DE69028440T2 - Mehrkammer-Vakuumvorrichtung mit abgestuften Vakuumniveaus zur Behandlung von Halbleiterwafern - Google Patents

Mehrkammer-Vakuumvorrichtung mit abgestuften Vakuumniveaus zur Behandlung von Halbleiterwafern

Info

Publication number
DE69028440T2
DE69028440T2 DE69028440T DE69028440T DE69028440T2 DE 69028440 T2 DE69028440 T2 DE 69028440T2 DE 69028440 T DE69028440 T DE 69028440T DE 69028440 T DE69028440 T DE 69028440T DE 69028440 T2 DE69028440 T2 DE 69028440T2
Authority
DE
Germany
Prior art keywords
chamber
chambers
wafer
vacuum
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69028440T
Other languages
German (de)
English (en)
Other versions
DE69028440D1 (de
Inventor
Howard Grunes
Dan Maydan
Sasson Somekh
Avi Tepman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=23395873&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69028440(T2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of DE69028440D1 publication Critical patent/DE69028440D1/de
Application granted granted Critical
Publication of DE69028440T2 publication Critical patent/DE69028440T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0452—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers
    • H10P72/0454—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers surrounding a central transfer chamber
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0461—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the presence of two or more transfer chambers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
    • H10P72/3302—Mechanical parts of transfer devices

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
DE69028440T 1989-05-19 1990-05-18 Mehrkammer-Vakuumvorrichtung mit abgestuften Vakuumniveaus zur Behandlung von Halbleiterwafern Expired - Fee Related DE69028440T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US35500889A 1989-05-19 1989-05-19

Publications (2)

Publication Number Publication Date
DE69028440D1 DE69028440D1 (de) 1996-10-17
DE69028440T2 true DE69028440T2 (de) 1997-02-20

Family

ID=23395873

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69028440T Expired - Fee Related DE69028440T2 (de) 1989-05-19 1990-05-18 Mehrkammer-Vakuumvorrichtung mit abgestuften Vakuumniveaus zur Behandlung von Halbleiterwafern

Country Status (4)

Country Link
EP (2) EP0398365B1 (https=)
JP (1) JPH0793348B2 (https=)
KR (1) KR0165112B1 (https=)
DE (1) DE69028440T2 (https=)

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US5259881A (en) * 1991-05-17 1993-11-09 Materials Research Corporation Wafer processing cluster tool batch preheating and degassing apparatus
JP2644912B2 (ja) 1990-08-29 1997-08-25 株式会社日立製作所 真空処理装置及びその運転方法
USRE39756E1 (en) 1990-08-29 2007-08-07 Hitachi, Ltd. Vacuum processing operating method with wafers, substrates and/or semiconductors
USRE39823E1 (en) 1990-08-29 2007-09-11 Hitachi, Ltd. Vacuum processing operating method with wafers, substrates and/or semiconductors
JP2595132B2 (ja) * 1990-11-26 1997-03-26 株式会社日立製作所 真空処理装置
US5643366A (en) * 1994-01-31 1997-07-01 Applied Materials, Inc. Wafer handling within a vacuum chamber using vacuum
KR100382292B1 (ko) * 1995-02-15 2003-07-22 가부시끼가이샤 히다치 세이사꾸쇼 반도체장치의제조방법및반도체제조장치
JP3769802B2 (ja) * 1996-02-09 2006-04-26 株式会社日立製作所 半導体装置の製造方法
DE19628102A1 (de) 1996-07-12 1998-01-15 Bayerische Motoren Werke Ag Vakuumbeschichtungsanlage mit einer Beschichtungskammer und zumindest einer Quellenkammer
US6152070A (en) 1996-11-18 2000-11-28 Applied Materials, Inc. Tandem process chamber
US6235634B1 (en) * 1997-10-08 2001-05-22 Applied Komatsu Technology, Inc. Modular substrate processing system
US6213704B1 (en) 1998-05-20 2001-04-10 Applied Komatsu Technology, Inc. Method and apparatus for substrate transfer and processing
US6517303B1 (en) 1998-05-20 2003-02-11 Applied Komatsu Technology, Inc. Substrate transfer shuttle
US6206176B1 (en) 1998-05-20 2001-03-27 Applied Komatsu Technology, Inc. Substrate transfer shuttle having a magnetic drive
US6176668B1 (en) 1998-05-20 2001-01-23 Applied Komatsu Technology, Inc. In-situ substrate transfer shuttle
US6215897B1 (en) 1998-05-20 2001-04-10 Applied Komatsu Technology, Inc. Automated substrate processing system
US7077159B1 (en) * 1998-12-23 2006-07-18 Applied Materials, Inc. Processing apparatus having integrated pumping system
DE19922167A1 (de) * 1999-05-12 2000-11-16 Wacker Siltronic Halbleitermat Verfahren zur Herstellung einer Halbleiterscheibe
US6440261B1 (en) * 1999-05-25 2002-08-27 Applied Materials, Inc. Dual buffer chamber cluster tool for semiconductor wafer processing
US6298685B1 (en) 1999-11-03 2001-10-09 Applied Materials, Inc. Consecutive deposition system
US6949143B1 (en) 1999-12-15 2005-09-27 Applied Materials, Inc. Dual substrate loadlock process equipment
EP1126508A3 (en) * 2000-02-16 2005-03-30 Applied Materials, Inc. Processing apparatus having integrated pumping system
KR100367455B1 (ko) * 2000-03-21 2003-01-14 일진나노텍 주식회사 탄소나노튜브 합성용 다중 진공챔버 플라즈마화학기상증착장치 및 이 장치를 이용한 탄소나노튜브 합성방법
EP1319243A2 (en) 2000-09-15 2003-06-18 Applied Materials, Inc. Double dual slot load lock for process equipment
KR100375135B1 (ko) * 2000-10-13 2003-03-08 주식회사 에버테크 웨이퍼 프로세스 방법
KR20020071393A (ko) * 2001-03-06 2002-09-12 주식회사 아이피에스 자동연속 웨이퍼가공시스템 및 그를 이용한 웨이퍼가공방법
KR20020072449A (ko) * 2001-03-10 2002-09-16 주식회사 아이피에스 자동연속 웨이퍼가공시스템 및 그를 이용한 웨이퍼가공방법
KR20020076039A (ko) * 2001-03-27 2002-10-09 주식회사 아이피에스 자동연속 웨이퍼가공시스템 및 그를 이용한 웨이퍼가공방법
US6852194B2 (en) * 2001-05-21 2005-02-08 Tokyo Electron Limited Processing apparatus, transferring apparatus and transferring method
JP2002324829A (ja) * 2001-07-13 2002-11-08 Tokyo Electron Ltd 処理システム
JP4821074B2 (ja) * 2001-08-31 2011-11-24 東京エレクトロン株式会社 処理システム
US7316966B2 (en) 2001-09-21 2008-01-08 Applied Materials, Inc. Method for transferring substrates in a load lock chamber
JP4222068B2 (ja) 2003-03-10 2009-02-12 東京エレクトロン株式会社 被処理体の搬送装置
JP3609077B1 (ja) * 2003-07-09 2005-01-12 東京エレクトロン株式会社 高圧熱処理装置
US7207766B2 (en) 2003-10-20 2007-04-24 Applied Materials, Inc. Load lock chamber for large area substrate processing system
US7497414B2 (en) 2004-06-14 2009-03-03 Applied Materials, Inc. Curved slit valve door with flexible coupling
US20060045668A1 (en) * 2004-07-19 2006-03-02 Grabowski Al W System for handling of wafers within a process tool
US7845891B2 (en) 2006-01-13 2010-12-07 Applied Materials, Inc. Decoupled chamber body
US7665951B2 (en) 2006-06-02 2010-02-23 Applied Materials, Inc. Multiple slot load lock chamber and method of operation
US7845618B2 (en) 2006-06-28 2010-12-07 Applied Materials, Inc. Valve door with ball coupling
JP2009062604A (ja) * 2007-09-10 2009-03-26 Tokyo Electron Ltd 真空処理システムおよび基板搬送方法
KR100866094B1 (ko) * 2008-04-28 2008-10-30 주식회사 싸이맥스 독립적으로 구동하는 적층식 이중 아암 로봇
TWI408766B (zh) * 2009-11-12 2013-09-11 日立全球先端科技股份有限公司 Vacuum processing device
US20130192761A1 (en) * 2012-01-31 2013-08-01 Joseph Yudovsky Rotary Substrate Processing System
GB2514974A (en) * 2012-03-30 2014-12-10 Canon Anelva Corp Plasma processing apparatus and substrate processing system
CN104752152B (zh) * 2013-12-29 2018-07-06 北京北方华创微电子装备有限公司 一种沟槽刻蚀方法及刻蚀装置
CN107942918B (zh) * 2017-12-22 2023-04-18 大连华锐重工集团股份有限公司 自适应式干式真空机械泵电控系统及控制方法
JP7391869B2 (ja) 2018-05-15 2023-12-05 エヴァテック・アーゲー 基板真空処理装置及び方法
CN109161867B (zh) * 2018-10-11 2023-08-08 中国科学技术大学 可分离式真空互联系统
US11637030B2 (en) 2019-06-18 2023-04-25 Kla Corporation Multi-stage, multi-zone substrate positioning systems
KR20250000224U (ko) 2023-07-27 2025-02-04 유병만 리본 걸림에 의한 잼 방지 장치

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GB8332394D0 (en) * 1983-12-05 1984-01-11 Pilkington Brothers Plc Coating apparatus
CA1287594C (en) * 1986-04-04 1991-08-13 Miroslav Eror Method and apparatus for handling and processing wafer like materials
US4715764A (en) * 1986-04-28 1987-12-29 Varian Associates, Inc. Gate valve for wafer processing system
GB8709064D0 (en) * 1986-04-28 1987-05-20 Varian Associates Wafer handling arm
WO1987007309A1 (en) * 1986-05-19 1987-12-03 Novellus Systems, Inc. Deposition apparatus with automatic cleaning means and method of use
EP0272141B1 (en) * 1986-12-19 1994-03-02 Applied Materials, Inc. Multiple chamber integrated process system
JPS63157870A (ja) * 1986-12-19 1988-06-30 Anelva Corp 基板処理装置
JPS63303059A (ja) * 1987-05-30 1988-12-09 Tokuda Seisakusho Ltd 真空処理装置

Also Published As

Publication number Publication date
EP0398365A2 (en) 1990-11-22
EP0684630A3 (https=) 1996-01-03
JPH0793348B2 (ja) 1995-10-09
DE69028440D1 (de) 1996-10-17
EP0398365A3 (en) 1991-06-12
KR900019192A (ko) 1990-12-24
KR0165112B1 (ko) 1999-02-01
EP0398365B1 (en) 1996-09-11
JPH0319252A (ja) 1991-01-28
EP0684630A2 (en) 1995-11-29

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8339 Ceased/non-payment of the annual fee