DE69027602D1 - Energiefilter für Ladungsträgervorrichtung - Google Patents

Energiefilter für Ladungsträgervorrichtung

Info

Publication number
DE69027602D1
DE69027602D1 DE69027602T DE69027602T DE69027602D1 DE 69027602 D1 DE69027602 D1 DE 69027602D1 DE 69027602 T DE69027602 T DE 69027602T DE 69027602 T DE69027602 T DE 69027602T DE 69027602 D1 DE69027602 D1 DE 69027602D1
Authority
DE
Germany
Prior art keywords
charge carrier
carrier device
energy filter
filter
energy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69027602T
Other languages
English (en)
Other versions
DE69027602T2 (de
Inventor
Harald Rose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEI Co
Original Assignee
Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronics NV filed Critical Philips Electronics NV
Publication of DE69027602D1 publication Critical patent/DE69027602D1/de
Application granted granted Critical
Publication of DE69027602T2 publication Critical patent/DE69027602T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/484—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with spherical mirrors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2602—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/282—Determination of microscope properties
    • H01J2237/2823—Resolution
DE69027602T 1990-08-08 1990-08-08 Energiefilter für Ladungsträgervorrichtung Expired - Lifetime DE69027602T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90202152A EP0470299B1 (de) 1990-08-08 1990-08-08 Energiefilter für Ladungsträgervorrichtung

Publications (2)

Publication Number Publication Date
DE69027602D1 true DE69027602D1 (de) 1996-08-01
DE69027602T2 DE69027602T2 (de) 1997-01-23

Family

ID=8205096

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69027602T Expired - Lifetime DE69027602T2 (de) 1990-08-08 1990-08-08 Energiefilter für Ladungsträgervorrichtung

Country Status (4)

Country Link
US (1) US5126565A (de)
EP (1) EP0470299B1 (de)
JP (1) JP3299554B2 (de)
DE (1) DE69027602T2 (de)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69213157T2 (de) * 1991-10-24 1997-03-06 Philips Electronics Nv Elektronenstrahlvorrichtung
US5466933A (en) * 1992-11-23 1995-11-14 Surface Interface, Inc. Dual electron analyzer
US5444243A (en) * 1993-09-01 1995-08-22 Hitachi, Ltd. Wien filter apparatus with hyperbolic surfaces
JP3363718B2 (ja) * 1995-11-28 2003-01-08 日本電子株式会社 オメガ型エネルギーフィルター
DE19633496B4 (de) * 1996-08-20 2006-06-08 Ceos Corrected Electron Optical Systems Gmbh Monchromator für die Elektronenoptik, insbesondere Elketronenmikroskopie
JPH10125267A (ja) * 1996-10-16 1998-05-15 Jeol Ltd エネルギーフィルタ
JP3400284B2 (ja) * 1997-02-27 2003-04-28 日本電子株式会社 オメガ型エネルギーフィルタ及び該フィルタを組み込んだ電子顕微鏡
US6183817B1 (en) * 1997-05-29 2001-02-06 Michael S. Gersonde Method and apparatus for direct write fabrication of nanostructures
RU2129294C1 (ru) * 1998-05-22 1999-04-20 Гурович Борис Аронович Способ получения рисунка
US6410924B1 (en) * 1999-11-16 2002-06-25 Schlumberger Technologies, Inc. Energy filtered focused ion beam column
DE10020382A1 (de) * 2000-04-26 2001-10-31 Ceos Gmbh Strahlerzeugungssystem für Elektronen oder Ionenstrahlen hoher Monochromasie oder hoher Stromdichte
DE10061798A1 (de) * 2000-12-12 2002-06-13 Leo Elektronenmikroskopie Gmbh Monochromator für geladene Teilchen
JP2003297271A (ja) * 2002-04-03 2003-10-17 Hitachi High-Technologies Corp モノクロメータ付走査形電子顕微鏡
DE10252129A1 (de) * 2002-11-04 2004-05-27 Omicron Nano Technology Gmbh Energiefilter für elektrisch geladene Teilchen und Verwendung des Energiefilters
JP4074185B2 (ja) * 2002-12-17 2008-04-09 日本電子株式会社 エネルギーフィルタ及び電子顕微鏡
JP3867048B2 (ja) 2003-01-08 2007-01-10 株式会社日立ハイテクノロジーズ モノクロメータ及びそれを用いた走査電子顕微鏡
PL368785A1 (pl) * 2004-06-28 2006-01-09 Krzysztof Grzelakowski Obrazujący filtr energii dla elektronów i innych elektrycznie naładowanych cząstek oraz sposób filtrowania energii elektronów i innych elektrycznie naładowanych cząstek w urządzeniach elektrooptycznych za pomocą obrazującego filtru energii
US7351958B2 (en) * 2005-01-24 2008-04-01 Applera Corporation Ion optics systems
US7439520B2 (en) * 2005-01-24 2008-10-21 Applied Biosystems Inc. Ion optics systems
US7394069B1 (en) 2005-08-30 2008-07-01 Kla-Tencor Technologies Corporation Large-field scanning of charged particles
JP4685637B2 (ja) * 2006-01-05 2011-05-18 株式会社日立ハイテクノロジーズ モノクロメータを備えた走査電子顕微鏡
DE102007024353B4 (de) 2007-05-24 2009-04-16 Ceos Corrected Electron Optical Systems Gmbh Monochromator und Strahlquelle mit Monochromator
EP2128885A1 (de) 2008-05-26 2009-12-02 FEI Company Quelle für geladene Teilchen mit integriertem Energiefilter
EP2453461A1 (de) 2010-11-10 2012-05-16 FEI Company Quelle für geladene Teilchen mit integriertem elektrostatischen Energiefilter
US8183526B1 (en) 2011-02-11 2012-05-22 Electron Optica Mirror monochromator for charged particle beam apparatus
US8334508B1 (en) 2011-02-22 2012-12-18 Electron Optica, Inc. Mirror energy filter for electron beam apparatus
US9111715B2 (en) 2011-11-08 2015-08-18 Fei Company Charged particle energy filter
US9767984B2 (en) 2014-09-30 2017-09-19 Fei Company Chicane blanker assemblies for charged particle beam systems and methods of using the same
DE102014019408B4 (de) * 2014-12-22 2017-02-09 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Abbildende Energiefiltervorrichtung und Verfahren zu deren Betrieb
EP3203493B1 (de) * 2016-02-02 2018-10-03 FEI Company Ladungsträger-mikroskop mit astigmatismuskompensation und energieauswahl

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3061720A (en) * 1960-02-29 1962-10-30 Ewald Heinz Spectrograph
GB1332207A (en) * 1971-05-07 1973-10-03 Ass Elect Ind Apparatus for charged particle spectroscopy
DE3014785C2 (de) * 1980-04-17 1983-04-07 Leybold-Heraeus GmbH, 5000 Köln Monochromator für geladene Teilchen
DE3702696A1 (de) * 1987-01-30 1988-08-11 Kernforschungsanlage Juelich Verfahren zur elektronenstrahl-fuehrung mit energieselektion und elektronenspektrometer

Also Published As

Publication number Publication date
JPH04233145A (ja) 1992-08-21
EP0470299B1 (de) 1996-06-26
US5126565A (en) 1992-06-30
JP3299554B2 (ja) 2002-07-08
DE69027602T2 (de) 1997-01-23
EP0470299A1 (de) 1992-02-12

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: KONINKLIJKE PHILIPS ELECTRONICS N.V., EINDHOVEN, N

8327 Change in the person/name/address of the patent owner

Owner name: FEI CO., HILLSBORO, OREG., US