KR900019192A - 반도체 웨이퍼의 다단 진공처리장치 및 방법 - Google Patents
반도체 웨이퍼의 다단 진공처리장치 및 방법Info
- Publication number
- KR900019192A KR900019192A KR1019900007201A KR900007201A KR900019192A KR 900019192 A KR900019192 A KR 900019192A KR 1019900007201 A KR1019900007201 A KR 1019900007201A KR 900007201 A KR900007201 A KR 900007201A KR 900019192 A KR900019192 A KR 900019192A
- Authority
- KR
- South Korea
- Prior art keywords
- processing apparatus
- semiconductor wafer
- vacuum processing
- stage vacuum
- stage
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67167—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers surrounding a central transfer chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67184—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the presence of more than one transfer chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US35500889A | 1989-05-19 | 1989-05-19 | |
US355,008 | 1989-05-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR900019192A true KR900019192A (ko) | 1990-12-24 |
KR0165112B1 KR0165112B1 (ko) | 1999-02-01 |
Family
ID=23395873
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019900007201A KR0165112B1 (ko) | 1989-05-19 | 1990-05-19 | 반도체 웨이퍼의 다단 진공처리장치 및 방법 |
Country Status (4)
Country | Link |
---|---|
EP (2) | EP0398365B1 (ko) |
JP (1) | JPH0793348B2 (ko) |
KR (1) | KR0165112B1 (ko) |
DE (1) | DE69028440T2 (ko) |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5259881A (en) * | 1991-05-17 | 1993-11-09 | Materials Research Corporation | Wafer processing cluster tool batch preheating and degassing apparatus |
JP2644912B2 (ja) | 1990-08-29 | 1997-08-25 | 株式会社日立製作所 | 真空処理装置及びその運転方法 |
USRE39756E1 (en) | 1990-08-29 | 2007-08-07 | Hitachi, Ltd. | Vacuum processing operating method with wafers, substrates and/or semiconductors |
USRE39824E1 (en) | 1990-08-29 | 2007-09-11 | Hitachi, Ltd. | Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors |
JP2595132B2 (ja) * | 1990-11-26 | 1997-03-26 | 株式会社日立製作所 | 真空処理装置 |
US5643366A (en) * | 1994-01-31 | 1997-07-01 | Applied Materials, Inc. | Wafer handling within a vacuum chamber using vacuum |
WO1996025760A1 (fr) * | 1995-02-15 | 1996-08-22 | Hitachi, Ltd. | Procede et machine de fabrication de semiconducteurs |
JP3769802B2 (ja) * | 1996-02-09 | 2006-04-26 | 株式会社日立製作所 | 半導体装置の製造方法 |
DE19628102A1 (de) * | 1996-07-12 | 1998-01-15 | Bayerische Motoren Werke Ag | Vakuumbeschichtungsanlage mit einer Beschichtungskammer und zumindest einer Quellenkammer |
US6152070A (en) | 1996-11-18 | 2000-11-28 | Applied Materials, Inc. | Tandem process chamber |
US6235634B1 (en) * | 1997-10-08 | 2001-05-22 | Applied Komatsu Technology, Inc. | Modular substrate processing system |
US6517303B1 (en) | 1998-05-20 | 2003-02-11 | Applied Komatsu Technology, Inc. | Substrate transfer shuttle |
US6176668B1 (en) | 1998-05-20 | 2001-01-23 | Applied Komatsu Technology, Inc. | In-situ substrate transfer shuttle |
US6206176B1 (en) | 1998-05-20 | 2001-03-27 | Applied Komatsu Technology, Inc. | Substrate transfer shuttle having a magnetic drive |
US6213704B1 (en) | 1998-05-20 | 2001-04-10 | Applied Komatsu Technology, Inc. | Method and apparatus for substrate transfer and processing |
US7077159B1 (en) | 1998-12-23 | 2006-07-18 | Applied Materials, Inc. | Processing apparatus having integrated pumping system |
DE19922167A1 (de) * | 1999-05-12 | 2000-11-16 | Wacker Siltronic Halbleitermat | Verfahren zur Herstellung einer Halbleiterscheibe |
US6440261B1 (en) * | 1999-05-25 | 2002-08-27 | Applied Materials, Inc. | Dual buffer chamber cluster tool for semiconductor wafer processing |
US6298685B1 (en) | 1999-11-03 | 2001-10-09 | Applied Materials, Inc. | Consecutive deposition system |
EP1126508A3 (en) * | 2000-02-16 | 2005-03-30 | Applied Materials, Inc. | Processing apparatus having integrated pumping system |
KR100367455B1 (ko) * | 2000-03-21 | 2003-01-14 | 일진나노텍 주식회사 | 탄소나노튜브 합성용 다중 진공챔버 플라즈마화학기상증착장치 및 이 장치를 이용한 탄소나노튜브 합성방법 |
KR100375135B1 (ko) * | 2000-10-13 | 2003-03-08 | 주식회사 에버테크 | 웨이퍼 프로세스 방법 |
KR20020071393A (ko) * | 2001-03-06 | 2002-09-12 | 주식회사 아이피에스 | 자동연속 웨이퍼가공시스템 및 그를 이용한 웨이퍼가공방법 |
KR20020072449A (ko) * | 2001-03-10 | 2002-09-16 | 주식회사 아이피에스 | 자동연속 웨이퍼가공시스템 및 그를 이용한 웨이퍼가공방법 |
KR20020076039A (ko) * | 2001-03-27 | 2002-10-09 | 주식회사 아이피에스 | 자동연속 웨이퍼가공시스템 및 그를 이용한 웨이퍼가공방법 |
US6852194B2 (en) * | 2001-05-21 | 2005-02-08 | Tokyo Electron Limited | Processing apparatus, transferring apparatus and transferring method |
JP2002324829A (ja) * | 2001-07-13 | 2002-11-08 | Tokyo Electron Ltd | 処理システム |
JP4821074B2 (ja) * | 2001-08-31 | 2011-11-24 | 東京エレクトロン株式会社 | 処理システム |
US7316966B2 (en) | 2001-09-21 | 2008-01-08 | Applied Materials, Inc. | Method for transferring substrates in a load lock chamber |
JP4222068B2 (ja) | 2003-03-10 | 2009-02-12 | 東京エレクトロン株式会社 | 被処理体の搬送装置 |
JP3609077B1 (ja) * | 2003-07-09 | 2005-01-12 | 東京エレクトロン株式会社 | 高圧熱処理装置 |
US7207766B2 (en) | 2003-10-20 | 2007-04-24 | Applied Materials, Inc. | Load lock chamber for large area substrate processing system |
US20060045668A1 (en) * | 2004-07-19 | 2006-03-02 | Grabowski Al W | System for handling of wafers within a process tool |
US7845891B2 (en) | 2006-01-13 | 2010-12-07 | Applied Materials, Inc. | Decoupled chamber body |
US7665951B2 (en) | 2006-06-02 | 2010-02-23 | Applied Materials, Inc. | Multiple slot load lock chamber and method of operation |
US7845618B2 (en) | 2006-06-28 | 2010-12-07 | Applied Materials, Inc. | Valve door with ball coupling |
JP2009062604A (ja) * | 2007-09-10 | 2009-03-26 | Tokyo Electron Ltd | 真空処理システムおよび基板搬送方法 |
KR100866094B1 (ko) * | 2008-04-28 | 2008-10-30 | 주식회사 싸이맥스 | 독립적으로 구동하는 적층식 이중 아암 로봇 |
TWI532114B (zh) * | 2009-11-12 | 2016-05-01 | Hitachi High Tech Corp | Vacuum processing device and operation method of vacuum processing device |
US20130192761A1 (en) * | 2012-01-31 | 2013-08-01 | Joseph Yudovsky | Rotary Substrate Processing System |
GB2514974A (en) * | 2012-03-30 | 2014-12-10 | Canon Anelva Corp | Plasma processing apparatus and substrate processing system |
CN104752152B (zh) * | 2013-12-29 | 2018-07-06 | 北京北方华创微电子装备有限公司 | 一种沟槽刻蚀方法及刻蚀装置 |
CN107942918B (zh) * | 2017-12-22 | 2023-04-18 | 大连华锐重工集团股份有限公司 | 自适应式干式真空机械泵电控系统及控制方法 |
CN109161867B (zh) * | 2018-10-11 | 2023-08-08 | 中国科学技术大学 | 可分离式真空互联系统 |
US11637030B2 (en) | 2019-06-18 | 2023-04-25 | Kla Corporation | Multi-stage, multi-zone substrate positioning systems |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3788973T2 (de) * | 1986-04-04 | 1994-08-11 | Materials Research Corp | Verfahren und Vorrichtung zur Handhabung und Behandlung von scheibenartigen Materialien. |
US4715764A (en) * | 1986-04-28 | 1987-12-29 | Varian Associates, Inc. | Gate valve for wafer processing system |
WO1987007309A1 (en) * | 1986-05-19 | 1987-12-03 | Novellus Systems, Inc. | Deposition apparatus with automatic cleaning means and method of use |
JPS63157870A (ja) * | 1986-12-19 | 1988-06-30 | Anelva Corp | 基板処理装置 |
DE3789212T2 (de) * | 1986-12-19 | 1994-06-01 | Applied Materials Inc | Integriertes Bearbeitungssystem mit Vielfachkammer. |
-
1990
- 1990-05-10 JP JP12103990A patent/JPH0793348B2/ja not_active Expired - Lifetime
- 1990-05-18 EP EP90109477A patent/EP0398365B1/en not_active Revoked
- 1990-05-18 DE DE69028440T patent/DE69028440T2/de not_active Expired - Fee Related
- 1990-05-18 EP EP95112690A patent/EP0684630A2/en not_active Withdrawn
- 1990-05-19 KR KR1019900007201A patent/KR0165112B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0165112B1 (ko) | 1999-02-01 |
EP0398365A2 (en) | 1990-11-22 |
JPH0319252A (ja) | 1991-01-28 |
DE69028440D1 (de) | 1996-10-17 |
EP0684630A2 (en) | 1995-11-29 |
EP0684630A3 (ko) | 1996-01-03 |
EP0398365A3 (en) | 1991-06-12 |
DE69028440T2 (de) | 1997-02-20 |
JPH0793348B2 (ja) | 1995-10-09 |
EP0398365B1 (en) | 1996-09-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
O035 | Opposition [patent]: request for opposition | ||
O132 | Decision on opposition [patent] | ||
O074 | Maintenance of registration after opposition [patent]: final registration of opposition | ||
FPAY | Annual fee payment |
Payment date: 20120830 Year of fee payment: 15 |
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EXPY | Expiration of term |