Co Ltd 絶縁基板および半導体装置
JP4378334B2 (ja) * 2005-09-09 2009-12-02 日本碍子株式会社 ヒートスプレッダモジュール及びその製造方法
KR20100014769A (ko) * 2007-01-10 2010-02-11 오스람 게젤샤프트 미트 베쉬랭크터 하프퉁 전자 부품 모듈 및 이의 생산 방법
JP5128829B2 (ja) * 2007-02-28 2013-01-23 Ｄｏｗａメタルテック株式会社 金属−セラミックス接合基板およびそれに用いるろう材
CN101715536A (zh) * 2007-05-02 2010-05-26 固利吉股份有限公司 用于电子冷却应用的微管/多端口逆流散热器设计
US9297571B1 (en) 2008-03-10 2016-03-29 Liebert Corporation Device and methodology for the removal of heat from an equipment rack by means of heat exchangers mounted to a door
WO2010017321A1 (en) * 2008-08-05 2010-02-11 Cooligy Inc. Bonded metal and ceramic plates for thermal management of optical and electronic devices
US9301390B2 (en) 2009-03-30 2016-03-29 Tokuyama Corporation Process for producing metallized substrate, and metallized substrate
WO2011010597A1 (ja) * 2009-07-24 2011-01-27 株式会社東芝 窒化珪素製絶縁シートおよびそれを用いた半導体モジュール構造体
TW201118940A (en) * 2009-11-20 2011-06-01 Holy Stone Entpr Co Ltd Ceramic substrate manufacturing method
TW201118059A (en) * 2009-11-20 2011-06-01 Holy Stone Entpr Co Ltd Manufacturing process for high precision ceramic substrate
EP2544515A4 (de) * 2010-03-02 2014-07-30 Tokuyama Corp Verfahren zur herstellung eines metallbeschichteten substrats
KR101489159B1 (ko) * 2011-12-23 2015-02-05 주식회사 잉크테크 금속 인쇄회로기판의 제조방법
WO2013115359A1 (ja) 2012-02-01 2013-08-08 三菱マテリアル株式会社 パワーモジュール用基板、ヒートシンク付パワーモジュール用基板、パワーモジュール、パワーモジュール用基板の製造方法、および銅部材接合用ペースト
KR101975633B1 (ko) * 2012-11-20 2019-05-07 도와 메탈테크 가부시키가이샤 금속-세라믹스 접합 기판 및 그 제조 방법
JP6056432B2 (ja) * 2012-12-06 2017-01-11 三菱マテリアル株式会社 パワーモジュール用基板、ヒートシンク付パワーモジュール用基板、パワーモジュール、パワーモジュール用基板の製造方法
JP5720861B1 (ja) * 2013-08-15 2015-05-20 日立金属株式会社 セラミックス回路基板の製造方法及びセラミックス回路基板
EP3341345B1 (de) * 2015-12-22 2023-07-26 Heraeus Deutschland GmbH & Co. KG Durch dickschichtpaste vermittelte, mit metall- oder metallhybridfolien verbundene keramik
JP2017135374A (ja) * 2016-01-22 2017-08-03 三菱マテリアル株式会社 接合体、パワーモジュール用基板、パワーモジュール、接合体の製造方法及びパワーモジュール用基板の製造方法
JP6631333B2 (ja) * 2016-03-11 2020-01-15 三菱マテリアル株式会社 パワーモジュール用基板の製造方法
JP6904094B2 (ja) * 2016-06-23 2021-07-14 三菱マテリアル株式会社 絶縁回路基板の製造方法
JP6799479B2 (ja) * 2017-03-03 2020-12-16 Ｄｏｗａメタルテック株式会社 金属−セラミックス回路基板の製造方法
CN113646883A (zh) * 2019-03-29 2021-11-12 京瓷株式会社 布线基板、电子装置用封装件以及电子装置
CN110993485B (zh) * 2019-11-27 2022-06-10 江苏富乐华半导体科技股份有限公司 一种氮化硅陶瓷覆铜基板的表面钝化方法
DE102020111697A1 (de) * 2020-04-29 2021-11-04 Rogers Germany Gmbh Trägersubstrat und Verfahren zur Herstellung eines Trägersubstrats
DE102020111700A1 (de) * 2020-04-29 2021-11-04 Rogers Germany Gmbh Trägersubstrat und Verfahren zur Herstellung eines Trägersubstrats
CN114105668A (zh) * 2021-12-19 2022-03-01 辽宁伊菲科技股份有限公司 一种防止氮化硅集成电路板钎焊分层的原料制备方法和设备

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS508179B1 (de) * 1970-06-26 1975-04-02
JPS513101A (ja) * 1974-06-25 1976-01-12 Sharp Kk Denpashaheiyoban
JPS5815955B2 (ja) * 1975-03-14 1983-03-28 三洋電機株式会社 コンセイシユウセキカイロノ ドウデンロノケイセイホウホウ
GB2006538B (en) * 1977-10-24 1982-03-17 Asahi Chemical Ind Thin-film microcircuit board and method for making the same
JPS54103568A (en) * 1978-01-31 1979-08-15 Matsushita Electric Works Ltd Method of forming electric circuit
JPS5541744A (en) * 1978-09-19 1980-03-24 Tokyo Shibaura Electric Co Method of manufacturing printed circuit board
JPS56134404A (en) * 1980-03-24 1981-10-21 Sony Corp Conductive material and method of prdoducing same
JPS5750490A (en) * 1980-09-11 1982-03-24 Nippon Electric Co Method of producing hybrid circuit board
JPS59150453A (ja) * 1982-12-23 1984-08-28 Toshiba Corp 半導体モジユ−ル用基板の製造方法
JPS59229892A (ja) * 1983-06-13 1984-12-24 株式会社東芝 プリント基板の製造方法
JPH0810710B2 (ja) * 1984-02-24 1996-01-31 株式会社東芝 良熱伝導性基板の製造方法
JPS60195068A (ja) * 1984-03-16 1985-10-03 田中貴金属工業株式会社 セラミックス接合方法
JPS6142192A (ja) * 1984-08-03 1986-02-28 オ−ケ−プリント配線株式会社 セラミツク基板の製造方法
JPS6182493A (ja) * 1984-09-29 1986-04-26 株式会社東芝 セラミツク配線基板の製造方法
JPS61121489A (ja) * 1984-11-19 1986-06-09 株式会社東芝 基板製造用Ｃｕ配線シ−ト
US4647477A (en) * 1984-12-07 1987-03-03 Kollmorgen Technologies Corporation Surface preparation of ceramic substrates for metallization
JPS61158423A (ja) * 1984-12-28 1986-07-18 Toyobo Co Ltd 延伸製膜法
US4712161A (en) * 1985-03-25 1987-12-08 Olin Corporation Hybrid and multi-layer circuitry
JPS61158423U (de) * 1985-03-22 1986-10-01
JPS62151581A (ja) * 1985-12-26 1987-07-06 Toshiba Corp 金属表面処理材
JPS62264689A (ja) * 1986-05-13 1987-11-17 同和鉱業株式会社 回路付金属−セラミツクス接合体の製造方法
US5058799A (en) * 1986-07-24 1991-10-22 Zsamboky Kalman F Metallized ceramic substrate and method therefor
JPS63160393A (ja) * 1986-12-24 1988-07-04 ロ−ム株式会社 回路基板の製造方法
JPS63169348A (ja) * 1986-12-29 1988-07-13 Teikoku Piston Ring Co Ltd セラミツク接合用アモルフアス合金箔
JPS6424078A (en) * 1987-07-17 1989-01-26 Nippon Steel Corp Method for joining ceramic to metal
JP2760987B2 (ja) * 1987-08-08 1998-06-04 株式会社東芝 セラミックスと金属との接合方法
JPS6454798A (en) * 1987-08-26 1989-03-02 Hitachi Ltd Manufacture of ceramic substrate
EP0331500B1 (de) * 1988-03-04 1993-01-07 Kabushiki Kaisha Toshiba Hartlötpaste zum Verbinden von Metalle und keramische Materialien
JPH01230290A (ja) * 1988-03-09 1989-09-13 Mitsubishi Electric Corp 厚膜回路の形成方法
JPH01313968A (ja) * 1988-06-13 1989-12-19 Tanaka Kikinzoku Kogyo Kk セラミックパッケージ用リードピン
JPH0272695A (ja) * 1988-09-07 1990-03-12 Toshiba Lighting & Technol Corp 混成集積回路
JPH02198198A (ja) * 1989-01-27 1990-08-06 Cmk Corp 電磁波シールド層を備えるプリント配線板
DE3913115A1 (de) * 1989-04-21 1990-10-25 Du Pont Deutschland Verfahren zur herstellung von elektrisch leitfaehigen mustern
DE69123692T2 (de) * 1990-10-05 1997-07-24 Toshiba Kawasaki Kk Verfahren zur Herstellung einer keramischen Leiterplatte

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EP0480038B1 (de) 1997-07-09
US5354415A (en) 1994-10-11
EP0480038A4 (en) 1993-04-07
EP0480038A1 (de) 1992-04-15
WO1991016805A1 (en) 1991-10-31
DE69031039T2 (de) 1997-11-06

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