DE69024207T2 - Struktur eines piezoelektrischen resonators aus einer ultradünnen schicht - Google Patents

Struktur eines piezoelektrischen resonators aus einer ultradünnen schicht

Info

Publication number
DE69024207T2
DE69024207T2 DE69024207T DE69024207T DE69024207T2 DE 69024207 T2 DE69024207 T2 DE 69024207T2 DE 69024207 T DE69024207 T DE 69024207T DE 69024207 T DE69024207 T DE 69024207T DE 69024207 T2 DE69024207 T2 DE 69024207T2
Authority
DE
Germany
Prior art keywords
resonator
rib
housing
ultra
edge part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69024207T
Other languages
German (de)
English (en)
Other versions
DE69024207D1 (de
Inventor
Osamu Ishii
Takebumi Kurosaki
Takao Morita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Communication Equipment Co Ltd
Original Assignee
Toyo Communication Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Communication Equipment Co Ltd filed Critical Toyo Communication Equipment Co Ltd
Application granted granted Critical
Publication of DE69024207D1 publication Critical patent/DE69024207D1/de
Publication of DE69024207T2 publication Critical patent/DE69024207T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
DE69024207T 1990-02-09 1990-10-02 Struktur eines piezoelektrischen resonators aus einer ultradünnen schicht Expired - Fee Related DE69024207T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP02029935A JP3102869B2 (ja) 1990-02-09 1990-02-09 超薄板圧電共振子の構造
PCT/JP1990/001273 WO1991012662A1 (fr) 1990-02-09 1990-10-02 Structure d'un resonateur piezoelectrique a couche ultra-mince

Publications (2)

Publication Number Publication Date
DE69024207D1 DE69024207D1 (de) 1996-01-25
DE69024207T2 true DE69024207T2 (de) 1996-05-02

Family

ID=12289845

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69024207T Expired - Fee Related DE69024207T2 (de) 1990-02-09 1990-10-02 Struktur eines piezoelektrischen resonators aus einer ultradünnen schicht

Country Status (6)

Country Link
US (1) US5218328A (OSRAM)
EP (2) EP0468051B1 (OSRAM)
JP (1) JP3102869B2 (OSRAM)
KR (1) KR940011487B1 (OSRAM)
DE (1) DE69024207T2 (OSRAM)
WO (1) WO1991012662A1 (OSRAM)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3653107B2 (ja) 1994-03-14 2005-05-25 株式会社ルネサステクノロジ 半導体装置およびその製造方法
JP2976842B2 (ja) 1995-04-20 1999-11-10 日本電気株式会社 半導体記憶装置の製造方法
US5617065A (en) * 1995-06-29 1997-04-01 Motorola, Inc. Filter using enhanced quality factor resonator and method
AU2001269528A1 (en) * 2000-07-17 2002-01-30 Nagaura, Kumiko Piezoelectric device and acousto-electric transducer and method for manufacturing the same
JP2004080711A (ja) * 2002-08-22 2004-03-11 Nippon Dempa Kogyo Co Ltd 水晶振動子の保持構造
US7098574B2 (en) * 2002-11-08 2006-08-29 Toyo Communication Equipment Co., Ltd. Piezoelectric resonator and method for manufacturing the same
RU2234186C1 (ru) * 2003-04-24 2004-08-10 Мацак Андрей Николаевич Высокочастотный пьезоэлемент
US7568377B2 (en) * 2005-07-28 2009-08-04 University Of South Florida High frequency thickness shear mode acoustic wave sensor for gas and organic vapor detection
JP2008078717A (ja) * 2006-09-19 2008-04-03 Nec Tokin Corp ノイズフィルタおよびスイッチング電源
CN102498666B (zh) * 2009-09-18 2015-10-14 株式会社大真空 压电振动片以及压电振动片的制造方法
CN116248068B (zh) * 2022-09-28 2024-03-08 泰晶科技股份有限公司 一种超高频at切石英晶片及制造方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3453458A (en) * 1965-04-19 1969-07-01 Clevite Corp Resonator supporting structure
US3694677A (en) * 1971-03-03 1972-09-26 Us Army Vhf-uhf piezoelectric resonators
JPS5312292A (en) * 1976-07-21 1978-02-03 Seiko Instr & Electronics Ltd Thickness slide crystal vibrator
JPS54107293A (en) * 1978-02-10 1979-08-22 Nec Corp Crystal oscillator
FR2527865A1 (fr) * 1982-06-01 1983-12-02 Cepe Resonateur piezo-electrique a haute frequence et son procede de fabrication
JPS60232710A (ja) * 1984-05-01 1985-11-19 Murata Mfg Co Ltd 圧電振動子
JPS613513A (ja) * 1984-06-18 1986-01-09 Nippon Dempa Kogyo Co Ltd 圧電振動子
JP2643180B2 (ja) * 1987-09-21 1997-08-20 日本電気株式会社 モノリシック集積回路

Also Published As

Publication number Publication date
EP0644652A2 (en) 1995-03-22
US5218328A (en) 1993-06-08
JP3102869B2 (ja) 2000-10-23
EP0468051A4 (en) 1992-05-13
EP0468051A1 (en) 1992-01-29
EP0468051B1 (en) 1995-12-13
KR920702072A (ko) 1992-08-12
JPH03235408A (ja) 1991-10-21
KR940011487B1 (ko) 1994-12-19
DE69024207D1 (de) 1996-01-25
WO1991012662A1 (fr) 1991-08-22
EP0644652A3 (OSRAM) 1995-04-05

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee