DE69027602D1 - Energiefilter für Ladungsträgervorrichtung - Google Patents
Energiefilter für LadungsträgervorrichtungInfo
- Publication number
- DE69027602D1 DE69027602D1 DE69027602T DE69027602T DE69027602D1 DE 69027602 D1 DE69027602 D1 DE 69027602D1 DE 69027602 T DE69027602 T DE 69027602T DE 69027602 T DE69027602 T DE 69027602T DE 69027602 D1 DE69027602 D1 DE 69027602D1
- Authority
- DE
- Germany
- Prior art keywords
- charge carrier
- carrier device
- energy filter
- filter
- energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002800 charge carrier Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/2602—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/282—Determination of microscope properties
- H01J2237/2823—Resolution
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP90202152A EP0470299B1 (de) | 1990-08-08 | 1990-08-08 | Energiefilter für Ladungsträgervorrichtung |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69027602D1 true DE69027602D1 (de) | 1996-08-01 |
DE69027602T2 DE69027602T2 (de) | 1997-01-23 |
Family
ID=8205096
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69027602T Expired - Lifetime DE69027602T2 (de) | 1990-08-08 | 1990-08-08 | Energiefilter für Ladungsträgervorrichtung |
Country Status (4)
Country | Link |
---|---|
US (1) | US5126565A (de) |
EP (1) | EP0470299B1 (de) |
JP (1) | JP3299554B2 (de) |
DE (1) | DE69027602T2 (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0538938B1 (de) * | 1991-10-24 | 1996-08-28 | Koninklijke Philips Electronics N.V. | Elektronenstrahlvorrichtung |
US5466933A (en) * | 1992-11-23 | 1995-11-14 | Surface Interface, Inc. | Dual electron analyzer |
US5444243A (en) * | 1993-09-01 | 1995-08-22 | Hitachi, Ltd. | Wien filter apparatus with hyperbolic surfaces |
JP3363718B2 (ja) * | 1995-11-28 | 2003-01-08 | 日本電子株式会社 | オメガ型エネルギーフィルター |
DE19633496B4 (de) * | 1996-08-20 | 2006-06-08 | Ceos Corrected Electron Optical Systems Gmbh | Monchromator für die Elektronenoptik, insbesondere Elketronenmikroskopie |
JPH10125267A (ja) * | 1996-10-16 | 1998-05-15 | Jeol Ltd | エネルギーフィルタ |
JP3400284B2 (ja) * | 1997-02-27 | 2003-04-28 | 日本電子株式会社 | オメガ型エネルギーフィルタ及び該フィルタを組み込んだ電子顕微鏡 |
US6183817B1 (en) * | 1997-05-29 | 2001-02-06 | Michael S. Gersonde | Method and apparatus for direct write fabrication of nanostructures |
RU2129294C1 (ru) * | 1998-05-22 | 1999-04-20 | Гурович Борис Аронович | Способ получения рисунка |
US6410924B1 (en) * | 1999-11-16 | 2002-06-25 | Schlumberger Technologies, Inc. | Energy filtered focused ion beam column |
DE10020382A1 (de) * | 2000-04-26 | 2001-10-31 | Ceos Gmbh | Strahlerzeugungssystem für Elektronen oder Ionenstrahlen hoher Monochromasie oder hoher Stromdichte |
DE10061798A1 (de) * | 2000-12-12 | 2002-06-13 | Leo Elektronenmikroskopie Gmbh | Monochromator für geladene Teilchen |
JP2003297271A (ja) * | 2002-04-03 | 2003-10-17 | Hitachi High-Technologies Corp | モノクロメータ付走査形電子顕微鏡 |
DE10252129A1 (de) | 2002-11-04 | 2004-05-27 | Omicron Nano Technology Gmbh | Energiefilter für elektrisch geladene Teilchen und Verwendung des Energiefilters |
JP4074185B2 (ja) * | 2002-12-17 | 2008-04-09 | 日本電子株式会社 | エネルギーフィルタ及び電子顕微鏡 |
JP3867048B2 (ja) * | 2003-01-08 | 2007-01-10 | 株式会社日立ハイテクノロジーズ | モノクロメータ及びそれを用いた走査電子顕微鏡 |
PL368785A1 (pl) * | 2004-06-28 | 2006-01-09 | Krzysztof Grzelakowski | Obrazujący filtr energii dla elektronów i innych elektrycznie naładowanych cząstek oraz sposób filtrowania energii elektronów i innych elektrycznie naładowanych cząstek w urządzeniach elektrooptycznych za pomocą obrazującego filtru energii |
US7439520B2 (en) * | 2005-01-24 | 2008-10-21 | Applied Biosystems Inc. | Ion optics systems |
US7351958B2 (en) * | 2005-01-24 | 2008-04-01 | Applera Corporation | Ion optics systems |
US7394069B1 (en) | 2005-08-30 | 2008-07-01 | Kla-Tencor Technologies Corporation | Large-field scanning of charged particles |
JP4685637B2 (ja) * | 2006-01-05 | 2011-05-18 | 株式会社日立ハイテクノロジーズ | モノクロメータを備えた走査電子顕微鏡 |
DE102007024353B4 (de) | 2007-05-24 | 2009-04-16 | Ceos Corrected Electron Optical Systems Gmbh | Monochromator und Strahlquelle mit Monochromator |
EP2128885A1 (de) | 2008-05-26 | 2009-12-02 | FEI Company | Quelle für geladene Teilchen mit integriertem Energiefilter |
EP2453461A1 (de) | 2010-11-10 | 2012-05-16 | FEI Company | Quelle für geladene Teilchen mit integriertem elektrostatischen Energiefilter |
US8183526B1 (en) | 2011-02-11 | 2012-05-22 | Electron Optica | Mirror monochromator for charged particle beam apparatus |
US8334508B1 (en) | 2011-02-22 | 2012-12-18 | Electron Optica, Inc. | Mirror energy filter for electron beam apparatus |
US9111715B2 (en) | 2011-11-08 | 2015-08-18 | Fei Company | Charged particle energy filter |
US9767984B2 (en) | 2014-09-30 | 2017-09-19 | Fei Company | Chicane blanker assemblies for charged particle beam systems and methods of using the same |
DE102014019408B4 (de) * | 2014-12-22 | 2017-02-09 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Abbildende Energiefiltervorrichtung und Verfahren zu deren Betrieb |
EP3203493B1 (de) * | 2016-02-02 | 2018-10-03 | FEI Company | Ladungsträger-mikroskop mit astigmatismuskompensation und energieauswahl |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3061720A (en) * | 1960-02-29 | 1962-10-30 | Ewald Heinz | Spectrograph |
GB1332207A (en) * | 1971-05-07 | 1973-10-03 | Ass Elect Ind | Apparatus for charged particle spectroscopy |
DE3014785C2 (de) * | 1980-04-17 | 1983-04-07 | Leybold-Heraeus GmbH, 5000 Köln | Monochromator für geladene Teilchen |
DE3702696A1 (de) * | 1987-01-30 | 1988-08-11 | Kernforschungsanlage Juelich | Verfahren zur elektronenstrahl-fuehrung mit energieselektion und elektronenspektrometer |
-
1990
- 1990-08-08 EP EP90202152A patent/EP0470299B1/de not_active Expired - Lifetime
- 1990-08-08 DE DE69027602T patent/DE69027602T2/de not_active Expired - Lifetime
-
1991
- 1991-08-06 US US07/741,030 patent/US5126565A/en not_active Expired - Lifetime
- 1991-08-06 JP JP21935991A patent/JP3299554B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69027602T2 (de) | 1997-01-23 |
JP3299554B2 (ja) | 2002-07-08 |
JPH04233145A (ja) | 1992-08-21 |
EP0470299B1 (de) | 1996-06-26 |
US5126565A (en) | 1992-06-30 |
EP0470299A1 (de) | 1992-02-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8327 | Change in the person/name/address of the patent owner |
Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N |
|
8327 | Change in the person/name/address of the patent owner |
Owner name: FEI CO., HILLSBORO, OREG., US |